非晶硅太阳电池双室沉积装置沉积室及加热体的设计

介绍国家“七五”攻关项目——非晶硅太阳电池沉积室及加热体设计时，在考虑满足工艺要求的使用温度为２５０°Ｃ的情况下，没有搬用国内外类似结构，而是通过实验采用最廉价的不锈钢片作为加热体，沉积室采用内热式。加热体做成活结构便于装拆，加热体外不用绝缘材料，使加热体简单、易造、成本降低。

一种高效沉积反应室的设计

利用Arrhenius公式对化学气相沉积的反应进行研究 ,设计了一种低压热化学气相沉积 (LPCVD)高效沉积反应室。在料管的下方与衬底的上方间安放漏斗型筛板 ,在工艺中有效地提高了氢气的分压 ,并有利于衬底温度的提高 ,加快了沉积速率。通过对设计前后钨薄膜的金相组织对比分析后发现 ,较高的沉积速率可以使沉积薄膜晶粒细小 ,结构致密 ,但薄膜与衬底附着力较差 ,提高衬底温度可有效地提高薄膜与衬底附着力 ,以弥补因较高的沉积速率带来的薄膜与衬底附着力较差的问题 ,提高薄膜质量。

线列式分室连续PECVD系统制备弱光非晶硅太阳电池的研究

从非晶硅太阳电池在弱光条件下工作机理的特点出发,研究了不同工艺条件对电池特性参数的影响,介绍了自主研制的先进的线列式分室连续 PECVD 系统及工艺技术,分析了在该设备上制造出的高质量弱光非晶硅太阳电池的性能.实验结果表明,该工艺技术能够有效提高太阳电池性能质量.

专利名称：在扫描探针显微镜悬臂及其针尖上沉积薄膜的方法

一种利用荷能团簇在扫描探针显微镜悬臂及其针尖上沉积薄膜的方法，包括下列步骤：溅射室的溅射靶架放置溅射靶材；在沉积室的靶架上粘贴扫描探针显微镜（AFM）的悬臂，并确保针尖向外；使靶架和待沉积薄膜的AFM悬臂处于一铜屏蔽室中；用两套真空系统同时分别对溅射室和沉积室抽真空；在溅射室中充入惰性气体Ar，使溅室真空度达8～20Pa，

专利名称：卧式多层陶瓷薄膜气相沉积装置

本实用新型公开了一种用于气相沉积的卧式多层陶瓷薄膜气相沉积装置。它包括沉积室、支架以及设置在内支架内的蝶阀、罗茨泵、机械泵，在支架的上部横置有沉积室，沉积室的两端设有封头，在沉积室内部对应设有长方形的上极板和下极板，沉积室上设有观察窗，沉积室的下部通过蝶阀和管道分别连接有罗茨泵和机械泵。

非晶硅薄膜太阳能电池生产过程及关键设备介绍

简述了非晶硅薄膜太阳能电池的基本原理和生产工艺,特别介绍了等离子化学气相沉积(PECVD)反应沉积室四种结构和特点,以及非晶硅薄膜电池生产设备的特点,以及未来发展方向。

表面处理系统和方法

一种表面处理系统，在其中，将用于一沉积反应的气体注入一沉积室中并且施加电能，以便形成在一个或多个表面处理物体上形成沉积层的沉积反应。在其中，所述的沉积室具有多个平行设置的沉积空间和一个用于将所述的表面处理物体输送到每一个沉积空间或在一沉积反应后将所述的表面处理物体从每一个沉积空间输送来的传输单元。

Electrodeposition of aluminum and aluminum-magnesium alloys at room temperature

Electrodeposition of aluminum from benzene-tetrahydrofuran-Al Cl3-Li Al H4 was studied at room temperature. Galvanostatic electrolysis was used to investigate the effect of various parameters on deposit morphology and crystal size, including current density, temperature, molar ratio of benzene/tetrahydrofuran and stirring speed. The deposit microstructure was adjusted by changing the parameters, and the optimum operating conditions were determined. Dense, bright and adherent aluminum coatings were obtained over a wide range of current densities(10-25 m A/cm2), molar ratio of benzene and tetrahydrofuran(4:1 to 7:8) and stirring speeds(200-500 r/min). Smaller grain sizes and well-adhered deposits were obtained at lower temperatures. Aluminum-magnesium alloys could potentially be used as hydrogen storage materials. A novel method for Al-Mg deposition was proposed by using pure Mg anodes in the organic solvents system benzene-tetrahydrofuran-Al Cl3-Li Al H4. XRD shows that the aluminum-magnesium alloys are mainly Al3Mg2 and Al12Mg17.

Impact of Climate Change and Deforestation on Stream Discharge and Sediment Yield in Phu Luong Watershed, Viet Nam

The purpose of this paper is to apply ＂Soil and Water Assessment Tool （SWAT）＂ model to assess the impacts of climate change and deforestation on stream discharge and sediment yield from Phu Luong watershed in Northern Viet Nam. Among the three climate change scenarios B 1, B2, and A2, representing low, medium, and high levels of greenhouse gas emission, respectively were set up for Viet Nam, the B2 scenario was selected for this study. Two land use scenarios （S1-2030 and $2-2050） were formulated combination with climate change in WSAT simulation. In B2 climate change scenario, mean temperature increases 0.7℃（2030） and 1.3 ℃ （2050）; annual rainfall increases 2.1% （2030） and 3.80% （2050） respect to baseline scenario. The results show that the stream discharge is likely to increase in the future during the wet season with increasing threats of sedimentation.

Effect of Gasoline Property on Formation of Intake Valve and Combustion Chamber Deposits

The cleanliness of gasoline is related to its components and properties.All commercial gasoline builds up deposits on the engine's injector,intake valve and combustion chamber,which can significantly lower the engine performance and influence exhaust gas emissions.In this study,the intake valve deposits (IVD) and combustion chamber deposits (CCD) produced from combustion of fuel containing 21 v%—42 v% of aromatics and 8 v%—31 v% of olefins have been studied using Ford engine tests,and the characteristics of deposits were studied by IR spectroscopy,TGA and elemental analysis instrument.The test results have shown that deposit formation depends on the fuel composition,especially the aromatic content in the fuel.It is also observed that there are differences in the values of IVD and CCD measured by IR spectrometry and elemental analyses.

Hydrodynamic processes and depositional styles of glacierassociated deposits in the Moxi basin, Southwest China

This study aims to understand the particle size distribution and depositional styles of glacierassociated deposits in the Moxi basin in southwest China. Based on field surveys, 28 samples from glacier-associated deposits(including glacial till,fluvioglacial, debris flow, river and lake deposits)were collected and tested in the laboratory. The results showed that the glacier-associated deposits can be differentiated based on particle gradation,particle size distribution and accumulated percentages. We evaluated the evolution of a former dammed lake in the Moxi basin based on glacierassociated deposits. The results of this study also indicated that the Moxi Platform was not formed by a single depositional process but is composed of both fluvioglacial and debris flow deposits. This research shows that the depositional style analysis is useful in identifying different glacier-associated deposits in high mountain regions. Moreover, the evaluation of the differences in particle sizes of the glacierassociated deposits is useful in reconstructing geohazard events in periglacial regions, and this information can help in identifying and reducing the potential risks associated with geo-hazards.

Monitoring the Morphology of the Bottom of Streams and Reservoirs Using Electrical Impedance Spectrometry Method

A part of the Earth＇s surface has been formed by the action of running water during geomorphological development. The flow of water is one of the ways of how particles can be eroded, transported and accumulated. If endogenous processes do not work, the surface of the continents would lower to the level close to the ocean surface and the relief would have almost no ruggedness. Recently, there have been talks about the relative classification of deviation of the present state from the ＂original＂ or ＂natural＂ one caused by anthropogeneous effects. The activity of man can manifest itself by pollution, the excessive use of water, a change in the flow regime, and the like. Research into the morphology of the river bottom and the bottom of settling tanks or dam reservoirs is systematically carried out in selected streams and reservoirs by the long-term sampling of bottom sediments. The knowledge of the sediment layer is also important. The EIS method, which was used for measuring, is new for the aforementioned applications. Possibilities of EIS method with new apparatus using for this application were tested in laboratory and in situ. On the basis of interpretation of the electrical conductivity data, a grid of depth data was acquired. These data are characterized by anomalously high and low ＂spots＂ and show morphological changes in the studied area.

Thermal and elemental analysis of the combustion chamber deposits in a large-scale two-stroke marine diesel engine

It is of significance to understand the chemical content of carbon deposits in the large-scale two-stroke(LSTS) marine diesel engine because of adverse effect on the engine performance, oil consumption and emissions. In this work, two different combustion chamber deposits in an LSTS marine diesel engine were studied using thermogravimetry analysis(TGA), elemental analysis(EA) and synchrotron X-ray fluorescence(SXRF). One was on the piston top and the other on the piston land, termed PTCD and PLCD, respectively. For the PTCD sample, the 97% residue in the TGA and 1.4% carbon content in the EA indicated the main compositions of PTCD were metal salts or oxides and ashes, significantly different from the previous findings of the highest carbon content in deposits from the small four stroke engines. The different chemical content between PTCD and PLCD implied higher thermal load in the LSTS marine diesel engine led to a nearly complete thermal decomposition of PTCD. The higher calcium content in PTCD and PLCD indicated the additives of cylinder oil should be the main source of metal content of PTCD and PLCD. Calcium distribution in the SXRF results was indicative of the potential layered structure in PTCD and PLCD. In addition, the appearance of iron on the surface against the piston in PTCD and PLCD indicated iron oxides formation between carbon deposit and piston materials.

Mn-doped SiGe thin films grown by UHV/CVD with room-temperature ferromagnetism and high hole mobility

In this work,silicon-germanium(SiGe)thin films are epitaxially grown on Ge substrates by ultra-high vacuum chemical vapor deposition and then doped with Mn element by ion-implantation and subsequent rapid thermal annealing(RTA).The characterizations show that the epitaxial SiGe thin films are single-crystalline with uniform tensile strain and then become polycrystalline after the ion implantation and following RTA.The magnetization measurements indicate that the annealed thin films exhibit Mn concentration-dependent ferromagnetism up to 309 K and the X-ray magnetic circular dichroism characterizations reveal the spin and orbital magnetic moments from the substitutional Mn element.To minimize the influence of anomalous Hall effect,magneto-transport measurements at a high magnetic field up to 31 T at 300 K are performed to obtain the hole mobility,which reaches a record-high value of~1230 cm^(2)V^(-1)s^(-1),owing to the crystalline quality and tensile strain-induced energy band modulation of the samples.The first demonstration of Mn-doped SiGe thin films with roomtemperature ferromagnetism and high carrier mobility may pave the way for practical semiconductor spintronic applications.

Room-temperature magnetoresistance in a-C:Co/Si system

Three types of a-C:Co/Si samples were fabricated using the pulsed laser deposition: Co2-C98/8i with Co dispersed in the a-C film, Co2-C98/Si with Co segregated at the interface, and a-C/Co/Si with Co continuously distributed at the a-C/Si interface. Both types of Co2-C98/Si samples had the positive bias-voltage-dependent magnetoresistance (MR) at 300 K, and all MRs had saturated behavior. The study on the electrotransport properties indicated that the MR appeared in the diffusion current region, and the mechanism of MR was proposed to be that the applied magnetic field and local random magnetic field caused by the superparamagnetic Co particles modulate the ratio of singlet and triplet spin states, resulting in the MR effect. In addition, the very different physical and structural properties of all samples revealed that Co played a crucial role in the room-temperature positive MR of a-C:Co/Si system.