Hafnium oxide (HfO2) thin films were deposited on quartz substrate by radio frequency magnetron sputtering with power from 160 W to 240 W. The optical and microstructural properties of samples before and after anneali...Hafnium oxide (HfO2) thin films were deposited on quartz substrate by radio frequency magnetron sputtering with power from 160 W to 240 W. The optical and microstructural properties of samples before and after annealing were characterized by XRD, XPS, UV-VISNIR spectrophotometer and ellipsometer. The results show optical transmittances with low absorption in wavelength range above λ=200 nm for all samples. The appropriate annealing can transfer the amorphous state of as-deposited films to the crystal film, contribute to the growth of nanocrystalline and compressive stress, optimize the stoichiometry of the film and systematically improve film density and the refractive index. In consideration of the stability of proper refractive index (>2) and high optical transmittance in UV band, HfO2 films deposited approximately at 220 W can be used in UV anti-reflection system.展开更多
Objective:To study the characteristics of the intraocular lens using ion beam sputtering depositing titanium nitride thin film on the intraocular lens(IOLs).Methods:To deposite titanium nitride thin film on the top of...Objective:To study the characteristics of the intraocular lens using ion beam sputtering depositing titanium nitride thin film on the intraocular lens(IOLs).Methods:To deposite titanium nitride thin film on the top of intraocular lens by ion beam sputtering depositing.We analyzed the surface morphology of intraocular lens through SEM and AFM.We detected intraocular lens resolution through the measurement of intraocular lens.Biocompatibility of intraocular lens is preliminary evaluated in this test.Results:The surface morphology of intraocular lens material was not changed,and was in line with the requirements of smoothness.Resolution was in line with national requirements.Unmodified and modified IOLs's cytotoxicity were 1 and 0.6 grade respectively.Hemolytic rates of modified and unmodified were both less than 5%.Conclusion:Ion beam sputtering deposition of objects didn't only affect the surface morphology and the basic optical performance,but also can enhance the biocompatibility of intraocular lens.Ion beam sputtering deposition technique has provided new methods for the surface modification of IOLs and PMMA materials.展开更多
基金supported by the Natural Science Foundation of Fujian Province of China(No.2018J05113)the Fundamental Research Funds for the Central Universities(No.20720160123,20720170013,and No.20720170084)
文摘Hafnium oxide (HfO2) thin films were deposited on quartz substrate by radio frequency magnetron sputtering with power from 160 W to 240 W. The optical and microstructural properties of samples before and after annealing were characterized by XRD, XPS, UV-VISNIR spectrophotometer and ellipsometer. The results show optical transmittances with low absorption in wavelength range above λ=200 nm for all samples. The appropriate annealing can transfer the amorphous state of as-deposited films to the crystal film, contribute to the growth of nanocrystalline and compressive stress, optimize the stoichiometry of the film and systematically improve film density and the refractive index. In consideration of the stability of proper refractive index (>2) and high optical transmittance in UV band, HfO2 films deposited approximately at 220 W can be used in UV anti-reflection system.
文摘Objective:To study the characteristics of the intraocular lens using ion beam sputtering depositing titanium nitride thin film on the intraocular lens(IOLs).Methods:To deposite titanium nitride thin film on the top of intraocular lens by ion beam sputtering depositing.We analyzed the surface morphology of intraocular lens through SEM and AFM.We detected intraocular lens resolution through the measurement of intraocular lens.Biocompatibility of intraocular lens is preliminary evaluated in this test.Results:The surface morphology of intraocular lens material was not changed,and was in line with the requirements of smoothness.Resolution was in line with national requirements.Unmodified and modified IOLs's cytotoxicity were 1 and 0.6 grade respectively.Hemolytic rates of modified and unmodified were both less than 5%.Conclusion:Ion beam sputtering deposition of objects didn't only affect the surface morphology and the basic optical performance,but also can enhance the biocompatibility of intraocular lens.Ion beam sputtering deposition technique has provided new methods for the surface modification of IOLs and PMMA materials.
