The sputtering yield angular distributions have been calculated based on the ion energy dependence of to- tal sputtering yields for Ni and Mo targets bombarded by low-energy Hg+ ion. The calculated curves show excelle...The sputtering yield angular distributions have been calculated based on the ion energy dependence of to- tal sputtering yields for Ni and Mo targets bombarded by low-energy Hg+ ion. The calculated curves show excellent agreement with the corresponding Wehner’s experimental results of sputtering yield angular distribution. The fact clearly demonstrated the intrinsic relation between the ion energy dependence of total sputtering yields and the sput- tering yield angular distribution. This intrinsic relation had been ignored in Yamamura’s papers (1981,1982) due to some obvious mistakes.展开更多
基金Supported in part by the Major Scientific Research Project Fund from the Educational Bureau of Anhui Province China in 2005
文摘The sputtering yield angular distributions have been calculated based on the ion energy dependence of to- tal sputtering yields for Ni and Mo targets bombarded by low-energy Hg+ ion. The calculated curves show excellent agreement with the corresponding Wehner’s experimental results of sputtering yield angular distribution. The fact clearly demonstrated the intrinsic relation between the ion energy dependence of total sputtering yields and the sput- tering yield angular distribution. This intrinsic relation had been ignored in Yamamura’s papers (1981,1982) due to some obvious mistakes.
