期刊文献+
共找到11篇文章
< 1 >
每页显示 20 50 100
在蓝宝石、MgO衬底上ZnO波导膜的制备 被引量:3
1
作者 王凤翔 齐俊鹤 +4 位作者 卢菲 刘秀红 李爽 陈志华 宋红莲 《山东建筑大学学报》 2011年第5期411-415,共5页
以ZnO烧结陶瓷为靶材,应用射频磁控溅射技术在(001)蓝宝石、(100)MgO衬底上制备ZnO波导薄膜。利用棱镜耦合、X射线衍射、RBS背散射分析等技术研究了所沉积薄膜的光波导及内部结构信息。结果表明:在两种衬底上所沉积的ZnO薄膜可以形成优... 以ZnO烧结陶瓷为靶材,应用射频磁控溅射技术在(001)蓝宝石、(100)MgO衬底上制备ZnO波导薄膜。利用棱镜耦合、X射线衍射、RBS背散射分析等技术研究了所沉积薄膜的光波导及内部结构信息。结果表明:在两种衬底上所沉积的ZnO薄膜可以形成优良的平面光波导结构;薄膜结晶状况为存在少量其他晶向的c轴择优取向;薄膜含有的Zn及O组分原子数比例为近化学计量比;薄膜的沉积速率受衬底材料表面能作用轻微影响;薄膜的有效折射率较ZnO体材料小且受衬底材料影响。生长在蓝宝石衬底上ZnO薄膜的平均晶粒尺寸较在MgO衬底上的小,且其随膜厚的增加无明显变化,但在MgO衬底上晶粒尺寸则随膜厚的增加有增大趋势。 展开更多
关键词 磁控溅射 蓝宝石 MGO ZNO薄 波导膜
下载PDF
锂铁氧体表面沉积Cu-Ti复合金属波导膜系的工艺 被引量:2
2
作者 陈荣发 戴国钧 +1 位作者 赵毅红 刘炳坤 《真空》 CAS 北大核心 2002年第1期5-7,共3页
采用磁控溅射镀膜方法 ,在锂铁氧体材料表面 ,制备了 Cu- Ti复合金属波导膜系。本文简单介绍了设备的改造特点 ,对整个工艺过程进行了分析研究 ,对制备的 Cu- Ti复合金属波导膜系进行了性能测试 ,结果表明 。
关键词 锂铁氧体 Cu-Ti复合金属波导膜 表面沉积工艺 磁控溅射 软磁材料 工艺
下载PDF
锂铁氧体表面沉积Cu-Ti复合金属波导膜系的工艺分析研究 被引量:1
3
作者 戴国钧 《实验室研究与探索》 CAS 2004年第4期19-20,30,共3页
采用磁控溅射镀膜方法,在锂铁氧体材料表面,制备了Cu-Ti复合金属波导膜系。本文简单介绍了设备的改造特点,对整个工艺过程进行了分析研究,对制备的Cu-Ti复合金属波导膜系进行了性能测试,结果表明,用该工艺所制备的波导膜系性能指标达到... 采用磁控溅射镀膜方法,在锂铁氧体材料表面,制备了Cu-Ti复合金属波导膜系。本文简单介绍了设备的改造特点,对整个工艺过程进行了分析研究,对制备的Cu-Ti复合金属波导膜系进行了性能测试,结果表明,用该工艺所制备的波导膜系性能指标达到微波器件的要求。 展开更多
关键词 磁控溅射镀 锂铁氧体 表面沉积 Cu—Ti复合金属波导膜 性能测试 微波器件 软磁材料
下载PDF
一种交联结构的渐变折射率有机聚合物材料波导膜
4
作者 马于光 刘式墉 +1 位作者 杨柏 沈家骢 《科学通报》 EI CAS CSCD 北大核心 1993年第14期1339-1341,共3页
由于集成光学器件主要是由LiNBO3和Ⅲ—Ⅴ族晶体材料制备的,在这些电光晶体上形成良好性质的波导是很困难的。虽然利用半导体工艺中的扩散和喷涂方法,可以在某些基材上形成波导,但由于特别大的光损耗和进一步集成的困难使得这些方法制... 由于集成光学器件主要是由LiNBO3和Ⅲ—Ⅴ族晶体材料制备的,在这些电光晶体上形成良好性质的波导是很困难的。虽然利用半导体工艺中的扩散和喷涂方法,可以在某些基材上形成波导,但由于特别大的光损耗和进一步集成的困难使得这些方法制备的波导材料的实用化受到限制。对具有良好波导性质,能与不同电光晶体复合的材料进行研究与开发是必要的。聚合物材料在这一领域虽属后来者,却以其相容性好、制备方便。 展开更多
关键词 波导膜 聚合物材料 渐变折射率
原文传递
Analysis of circular-to-circular groove waveguide junction 被引量:1
5
作者 崔立成 杨鸿生 《Journal of Southeast University(English Edition)》 EI CAS 2003年第1期17-21,共5页
Mode matching method is used to analyze the scattering characteristics of thecircular-to-circular groove waveguide junction. Matching the electric fields and magnetic fields atthe boundary of the junction, and multipl... Mode matching method is used to analyze the scattering characteristics of thecircular-to-circular groove waveguide junction. Matching the electric fields and magnetic fields atthe boundary of the junction, and multiplying the mode functions of the circular waveguide andcircular groove waveguide on both sides of the boundary equation, the scattering matrix equation isobtained, the scattering coefficients can be obtained from the equation. Then the scatteringcharacteristics of the iris with circular window in circular groove waveguide are analyzed. At lastthe convergent problem is discussed; when choosing a suitable mode group, convergent numericalresults are obtained, and the frequency response of the iris' scattering coefficients is also given. 展开更多
关键词 circular groove waveguide circular-to-circular groove waveguide junction mode matching method
下载PDF
高性能传感器
6
《发明与创新(大科技)》 2003年第10期46-46,共1页
关键词 气体检测 传感器 灵敏度 波导膜
下载PDF
Interface waves between two piezoelectric half-spaces with a semiconductor film 被引量:1
7
作者 YANGJia-shi ZHOUHong-gang 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2005年第2期90-96,共7页
In this work propagation of anti-plane (SH) waves in two piezoelectric ceramic half-spaces with a thin layer of a semiconducting material between the half-spaces is studied, and wave attenuation and dispersion caused ... In this work propagation of anti-plane (SH) waves in two piezoelectric ceramic half-spaces with a thin layer of a semiconducting material between the half-spaces is studied, and wave attenuation and dispersion caused by semiconduction as well as wave amplification by a biasing electric field are examined. Key words Piezoelectricity - Semiconductor - Wave - Attenuation - Dispersion Document code A CLC number TH11 展开更多
关键词 PIEZOELECTRICITY SEMICONDUCTOR Wave ATTENUATION Dispersion
下载PDF
Loss Measurements on Polymer Thin Film Optical Waveguides
8
作者 MAChang-bao MENGFan-qing 《Semiconductor Photonics and Technology》 CAS 2000年第1期37-39,共3页
A simple setup for the measurement of transmission loss in polymer thin film optical waveguides is described. A new electro-optic polymer film has been prepared. The transmission loss of the film is measured before an... A simple setup for the measurement of transmission loss in polymer thin film optical waveguides is described. A new electro-optic polymer film has been prepared. The transmission loss of the film is measured before and after corona poling. And the loss is determined to be 1.84 dB/cm and 2.14 dB/cm, respectively. 展开更多
关键词 Loss measurement Optical waveguide Polymer thin film
下载PDF
Characterization of DC magnetron sputtering deposited thin films of TiN for SBN/MgO/TiN/Si structural waveguide
9
作者 徐玄前 叶辉 邹桐 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2006年第3期472-476,共5页
Optimal parameters for depositing Titanium nitride (TIN) thin films by DC reactive magnetron sputtering were determined. TiN thin films were deposited on Si (100) substrates by DC reactive magnetron sputtering, at... Optimal parameters for depositing Titanium nitride (TIN) thin films by DC reactive magnetron sputtering were determined. TiN thin films were deposited on Si (100) substrates by DC reactive magnetron sputtering, at different temperatures, different electrical current values, and different N2/Ar ratios. Structural characteristics of TiN thin films were measured by X-ray diffraction (XRD); surface morphology of the thin films was characterized using an atomic force microscope (AFM). The electric resistivity of the TiN films was measured by a four-point probe. In the result, temperature is 500℃, electrical current value is 1.6 A, pure N2 is the reacting gas, TiN thin film has the preferred (200) orientation, resistance is small enough for its use as bottom electrodes. 展开更多
关键词 Titanium nitride (TIN) Thin film SPUTTERING ORIENTATION WAVEGUIDE
下载PDF
2 kW射频板条CO_2激光器电极表面膜特性研究 被引量:3
10
作者 杨卫红 张雪 李建东 《应用激光》 CSCD 北大核心 2019年第1期136-142,共7页
国内高功率射频板条CO_2激光器铜电极表面没有镀介质膜,裸铜在放电程中,表面容易氧化,受激光电子溅射及激光损伤,波导损耗大,影响了激光器的出光效率。针对以上问题,课题组研制了Al+Al_2O_3混合波导介质膜,对该电极膜层进行了成分分析,... 国内高功率射频板条CO_2激光器铜电极表面没有镀介质膜,裸铜在放电程中,表面容易氧化,受激光电子溅射及激光损伤,波导损耗大,影响了激光器的出光效率。针对以上问题,课题组研制了Al+Al_2O_3混合波导介质膜,对该电极膜层进行了成分分析,测试了抗电子溅射能力,检测了膜层表面对CO_2光波反常色散特性。结果表明,镀膜层主要成分为Al和O,原子数Al∶O远大于2∶3,膜层结构为Al+Al_2O_3,满足电极镀膜层结构设计。测试了不同角度下的反射率,在掠入射角为10°~170°时,Al_2O_3膜层对波长10.6μm CO_2光波的最高反射率为85%。Al_2O_3镀膜电极2 kW射频板条CO_2激光器,电光转换效率平均为10.4%;裸铜电极2 kW射频板条CO_2激光器,平均电光转换效率为6.5%。 展开更多
关键词 射频板条CO2激光器 Al+Al2O3波导介质 受激光电子溅射 激光损伤 波导损耗
原文传递
Surface morphology of refractive-index waveguide gratings fabricated in polymer films
11
作者 董毅 宋艳芳 +1 位作者 马磊 高芳芳 《Optoelectronics Letters》 EI 2016年第5期329-332,共4页
The characteristic modifications are reported on the surface of polymeric waveguide film in the process of vol- ume-grating fabrication. The light from a mode-locked 76 MHz femtosecond laser with pulse duration of 200... The characteristic modifications are reported on the surface of polymeric waveguide film in the process of vol- ume-grating fabrication. The light from a mode-locked 76 MHz femtosecond laser with pulse duration of 200 fs and wavelength of 800 nm is focused normal to the surface of the sample. The surface morphology modifications are as- cribed to a fact that surface swelling occurs during the process. Periodic micro-structure is inscribed with increasing incident power. The laser-induced swelling threshold on the grating, which is higher than that of two-photon initiated photo-polymerization (TPIP) (8 mW), is verified to be about 20 mW. It is feasible to enhance the surface smoothness of integrated optics devices for further encapsulation. The variation of modulation depth is studied for different values of incident power and scan spacing. Ablation accompanied with surface swelling appears when the power is higher. By ootimizing the laser carvinR oararneters, hizhly efficient grating devices can be fabricated. 展开更多
关键词 polymerization waveguide swelling polymeric initiated grating encapsulation refractive spacing fabrication
原文传递
上一页 1 下一页 到第
使用帮助 返回顶部