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水射流导引激光在微细加工中的应用 被引量:5
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作者 蔡黎明 雷玉勇 +1 位作者 邴龙健 唐令波 《微细加工技术》 2008年第5期60-64,共5页
研究应用水射流导引激光技术切割加工半导体材料工艺,并与传统切割工艺进行了比较。用φ25μm的水射流和波长为1 064 nm的钇铝石榴石红外线激光源切割一个φ125μm的砷化镓晶片,典型的切割速度是40 mm/s,切口宽度23μm,切边无碎片和边... 研究应用水射流导引激光技术切割加工半导体材料工艺,并与传统切割工艺进行了比较。用φ25μm的水射流和波长为1 064 nm的钇铝石榴石红外线激光源切割一个φ125μm的砷化镓晶片,典型的切割速度是40 mm/s,切口宽度23μm,切边无碎片和边角损坏。与锯片切割相比,其加工速度高达5倍。实验发现,水射流导引激光切割工件温度在160℃以下,晶圆加工表面基本无碎片、毛刺产生。通过对晶圆切片的3点弯曲进行试验发现,对于125μm厚的硅晶圆而言,在同等切痕宽度的情形下,微水射流导引激光切片断裂强度比锯片切片在正反两面都要高50%左右。结果表明,水射流导引激光切割技术可以大幅提高晶圆加工的效率、质量和可靠性。 展开更多
关键词 水射流导引激光 激光微水射流 细加工 切割 半导体
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微水射流导引激光打孔的传热分析 被引量:7
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作者 詹才娟 李昌烽 +1 位作者 王瑞 许世铎 《工程热物理学报》 EI CAS CSCD 北大核心 2011年第1期111-114,共4页
微水射流导引激光加工是一种热影响区小,具有高加工精度的新型技术。本文基于有限体积法建立了微水射流导引激光束对硅片打孔过程的传热模型,将打孔过程分为三个阶段模拟其间的热量传递、相变过程和相边界的移动;探索了微水射流导引双... 微水射流导引激光加工是一种热影响区小,具有高加工精度的新型技术。本文基于有限体积法建立了微水射流导引激光束对硅片打孔过程的传热模型,将打孔过程分为三个阶段模拟其间的热量传递、相变过程和相边界的移动;探索了微水射流导引双脉冲激光打孔过程,进行了双脉冲不同延迟时间下的传热过程的数值模拟,得到了最佳延迟时间。结果表明:在初始加热阶段,高温区出现在表面以下区域;微水射流有强冷却作用并明显减小了热影响区;双脉冲激光的应用可以有效提高打孔的效率。 展开更多
关键词 水射流导引激光 传热 硅片 双脉冲激光 打孔过程
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Laser-assisted water jet machining of high quality micro-trap structures on stainless steel surfaces
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作者 LIU Li YAO Peng +3 位作者 CHU Dong-kai XU Xiang-yue QU Shuo-shuo HUANG Chuan-zhen 《中国光学(中英文)》 EI CAS CSCD 北大核心 2024年第6期1476-1488,共13页
Secondary electron emission(SEE)has emerged as a critical issue in next-generation accelerators.Mitigating SEE on metal surfaces is crucial for enhancing the stability and emittance of particle accelerators while exte... Secondary electron emission(SEE)has emerged as a critical issue in next-generation accelerators.Mitigating SEE on metal surfaces is crucial for enhancing the stability and emittance of particle accelerators while extending their lifespan.This paper explores the application of laser-assisted water jet technology in constructing high-quality micro-trap structures on 316L stainless steel,a key material in accelerator manufacturing.The study systematically analyzes the impact of various parameters such as laser repetition frequency,pulse duration,average power,water jet pressure,repeat times,nozzle offset,focal position,offset distance between grooves,and processing speed on the surface morphology of stainless steel.The findings reveal that micro-groove depth increases with higher laser power but decreases with increasing water jet pressure and processing speed.Interestingly,repeat times have minimal effect on depth.On the other hand,micro-groove width increases with higher laser power and repeat times but decreases with processing speed.By optimizing these parameters,the researchers achieved high-quality pound sign-shaped trap structure with consistent dimensions.We tested the secondary electron emission coefficient of the"well"structure.The coefficient is reduced by 0.5 at most compared to before processing,effectively suppressing secondary electron emission.These results offer indispensable insights for the fabrication of micro-trap structures on material surfaces.Laser-assisted water jet technology demonstrates considerable potential in mitigating SEE on metal surfaces. 展开更多
关键词 laser-assisted water jet 316L stainless steel micro-trap structures "well"structure surface morphology secondary electron emission(SEE) groove depth groove width
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TBM tunneling in extremely hard and abrasive rocks:Problems,solutions and assisting methods 被引量:31
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作者 ZHENG Yan-long HE Lei 《Journal of Central South University》 SCIE EI CAS CSCD 2021年第2期454-480,共27页
Extremely hard and abrasive rocks pose great challenges to the past and ongoing TBM projects by increasing cutter wear and reducing penetration rates.A considerable amount of research has been conducted to improve the... Extremely hard and abrasive rocks pose great challenges to the past and ongoing TBM projects by increasing cutter wear and reducing penetration rates.A considerable amount of research has been conducted to improve the performance of TBMs in those challenging grounds by either improving the capacity of TBMs or developing assisting rock breakage methods.This paper first highlights the challenges of hard and abrasive rocks on TBM tunneling through case studies.It then presents the development of hard rock TBMs and reviews the technologies that can be used individually or as assistance to mechanical excavators to break hard rocks.Emphases are placed on technologies of high pressure waterjet,laser and microwave.The state of the art of field and laboratory research,problems and research directions of those technologies are discussed.The assisting methods are technically feasible;however,the main challenges of using those methods in the field are that the energy consumption can be over 10 times high and that the existing equipments have robustness problems.More research should be conducted to study the overall energy consumption using TBMs and the assisting methods.Pulsed waterjet,laser and microwave technologies should also be developed to make the assistance economically viable. 展开更多
关键词 hard and abrasive rocks tunnel boring machine waterjet laser microwave
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