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刻蚀辅助激光灰度改性技术制备硅基三维微结构 被引量:1
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作者 李乾坤 刘学青 成荣 《激光与红外》 CAS CSCD 北大核心 2021年第3期274-278,共5页
硅基三维微纳结构在红外成像与探测方面具有重要的应用价值。然而,受加工技术的限制,硅基复杂面型三维微纳结构的制备仍然是一个难题。本文提出了利用刻蚀辅助激光灰度改性技术制备硅基三维微纳结构。利用激光改性制备的硅的氧化层作为... 硅基三维微纳结构在红外成像与探测方面具有重要的应用价值。然而,受加工技术的限制,硅基复杂面型三维微纳结构的制备仍然是一个难题。本文提出了利用刻蚀辅助激光灰度改性技术制备硅基三维微纳结构。利用激光改性制备的硅的氧化层作为刻蚀掩膜,经过刻蚀实现灰度图形向衬底的转移。研究发现,氧化层的抗刻蚀能力可以通过激光加工参数进行调控,例如,激光功率和扫描间距。通过编程化设计的局部调控的抗刻蚀氧化层图形,刻蚀后实现了台阶状、斜面及曲面复杂三维微结构的可控制备。另外,验证了该技术在特殊面型硅基微光学器件制备中的可行性。 展开更多
关键词 激光技术 刻蚀 灰度改性 硅基微纳结构 微光学元件
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Effective Utilization of Coal Fly Ash in Building Material Production
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作者 Jozef Junak Nadezda Stevulova 《Journal of Chemistry and Chemical Engineering》 2011年第8期724-728,共5页
This paper is aimed at verifying utilization possibilities of alkaline modified coal fly ash as cement replacement in the concrete. The influence of alkaline activated coal fly ash originating from Slovakian power pla... This paper is aimed at verifying utilization possibilities of alkaline modified coal fly ash as cement replacement in the concrete. The influence of alkaline activated coal fly ash originating from Slovakian power plant in Novsky (Si/Al = 3,1) as a partial cement replacement in concrete on compressive strength of hardened composites after 28 and 90 days was investigated. Alkaline activation of coal fly ash was realized in an autoclave at 130 ℃ and pressure of 160 kPa during 5 hours and in a reactor under normal conditions (equal temperature during 36 hours) at solid/liquid ratio of 0.5. Coal fly ash/cement mixtures were prepared with 25 % cement replacement by starting and modified coal fly ash and given in forms. Compressive strengths of composites after 28 and 90 days of hardening were compared to referential composite without coal fly ash and evaluated according to the standard of STN EN 450 by the value of relative strength KR (compressive strength of coal fly ash/cement composite to compressive strength of comparative concrete). The final compressive strengths of hardened composites based on alkaline activated coal fly ash reached values in the range of 6 up to 50 MPa. In the set of experimental composites based on alkaline activated coal fly ashes, the highest value of relative strength after 28- and 90- days of hardening reached composite with cement replacement by coal fly ash zeolitized in autoclave (105% of compressive strength of referential sample), what is connected with formation of zeolitic phases on surface of coal fly ash particles. The achieved results confirm that alkaline activation of coal fly ash in an autoclave under observed conditions can be successfully used as a partial cement replacement in concrete of C20/25 and C25/30 in accordance with requirements of standards (STN EN 450 and STN EN 206). 展开更多
关键词 coal fly ash chemical activation CONCRETE compressive strength ZEOLITE
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