The effect of nickel contamination under rapid thermal processing （RTP） on the magic denuded zone （MDZ） in Czochralski silicon is investigated. It is found that the bulk defects can effectively getter nickel atoms...The effect of nickel contamination under rapid thermal processing （RTP） on the magic denuded zone （MDZ） in Czochralski silicon is investigated. It is found that the bulk defects can effectively getter nickel atoms once the MDZ forms. However,if the silicon sample is initially contaminated with nickel, the MDZ cannot form during the subsequent RTP,and a high density of precipitates occurs near the surface. In conventional IG processes,the DZ can form regardless of the nickel contamination sequence. Based on the facts,we propose that the formation of nickel silicide （Ni3Si） at the surface keeps the concentration of vacancies in the near-surface zone still higher than the critical concentration for oxygen precipitation under the subsequent RTP, which prevents MDZ formation.展开更多
The effect of rapid thermal annealing （RTA） ambient on denuded zone and oxygen precipitates in Czochralski （CZ） silicon wafers is studied in this paper. N2 and a N2/NH3 mixture are used as RTA ambient. It is demon...The effect of rapid thermal annealing （RTA） ambient on denuded zone and oxygen precipitates in Czochralski （CZ） silicon wafers is studied in this paper. N2 and a N2/NH3 mixture are used as RTA ambient. It is demonstrated that a high density of oxygen precipitates and thin denuded zone are obtained in N2/NH3 ambient,while a relatively lower density of oxygen precipitates and thicker denuded zone are observed in N2 ambient. As the RTA duration times increased, the oxygen precipitate density increased and the denuded zone depth decreased. X-ray photoelectron spectroscopy （XPS） data and atomic force microscope （AFM） results show that there RTA process,which can explain the different effect of RTA was a surface nitriding reaction during the N2/NH3 ambient ambient.展开更多
Based on the status and characteristics of Clean Development Mechanism （CDM） renewable energy project and the mode of cyclic economy, aimed at achieving the maximum capacity of carbon sinks in the system, Lvjin Jiay...Based on the status and characteristics of Clean Development Mechanism （CDM） renewable energy project and the mode of cyclic economy, aimed at achieving the maximum capacity of carbon sinks in the system, Lvjin Jiayuan—New Countryside Distripark CDM project in Wuchuan County was taken as an example for developing an interval linear programming （ILP） model to optimize the crops planting scheme and cows breeding scheme by using interval optimal method. The case showed that the optimized crops planting scheme and cows breeding scheme obtained from the optimal model was reasonable with relatively preferable overall performance. In the context of meeting economic benefits and fertilizer, electricity demand, [231 287.8, 273 312.7] t of CO2 could be absorbed and fixed, which had increased by [12.94, 33.46]% compared with the feasibility scheme of case project and provided technical support for making the decision in CDM project.展开更多
Exploited the forecast system of mining damages, which uses the theory of clean-production in coal-areas as guide. Its aims is developing and using coal resource reasonably and reducing the damage to the environment.
文摘The effect of nickel contamination under rapid thermal processing （RTP） on the magic denuded zone （MDZ） in Czochralski silicon is investigated. It is found that the bulk defects can effectively getter nickel atoms once the MDZ forms. However,if the silicon sample is initially contaminated with nickel, the MDZ cannot form during the subsequent RTP,and a high density of precipitates occurs near the surface. In conventional IG processes,the DZ can form regardless of the nickel contamination sequence. Based on the facts,we propose that the formation of nickel silicide （Ni3Si） at the surface keeps the concentration of vacancies in the near-surface zone still higher than the critical concentration for oxygen precipitation under the subsequent RTP, which prevents MDZ formation.
文摘The effect of rapid thermal annealing （RTA） ambient on denuded zone and oxygen precipitates in Czochralski （CZ） silicon wafers is studied in this paper. N2 and a N2/NH3 mixture are used as RTA ambient. It is demonstrated that a high density of oxygen precipitates and thin denuded zone are obtained in N2/NH3 ambient,while a relatively lower density of oxygen precipitates and thicker denuded zone are observed in N2 ambient. As the RTA duration times increased, the oxygen precipitate density increased and the denuded zone depth decreased. X-ray photoelectron spectroscopy （XPS） data and atomic force microscope （AFM） results show that there RTA process,which can explain the different effect of RTA was a surface nitriding reaction during the N2/NH3 ambient ambient.
文摘Based on the status and characteristics of Clean Development Mechanism （CDM） renewable energy project and the mode of cyclic economy, aimed at achieving the maximum capacity of carbon sinks in the system, Lvjin Jiayuan—New Countryside Distripark CDM project in Wuchuan County was taken as an example for developing an interval linear programming （ILP） model to optimize the crops planting scheme and cows breeding scheme by using interval optimal method. The case showed that the optimized crops planting scheme and cows breeding scheme obtained from the optimal model was reasonable with relatively preferable overall performance. In the context of meeting economic benefits and fertilizer, electricity demand, [231 287.8, 273 312.7] t of CO2 could be absorbed and fixed, which had increased by [12.94, 33.46]% compared with the feasibility scheme of case project and provided technical support for making the decision in CDM project.
文摘Exploited the forecast system of mining damages, which uses the theory of clean-production in coal-areas as guide. Its aims is developing and using coal resource reasonably and reducing the damage to the environment.
