氧化钒薄膜制备后需要进行退火处理以降低非晶态氧化钒薄膜的方阻大小并改善薄膜结晶特性。传统退火方式时间较长且退火过程会导致器件性能降低。本文主要利用激光精确控制的特点处理氧化钒薄膜,通过平顶光路系统改变激光功率、高斯光...氧化钒薄膜制备后需要进行退火处理以降低非晶态氧化钒薄膜的方阻大小并改善薄膜结晶特性。传统退火方式时间较长且退火过程会导致器件性能降低。本文主要利用激光精确控制的特点处理氧化钒薄膜,通过平顶光路系统改变激光功率、高斯光斑形貌以及光斑的重叠率对氧化钒薄膜进行退火处理,主要研究了激光能量密度以及光斑重叠率对氧化钒薄膜的方阻,表面粗糙度以及结晶度的影响。实验结果表明激光功率为0.7 W,光斑重叠率为93.33%,光斑能量密度为62.2 m J/cm^2时,退火氧化钒薄膜的方阻值明显降低,薄膜表面光滑且氧化钒结晶度较好。展开更多
An all-solid-state ultraviolet laser based on frequency doubling in an external ring cavity with low input pump power is reported. Both second harmonic generation （SHG） and fourth harmonic generation （PRIG） occurr...An all-solid-state ultraviolet laser based on frequency doubling in an external ring cavity with low input pump power is reported. Both second harmonic generation （SHG） and fourth harmonic generation （PRIG） occurred in an external threemirrors ring cavity. The need for impedance matching of this cavity to the input radiation was eliminated and the cavity adaptation was simplified, because the mirrors were not highly reflecting at 1064 nm and the cavity resonates only at 532 rim. Experiment results demonstrate that the conversion efficiency of this external cavity is higher than that of the singlepass condition.展开更多
文摘氧化钒薄膜制备后需要进行退火处理以降低非晶态氧化钒薄膜的方阻大小并改善薄膜结晶特性。传统退火方式时间较长且退火过程会导致器件性能降低。本文主要利用激光精确控制的特点处理氧化钒薄膜,通过平顶光路系统改变激光功率、高斯光斑形貌以及光斑的重叠率对氧化钒薄膜进行退火处理,主要研究了激光能量密度以及光斑重叠率对氧化钒薄膜的方阻,表面粗糙度以及结晶度的影响。实验结果表明激光功率为0.7 W,光斑重叠率为93.33%,光斑能量密度为62.2 m J/cm^2时,退火氧化钒薄膜的方阻值明显降低,薄膜表面光滑且氧化钒结晶度较好。
文摘An all-solid-state ultraviolet laser based on frequency doubling in an external ring cavity with low input pump power is reported. Both second harmonic generation （SHG） and fourth harmonic generation （PRIG） occurred in an external threemirrors ring cavity. The need for impedance matching of this cavity to the input radiation was eliminated and the cavity adaptation was simplified, because the mirrors were not highly reflecting at 1064 nm and the cavity resonates only at 532 rim. Experiment results demonstrate that the conversion efficiency of this external cavity is higher than that of the singlepass condition.
