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基于位置敏感器件的高精度激光位置检测系统 被引量:15
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作者 程智 董登峰 +1 位作者 周维虎 刘鑫 《激光与光电子学进展》 CSCD 北大核心 2016年第8期146-154,共9页
光电非接触式测量方法对实现微位移测量具有重要意义,位置敏感器件(PSD)是实现光斑位置探测的传感器件,其探测精度以及基于该器件的数据处理方法直接影响位置测量精度。依据PSD各电极输出的光电流大小反比于入射光位置到各电极之间距离... 光电非接触式测量方法对实现微位移测量具有重要意义,位置敏感器件(PSD)是实现光斑位置探测的传感器件,其探测精度以及基于该器件的数据处理方法直接影响位置测量精度。依据PSD各电极输出的光电流大小反比于入射光位置到各电极之间距离的工作原理,设计了二维激光位置检测系统方案。为了提高PSD输出微弱电流信号的稳定性和位置探测精度,重点研究了信号调理电路设计、参数匹配、滤波方法与实时并行计算方法。实验结果表明:在±2mm方形区域内,基于PSD所设计的探测系统单点稳定性精度优于2μm,能够满足依托项目中激光跟踪仪对空间目标准确定位的要求以及基于激光位置检测的高精度实时微位移测量相关应用的需求。 展开更多
关键词 测量 激光位置检测 信号处理 位置敏感器件 位置精度
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基于PSD的长跨度孔系同轴度误差测量系统 被引量:10
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作者 余厚云 赵转萍 陆永华 《传感器与微系统》 CSCD 北大核心 2013年第2期70-73,共4页
以激光作为准直基准,研制了基于位置敏感探测器(PSD)的长跨度孔系同轴度误差测量系统。多功能测头在孔系内通过自定心机构确定各被测截面,测头前端的PSD检测激光光斑位置以确定各孔截面中心坐标,并进而评定出孔系同轴度误差。推导出激... 以激光作为准直基准,研制了基于位置敏感探测器(PSD)的长跨度孔系同轴度误差测量系统。多功能测头在孔系内通过自定心机构确定各被测截面,测头前端的PSD检测激光光斑位置以确定各孔截面中心坐标,并进而评定出孔系同轴度误差。推导出激光自准直数学模型,根据该模型由四自由度工作台调整激光器位置,实现了激光自准直。使用本测量系统完成了激光自准直实验和孔系同轴度误差测量实验。实验结果表明:经准直后激光束与工件两端孔中心连线之间的偏差在±0.032 mm以内,与三坐标测量机相比,本系统同轴度误差测量的相对误差为8%,具备了较高的准直精度和同轴度误差测量精度。 展开更多
关键词 长跨度孔系 同轴度误差 位置敏感探测器 激光自准直 激光光斑位置检测
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长跨度孔系直径与同轴度误差测量系统 被引量:5
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作者 赵转萍 余厚云 《工业仪表与自动化装置》 2013年第5期20-23,83,共5页
针对飞机铰链件长跨度、小直径孔系的直径和同轴度误差高精度测量问题,研制了基于光电传感器的综合测量系统。多功能测头中的直流电机驱动自定心机构确定孔截面测量位置,光电编码器记录电机有效转动量,通过与标准环规进行比较间接测量... 针对飞机铰链件长跨度、小直径孔系的直径和同轴度误差高精度测量问题,研制了基于光电传感器的综合测量系统。多功能测头中的直流电机驱动自定心机构确定孔截面测量位置,光电编码器记录电机有效转动量,通过与标准环规进行比较间接测量各孔直径。以激光作为准直基准,安装在多功能测头前端的PSD检测激光光斑位置以确定各孔截面中心坐标,并进而评定出孔系的同轴度误差。使用该测量系统完成了孔系直径测量试验和PSD光斑检测线性及重复性试验。试验结果表明,与三坐标测量机测量结果相比,孔径测量相对误差小于10μm,PSD光斑位置检测重复性误差小于13μm,具备了较高的检测精度。 展开更多
关键词 长跨度孔系 同轴度误差 PSD 光电编码器 激光光斑位置检测
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A laser shaft alignment system with dual PSDs 被引量:5
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作者 JIAO Guo-hua LI Yu-lin +2 位作者 ZHANG Dong-bo LI Tong-hai HU Bao-wen 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2006年第10期1772-1776,共5页
Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change tradi... Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change traditional manual way of shaft alignment and to make the measurement easier and more accurate. The system is comprised of two small measuring units (laser transmitter and detector) and a PDA (Personal Digital Assistant) with measurement software. The laser alignment system with dual PSDs was improved on a single PSD system, and yields higher measurement accuracy than the previous design, and has been successful for designing and implements actual shaft alignment. In the system, the range of offset measurement is ±4 mm, and the resolution is 1.5 μm, with accuracy being less than 2 μm. 展开更多
关键词 Rotating machine Shaft alignment Laser alignment Position sensing detector (PSD) Laser micro-displacement measurement
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Non-contact inspection for inner surface of small-diameter pipes based on laser-PSD 被引量:3
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作者 WU En-qi KE Ying-lin LI Jiang-xiong 《Optoelectronics Letters》 EI 2005年第1期61-64,共4页
A new non-contact inspection technique based on laser-PSD (position sensitive detector) to inspect the inner surface of small-diameter pipe is proposed,and the corresponding sensor has been developed. After being re... A new non-contact inspection technique based on laser-PSD (position sensitive detector) to inspect the inner surface of small-diameter pipe is proposed,and the corresponding sensor has been developed. After being reflected by two mirrors in series,a laser beam is projected onto the inner wall of a pipe as a small light spot and is read by a two-dimensional PSD. Based on the signals from the PSD and the structure parameters of the sensor,the spot position on the wall can be calculated in a local 3D coordinate system. The spot controlled by the micro-motor driven mirrors will scan a closed section ring on the inner wall of the pipe to obtain the relative coordinates of all the sampled points. The data will be then processed through data segmentation and least square fitting,to reconstruct the section curve used for obtaining the radius and the defect description of the section. Driven by a micro-pipe robot,the sensor can inspect a long curved pipe and obtain its 3-D reconstruction. An inspection system based on this technique can detect the mini-diarneter pipe with an inner diameter of 9.5 mm-10.5 mm and a curvature radius larger than 100 mm at a measurement accuracy of the inner surface defect of ±0.1 mm. 展开更多
关键词 激光 位置探测器 检测技术 无损检测
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