Peroxodiphosphate anion （a powerful oxidant） can be formed in a special water-based cleaning agent through an electrochemical reaction on boron-doped diamond electrodes. This electrochemical reaction was applied dur...Peroxodiphosphate anion （a powerful oxidant） can be formed in a special water-based cleaning agent through an electrochemical reaction on boron-doped diamond electrodes. This electrochemical reaction was applied during the oxidation,decomposition, and removal of organic contaminations on a silicon wafer surface, and it was used as the first step in the diamond electrochemical cleaning technique （DECT）. The cleaning effects of DECT were compared with the RCA cleaning technique, including the silicon surface chemical composition that was observed with X-ray photoelectron spectroscopy and the morphology observed with atomic force microscopy. The measurement results show that the silicon surface cleaned by DECT has slightly less organic residue and lower micro-roughness,so the new technique is more effective than the RCA cleaning technique.展开更多
Online compressor wash for six GE LM2500PE engines at a Statoil North Sea offshore field is analyzed. Three engines are generator drivers whilst three engines are compressor drivers. Two of the compressor drive engine...Online compressor wash for six GE LM2500PE engines at a Statoil North Sea offshore field is analyzed. Three engines are generator drivers whilst three engines are compressor drivers. Two of the compressor drive engines are running at peak load （T5.4-control）, hence production rate is limited by the available power from these engines. All the six engines analyzed run continuously without redundancy, hence gas turbine uptime is critical for the field＇s production and economy. The performance and operational experience with on-line wash at different water-to-air ratios and engine loads, as well as economy potentials related to successful on-line wash are given. This work is based on long-term operation with on-line wash, where operational data are collected and performance analyzed, over a 4-5 year period. All engines are operated with four-month intervals between maintenance stops, where off-line crank-wash is performed as well as other necessary maintenance and repairs. On-line wash is performed daily between the maintenance stops at full load （i.e., normal operating load for the subject engine）. To keep the engine as clean as possible and reduce degradation between maintenance stops, both an effective on-line water wash system as well as effective air intake filter system, are critical factors. The overall target is to maintain high engine performance, and extend the interval between maintenance stops through effective on-line wash. It is of vital importance to understand the gas turbine performance deterioration. The trending of its deviation from the engine baseline facilitates load-independent monitoring of the gas turbine＇s condition. Engine response to water injection at different loads and water-to-air ratios, as well as engine response to compressor deterioration is documented and analyzed. Instrument resolution and repeatability are key factors required in order to obtain reliable performance analysis results. Offshore instrumentation on older installations is often limited to the necessary instruments for machine control/protection, and additional instruments for effective performance monitoring and analysis are often missing or, if installed, have less accuracy. As a result of these analyses, a set of monitoring parameters is proposed for effective diagnosis of compressor degradation. Avenues for further research and development are proposed in order to further increase the understanding of the deterioration mechanisms and the gas turbine performance and response.展开更多
Brush scrubber cleaning is widely used for post chemical mechanical polishing(CMP)cleaning in semiconductor manufacturing.In this study,an experimental system based on fluorescence technique and particle-tracking velo...Brush scrubber cleaning is widely used for post chemical mechanical polishing(CMP)cleaning in semiconductor manufacturing.In this study,an experimental system based on fluorescence technique and particle-tracking velocimetry(PTV)technique was employed to characterize the particle removal displacement and velocity in the interface between a transparent copper film and a porous polyvinyl alcohol(PVA)brush during the cleaning process.Several different cleaning conditions including rotation speeds,loading pressure and cleaning agent were examined and the particle removal rate was compared.Elastic and friction removal,hydrodynamic removal and mixed-type removal are the three types of particle removal.Particles with an arc trace and uniform velocity curves were removed by friction and elastic force which were related to the brush load.Particles with a random trace and fluctuant velocity curves were removed by hydrodynamic force which was determined by the brush rotation speed.The increase of particle removal rate(PRR)with brush rotation speed is a logistic function.It is easier to improve PRR by increasing the brush load or by adding surfactant than by increasing the brush rotation speed.展开更多
文摘Peroxodiphosphate anion （a powerful oxidant） can be formed in a special water-based cleaning agent through an electrochemical reaction on boron-doped diamond electrodes. This electrochemical reaction was applied during the oxidation,decomposition, and removal of organic contaminations on a silicon wafer surface, and it was used as the first step in the diamond electrochemical cleaning technique （DECT）. The cleaning effects of DECT were compared with the RCA cleaning technique, including the silicon surface chemical composition that was observed with X-ray photoelectron spectroscopy and the morphology observed with atomic force microscopy. The measurement results show that the silicon surface cleaned by DECT has slightly less organic residue and lower micro-roughness,so the new technique is more effective than the RCA cleaning technique.
文摘Online compressor wash for six GE LM2500PE engines at a Statoil North Sea offshore field is analyzed. Three engines are generator drivers whilst three engines are compressor drivers. Two of the compressor drive engines are running at peak load （T5.4-control）, hence production rate is limited by the available power from these engines. All the six engines analyzed run continuously without redundancy, hence gas turbine uptime is critical for the field＇s production and economy. The performance and operational experience with on-line wash at different water-to-air ratios and engine loads, as well as economy potentials related to successful on-line wash are given. This work is based on long-term operation with on-line wash, where operational data are collected and performance analyzed, over a 4-5 year period. All engines are operated with four-month intervals between maintenance stops, where off-line crank-wash is performed as well as other necessary maintenance and repairs. On-line wash is performed daily between the maintenance stops at full load （i.e., normal operating load for the subject engine）. To keep the engine as clean as possible and reduce degradation between maintenance stops, both an effective on-line water wash system as well as effective air intake filter system, are critical factors. The overall target is to maintain high engine performance, and extend the interval between maintenance stops through effective on-line wash. It is of vital importance to understand the gas turbine performance deterioration. The trending of its deviation from the engine baseline facilitates load-independent monitoring of the gas turbine＇s condition. Engine response to water injection at different loads and water-to-air ratios, as well as engine response to compressor deterioration is documented and analyzed. Instrument resolution and repeatability are key factors required in order to obtain reliable performance analysis results. Offshore instrumentation on older installations is often limited to the necessary instruments for machine control/protection, and additional instruments for effective performance monitoring and analysis are often missing or, if installed, have less accuracy. As a result of these analyses, a set of monitoring parameters is proposed for effective diagnosis of compressor degradation. Avenues for further research and development are proposed in order to further increase the understanding of the deterioration mechanisms and the gas turbine performance and response.
基金supported by the National Natural Science Foundation of China(Grant No.51205006)the Tribology Science Fund of State Key Laboratory of Tribology and the Program for Excellent Talents by the Beijing Ministry of Organization
文摘Brush scrubber cleaning is widely used for post chemical mechanical polishing(CMP)cleaning in semiconductor manufacturing.In this study,an experimental system based on fluorescence technique and particle-tracking velocimetry(PTV)technique was employed to characterize the particle removal displacement and velocity in the interface between a transparent copper film and a porous polyvinyl alcohol(PVA)brush during the cleaning process.Several different cleaning conditions including rotation speeds,loading pressure and cleaning agent were examined and the particle removal rate was compared.Elastic and friction removal,hydrodynamic removal and mixed-type removal are the three types of particle removal.Particles with an arc trace and uniform velocity curves were removed by friction and elastic force which were related to the brush load.Particles with a random trace and fluctuant velocity curves were removed by hydrodynamic force which was determined by the brush rotation speed.The increase of particle removal rate(PRR)with brush rotation speed is a logistic function.It is easier to improve PRR by increasing the brush load or by adding surfactant than by increasing the brush rotation speed.
