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不同直径InP晶锭混合加工技术
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作者 索开南 杨洪星 +4 位作者 张伟才 史艳磊 徐森锋 孙聂枫 刘惠生 《半导体技术》 CAS 北大核心 2020年第5期390-395,408,共7页
通过改进InP晶锭加工流程的设计,明显提高了直径不均匀或者含有多晶或孪晶晶锭的出片量。与传统半导体材料晶锭加工流程相比,采用本加工技术加工晶锭的最终出片面积至少能够提高20%,在某些情况下能达到50%以上。为了验证该加工流程对晶... 通过改进InP晶锭加工流程的设计,明显提高了直径不均匀或者含有多晶或孪晶晶锭的出片量。与传统半导体材料晶锭加工流程相比,采用本加工技术加工晶锭的最终出片面积至少能够提高20%,在某些情况下能达到50%以上。为了验证该加工流程对晶片参数的影响,研究了InP晶锭表面起伏对晶片厚度一致性、翘曲度、弯曲度等几何参数的影响。实验结果表明,在切割参数相同的情况下,采用本加工技术获得的晶片厚度一致性较差,造成参数恶化的原因是晶锭表面起伏使钢线在接触晶锭表面时可能出现位移。通过在晶锭表面粘接特殊的板补偿晶体表面起伏,改善了晶片厚度一致性。本方法可以在保证生产质量合格的成品晶片的同时,大幅度提高晶锭最终出片面积。 展开更多
关键词 INP 激光切割 混合加工技术 标准直径 出片面积
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The latest progress in research of plastics processing technology 被引量:5
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作者 Qu Jinping 《Engineering Sciences》 EI 2012年第1期20-29,37,共11页
According to the great demand for the" green" plastics processing technology of the low energy consumption, high efficiency and environmental protection in plastics industry, the plastics processing method and techn... According to the great demand for the" green" plastics processing technology of the low energy consumption, high efficiency and environmental protection in plastics industry, the plastics processing method and technology based on the elongation rheology, with continuing evolution and innovation of the plastics plasticating and conveying method, are presented and researched on the basis of the plastics dynamic processing method arid equipment, and the plastics plasticating and conveying process in the vane extrusion system, the technical characteristics and the applications of vane plasticating and conveying technology are discussed. The research results show that compared with the conventional processing equipment, this new technology and equipment shows many outstanding advantages, such as shortening the thermo-meehanical history of the plastics processing by more than 50 % , reducing the energy consumption by 30 % or so, improving the mixing and blending effects, improving the quality of the products and the adaptability to materials, etc. , and it is found that the new technology and equipment has special superiority in the fields of the processing for material systems, such as the multiphase and multicomponent composite materials, the shear heat sensitive macromolecular materials, etc. 展开更多
关键词 PLASTICS PROCESSING elongation deformation plasticating and conveying
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