The effects of plasma （ions, electrons） and other energetic particles are now widely used for substrate cleaning as well as to assist and control thin film growth and various applications. In this work, historical r...The effects of plasma （ions, electrons） and other energetic particles are now widely used for substrate cleaning as well as to assist and control thin film growth and various applications. In this work, historical review of the plasma and its various types are given and described. Different types of gas discharge and plasma production are also discussed in detail. Furthermore, technique of ion beam extraction from a plasma source for sputtering process by using a suitable electrode is carefully studied and given. In further consequence, a general review about the physics and mechanism of sputtering processes is studied. Different types of sputtering techniques are investigated and clarified. Theoretical treatment for determination of sputtering yield for low and high atomic species elements as a function of energy from 100 to 5,000 eV are studied and discussed. Finally, various applications of plasma-and-ion beam sputtering will also be mentioned and discussed.展开更多
Molybdenum films were deposited on Corning 7059 glass substrates by DC magnetron sputtering with different working gas pressures and sputtering powers.The structure and morphology,residual stress and adhesion,resistiv...Molybdenum films were deposited on Corning 7059 glass substrates by DC magnetron sputtering with different working gas pressures and sputtering powers.The structure and morphology,residual stress and adhesion,resistivity and optical reflectance of the as-deposited Mo films were investigated.The results show that Mo films deposited with high working gas pressure and low sputtering power have a spherical surface morphology,small grain size,residual compressive stress and a good adhesion,high resistivity and low optical reflectance.With the working gas pressure decreased and the sputtering power increased,Mo films have elongated spindle-shape or diamond flake shape surface morphology,the grain size is increased,with residual stress changed from tensile to compressive,a poor adhesion,resistivity decreased and optical reflectance increased.展开更多
文摘The effects of plasma （ions, electrons） and other energetic particles are now widely used for substrate cleaning as well as to assist and control thin film growth and various applications. In this work, historical review of the plasma and its various types are given and described. Different types of gas discharge and plasma production are also discussed in detail. Furthermore, technique of ion beam extraction from a plasma source for sputtering process by using a suitable electrode is carefully studied and given. In further consequence, a general review about the physics and mechanism of sputtering processes is studied. Different types of sputtering techniques are investigated and clarified. Theoretical treatment for determination of sputtering yield for low and high atomic species elements as a function of energy from 100 to 5,000 eV are studied and discussed. Finally, various applications of plasma-and-ion beam sputtering will also be mentioned and discussed.
基金supported by the knowledge innovation program of the Chinese academy of sciences(Grant No.KGCX2-YW-347)
文摘Molybdenum films were deposited on Corning 7059 glass substrates by DC magnetron sputtering with different working gas pressures and sputtering powers.The structure and morphology,residual stress and adhesion,resistivity and optical reflectance of the as-deposited Mo films were investigated.The results show that Mo films deposited with high working gas pressure and low sputtering power have a spherical surface morphology,small grain size,residual compressive stress and a good adhesion,high resistivity and low optical reflectance.With the working gas pressure decreased and the sputtering power increased,Mo films have elongated spindle-shape or diamond flake shape surface morphology,the grain size is increased,with residual stress changed from tensile to compressive,a poor adhesion,resistivity decreased and optical reflectance increased.
