Multi-sensor coordinate unification in dimensional metrology is used in order to get holistic, more accurate and reliable information about a workpiece based on several or multiple measurement values from ...Multi-sensor coordinate unification in dimensional metrology is used in order to get holistic, more accurate and reliable information about a workpiece based on several or multiple measurement values from one or more sensors. Because of the problem that standard ball is deficient as a standard artifact in the coordinate unification of high-precision composite measurement in two dimensions （2D） , a new method is proposed in this paper which uses angle gauge blocks as standard artifacts to achieve coordinate unification between the image sensor and the tactile probe. By comparing the standard ball with the angle gauge block as a standard artifact, theoretical analysis and experimental results are given to prove that it is more precise and more convenient to use angle gauge blocks as standard artifacts to achieve coordinate unification of high-precision composite measurement in two dimensions.展开更多
A nano probe system which can measure precise contact force in mN scale was demonstrated. The nano probe micro parts or optical parts in nanometer range resolution and scratch was originally designed for on-machine me...A nano probe system which can measure precise contact force in mN scale was demonstrated. The nano probe micro parts or optical parts in nanometer range resolution and scratch was originally designed for on-machine measuring applications and one kind of contact type measuring probes was designed for miniaturized or microfactory system. It ideally should be of small size and able to measure surface topography in nanometer scale. A commercial capacitive displacement sensor was proposed. It was a new concept in nano probe systems which can measure the displacement of shaft driven by the variation of surface topography. The nano probe mainly consisted of three parts： a capacitive displacement sensor, a porous type air slide and a contact probe part with various tip radiuses. The porous type air slide assured the shaft slided smoothly with controllable normal force in mN scale and had high positioning accuracy. The probe part which was directly in contact with target surface, can be applied to micro/nanoscale scratching as well as the measurement of sample topography by a simple tip change.展开更多
基金National Key Scientific Instrument and Equipment Development Project(No.2013YQ170539)
文摘Multi-sensor coordinate unification in dimensional metrology is used in order to get holistic, more accurate and reliable information about a workpiece based on several or multiple measurement values from one or more sensors. Because of the problem that standard ball is deficient as a standard artifact in the coordinate unification of high-precision composite measurement in two dimensions （2D） , a new method is proposed in this paper which uses angle gauge blocks as standard artifacts to achieve coordinate unification between the image sensor and the tactile probe. By comparing the standard ball with the angle gauge block as a standard artifact, theoretical analysis and experimental results are given to prove that it is more precise and more convenient to use angle gauge blocks as standard artifacts to achieve coordinate unification of high-precision composite measurement in two dimensions.
基金Project supported by National Core Research Center (NCRC) and Chosun University, Korea
文摘A nano probe system which can measure precise contact force in mN scale was demonstrated. The nano probe micro parts or optical parts in nanometer range resolution and scratch was originally designed for on-machine measuring applications and one kind of contact type measuring probes was designed for miniaturized or microfactory system. It ideally should be of small size and able to measure surface topography in nanometer scale. A commercial capacitive displacement sensor was proposed. It was a new concept in nano probe systems which can measure the displacement of shaft driven by the variation of surface topography. The nano probe mainly consisted of three parts： a capacitive displacement sensor, a porous type air slide and a contact probe part with various tip radiuses. The porous type air slide assured the shaft slided smoothly with controllable normal force in mN scale and had high positioning accuracy. The probe part which was directly in contact with target surface, can be applied to micro/nanoscale scratching as well as the measurement of sample topography by a simple tip change.
