A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension ...A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can he made on the micro channels. The micro channels were made on the silicon suhstrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface are obtained, which cannot be made easily with the conventional mechanical machining, as well as with the microfabrication processes, such as wet and dry etching. With this principle, it is expected that the smooth and curved surfaces can be made by simple processes and the results can be applied widely, such as optical patterns.展开更多
The "solidified liquid layer" model has been examined using a quartz crystal microbalance(QCM) with a polymeric matrix.The model is shown to give a reasonable explanation for the following experimental obser...The "solidified liquid layer" model has been examined using a quartz crystal microbalance(QCM) with a polymeric matrix.The model is shown to give a reasonable explanation for the following experimental observations:(i) The opposite response of the QCM and surface plasmon resonance(SPR) for the activation process;(ii) the marked difference in the responses for IgG/anti-IgG interaction between QCM and SPR.Theoretical analysis and experimental results indicated that QCM is sensitive to the thickness change of the "solidified liquid layer" but not the mass of captured biomolecules(i.e.,the immobilized mass),implying caution must be taken in interpreting QCM results.展开更多
基金the support of Ministry of Knowledge and Economy through Strategic Technology Development ProjectConversing Research Center Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology
文摘A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can he made on the micro channels. The micro channels were made on the silicon suhstrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface are obtained, which cannot be made easily with the conventional mechanical machining, as well as with the microfabrication processes, such as wet and dry etching. With this principle, it is expected that the smooth and curved surfaces can be made by simple processes and the results can be applied widely, such as optical patterns.
基金supported by the 100 Talents Programme of Chinese Academy of Sciences(08BM031001)the Fok Ying Tung Education Foundation (114013) to H.M.the National Basic Research Program of China (2009CB320300)
文摘The "solidified liquid layer" model has been examined using a quartz crystal microbalance(QCM) with a polymeric matrix.The model is shown to give a reasonable explanation for the following experimental observations:(i) The opposite response of the QCM and surface plasmon resonance(SPR) for the activation process;(ii) the marked difference in the responses for IgG/anti-IgG interaction between QCM and SPR.Theoretical analysis and experimental results indicated that QCM is sensitive to the thickness change of the "solidified liquid layer" but not the mass of captured biomolecules(i.e.,the immobilized mass),implying caution must be taken in interpreting QCM results.
