Based on the bulk free energy density and the degenerate mobility constructed by the quartic double-well potential function,a phase field model is established to simulate the evolution of intragranular microvoids due ...Based on the bulk free energy density and the degenerate mobility constructed by the quartic double-well potential function,a phase field model is established to simulate the evolution of intragranular microvoids due to surface diffusion in a stress field.The corresponding phase field governing equations are derived.The evolution of elliptical microvoids with different stressesΛ,aspect ratiosβand linewidths hˉis calculated using the mesh adaptation finite element method and the reliability of the procedure is verified.The results show that there exist critical values of the stressΛc,the aspect ratioβc and the linewidth hˉc of intragranular microvoids under equivalent biaxial tensile stress.When Λ≥Λ_(c),β≥β_(c) or h≤h_(c),the elliptical microvoids are instable with an extending crack tip.WhenΛ<Λ_(c),β<β_(c) or hˉ>h_(c),the elliptical microvoids gradually cylindricalize and remain a stable shape.The instability time decreases with increasing the stress or the aspect ratio,while increases with increasing the linewidth.In addition,for the interconnects containing two elliptical voids not far apart,the stress will promote the merging of the voids.展开更多
基金supported by the Natural Science Foundation of Jiangsu Province of China (No. BK20141407)the Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions。
文摘Based on the bulk free energy density and the degenerate mobility constructed by the quartic double-well potential function,a phase field model is established to simulate the evolution of intragranular microvoids due to surface diffusion in a stress field.The corresponding phase field governing equations are derived.The evolution of elliptical microvoids with different stressesΛ,aspect ratiosβand linewidths hˉis calculated using the mesh adaptation finite element method and the reliability of the procedure is verified.The results show that there exist critical values of the stressΛc,the aspect ratioβc and the linewidth hˉc of intragranular microvoids under equivalent biaxial tensile stress.When Λ≥Λ_(c),β≥β_(c) or h≤h_(c),the elliptical microvoids are instable with an extending crack tip.WhenΛ<Λ_(c),β<β_(c) or hˉ>h_(c),the elliptical microvoids gradually cylindricalize and remain a stable shape.The instability time decreases with increasing the stress or the aspect ratio,while increases with increasing the linewidth.In addition,for the interconnects containing two elliptical voids not far apart,the stress will promote the merging of the voids.
