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激光测长定位中的软件补偿
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作者 丁永峰 《电子工业专用设备》 1995年第3期32-35,共4页
本文论述了大规模集成电路制造设备关键技术之一的激光测长定位补偿技术中,如何解决由温度、压强、湿度等因素造成激光测长定位中的误差,并定量的分析给予补偿。激光当量为λ/32时,工作台的重复精度可达±0.2μm(3σ)。
关键词 激光测长定位 误差 软件补偿
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Combined Method of Datum Transformation Between Different Coordinate Systems 被引量:4
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作者 王晓妮 张洁 《Geo-Spatial Information Science》 2002年第4期5-9,共5页
The similarity transformation model between different coordinate systems is not accurate enough to describe the discrepancy of them.Therefore,the coordinate transformation from the coordinate frame with poor accuracy ... The similarity transformation model between different coordinate systems is not accurate enough to describe the discrepancy of them.Therefore,the coordinate transformation from the coordinate frame with poor accuracy to that with high accuracy cannot guarantee a high precision of transformation.In this paper,a combined method of similarity transformation and regressive approximating is presented.The local error accumulation and distortion are taken into consideration and the precision of coordinate system is improved by using the recommended method 展开更多
关键词 coordinate transformation similarity transformation regressive approximating
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