Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to en...Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.展开更多
Mechanics effect of laser thermal stress is a new manufacturing technology, which uses thermal stress by high power laser acted on the surface of metal material to produce stress field. The technologies such as sheet ...Mechanics effect of laser thermal stress is a new manufacturing technology, which uses thermal stress by high power laser acted on the surface of metal material to produce stress field. The technologies such as sheet metal formation by laser thermal stress, measurement by laser scratching and measurement by XRD (X-ray diffraction) are formed based on mechanics effects of laser thermal stress. The mechanisms of sheet metal formation by laser thermal stress, measurement by laser scratching and measurement by XRD are analyzed, and the theory of photo-mechanics manufacturing and detecting technologies based on laser thermal stress is originally put forward, whose experiment is primitively researched, and the manufacturing theory by mechanics effects of laser thermal stress is established.展开更多
Abstract: The force sensing resistor (FSR) and its con’struction and characteristic are described. By using the optimal electronic interface, the end result which is a direct proportionality between force and voltage...Abstract: The force sensing resistor (FSR) and its con’struction and characteristic are described. By using the optimal electronic interface, the end result which is a direct proportionality between force and voltage is obtained. The circuits of application for force and position measurements in the robotic control are given. The experiment that FSRs are placed on the fingers of BH - 1 dexterous hand as tactile sensors to measure the contacting forces shows FSR’s force sensitivity is optimized for use in the control of robot contacting with environment.展开更多
Micro-structures 3-D profile measurement is an important measurement content for research on micro-machining and characterization of micro-dimension. In this paper,a new method involved 2-D structure template, which g...Micro-structures 3-D profile measurement is an important measurement content for research on micro-machining and characterization of micro-dimension. In this paper,a new method involved 2-D structure template, which guides phase unwrapping,is proposed based on phase-shifting microscopic interferometry.It is fit not only for static measurement, but also for dynamic measurement,especially for motion of MEMS devices.3-D profile of active comb of micro-resonator is obtained by using the method.The theoretic precision in out-of-plane direction is better than 0.5 nm.The in-plane theoretic precision in micro-structures is better than 0.5 μm.But at the edge of micro-structures,it is on the level of micrometer mainly caused by imprecise edge analysis.Finally,its disadvantages and the following development are discussed.展开更多
Teaching goal design is an important link of teaching design, which has the teaching, learning and measurement function. How to establish the appropriate teaching goal and properly state to enhance its guidance and de...Teaching goal design is an important link of teaching design, which has the teaching, learning and measurement function. How to establish the appropriate teaching goal and properly state to enhance its guidance and detection function are the important tasks of teaching design. This paper makes a programming and systematic analysis on the aspects of teaching goal design theory, teaching goal statement mode and technology, teaching goal statement and design and teaching goal design detection.展开更多
In the field of oil well logging, real-time monitoring of the fluid flow parameter provides a scientific basis for oil and gas optimization exploration and increase in reservoir recovery, so a non-intrusive flow test ...In the field of oil well logging, real-time monitoring of the fluid flow parameter provides a scientific basis for oil and gas optimization exploration and increase in reservoir recovery, so a non-intrusive flow test method based on turbulent vibration was proposed. The specific length of the sensor fiber wound tightly around the outer wall of the pipe was connected with the optical fiber gratings at both ends, and the sensor fiber and the optical fiber gratings composed the flow sensing unit. The dynamic pressure was generated by the turbulence when fluid flows through the pipe, and the dynamic pressure resulted in the light phase shift of the sensor fiber. The phase information was demodulated by the fiber optic interferometer technology, time division multiplexing technology, and phase generated carrier modulation and demodulation techniques. The quadratic curve relationship between the phase change and flow rate was found by experimental data analysis, and the experiment confirmed the feasibility of the optical fiber flow test method with non-intrusion and achieved the real-time monitoring of the fluid flow.展开更多
In order to measure the location of medical micro-devices in the gastrointestinal tract, electro-magnetic methods were developed considering the magnetic permeability of human bodies. Two varieties of electromagnetic ...In order to measure the location of medical micro-devices in the gastrointestinal tract, electro-magnetic methods were developed considering the magnetic permeability of human bodies. Two varieties of electromagnetic localization methods have been implemented: one uses direct current(DC) to generate the elec-tromagnetic field, and the other uses alternating current (AC). The two varieties of the localization principle were analyzed and relevant experiments were made. The experiments show that the alternating electromagnetic method acquires higher accuracy, higher stability and wider measurement range.展开更多
文摘Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.
基金this research from the Scientific Research Fund of Jiangsu Polytechnic University(GrantNo.ZMF07020042)Fund of Jiangsu ProvincialKey Laboratory for Science and Technology of Photo-manufacroring (Grant No.GZ-1-02)the NaturalScience Foundation of the Jiangsu Higher EducationInstitutions of China( Grant No. 08KJB430002 ) is gratefully acknowledged.
文摘Mechanics effect of laser thermal stress is a new manufacturing technology, which uses thermal stress by high power laser acted on the surface of metal material to produce stress field. The technologies such as sheet metal formation by laser thermal stress, measurement by laser scratching and measurement by XRD (X-ray diffraction) are formed based on mechanics effects of laser thermal stress. The mechanisms of sheet metal formation by laser thermal stress, measurement by laser scratching and measurement by XRD are analyzed, and the theory of photo-mechanics manufacturing and detecting technologies based on laser thermal stress is originally put forward, whose experiment is primitively researched, and the manufacturing theory by mechanics effects of laser thermal stress is established.
文摘Abstract: The force sensing resistor (FSR) and its con’struction and characteristic are described. By using the optimal electronic interface, the end result which is a direct proportionality between force and voltage is obtained. The circuits of application for force and position measurements in the robotic control are given. The experiment that FSRs are placed on the fingers of BH - 1 dexterous hand as tactile sensors to measure the contacting forces shows FSR’s force sensitivity is optimized for use in the control of robot contacting with environment.
基金Supported:Tianjin Important Science and Technology Project(043185911) National High-Technology Research and De-velopment Project (863 project) in China (2004AA404042) .
文摘Micro-structures 3-D profile measurement is an important measurement content for research on micro-machining and characterization of micro-dimension. In this paper,a new method involved 2-D structure template, which guides phase unwrapping,is proposed based on phase-shifting microscopic interferometry.It is fit not only for static measurement, but also for dynamic measurement,especially for motion of MEMS devices.3-D profile of active comb of micro-resonator is obtained by using the method.The theoretic precision in out-of-plane direction is better than 0.5 nm.The in-plane theoretic precision in micro-structures is better than 0.5 μm.But at the edge of micro-structures,it is on the level of micrometer mainly caused by imprecise edge analysis.Finally,its disadvantages and the following development are discussed.
文摘Teaching goal design is an important link of teaching design, which has the teaching, learning and measurement function. How to establish the appropriate teaching goal and properly state to enhance its guidance and detection function are the important tasks of teaching design. This paper makes a programming and systematic analysis on the aspects of teaching goal design theory, teaching goal statement mode and technology, teaching goal statement and design and teaching goal design detection.
文摘In the field of oil well logging, real-time monitoring of the fluid flow parameter provides a scientific basis for oil and gas optimization exploration and increase in reservoir recovery, so a non-intrusive flow test method based on turbulent vibration was proposed. The specific length of the sensor fiber wound tightly around the outer wall of the pipe was connected with the optical fiber gratings at both ends, and the sensor fiber and the optical fiber gratings composed the flow sensing unit. The dynamic pressure was generated by the turbulence when fluid flows through the pipe, and the dynamic pressure resulted in the light phase shift of the sensor fiber. The phase information was demodulated by the fiber optic interferometer technology, time division multiplexing technology, and phase generated carrier modulation and demodulation techniques. The quadratic curve relationship between the phase change and flow rate was found by experimental data analysis, and the experiment confirmed the feasibility of the optical fiber flow test method with non-intrusion and achieved the real-time monitoring of the fluid flow.
基金the Specialized Research Fundfor the Doctoral Program of Higher Education(No. 20040248033)the National High Technology Research and Development Program (863) of China(No. 2006AA04Z368)
文摘In order to measure the location of medical micro-devices in the gastrointestinal tract, electro-magnetic methods were developed considering the magnetic permeability of human bodies. Two varieties of electromagnetic localization methods have been implemented: one uses direct current(DC) to generate the elec-tromagnetic field, and the other uses alternating current (AC). The two varieties of the localization principle were analyzed and relevant experiments were made. The experiments show that the alternating electromagnetic method acquires higher accuracy, higher stability and wider measurement range.
