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SiO_2薄膜辅助硅-玻璃热键合技术的研究
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作者 黄腾超 沈亦兵 +2 位作者 侯西云 娄迪 白剑 《浙江大学学报(工学版)》 EI CAS CSCD 北大核心 2005年第9期1310-1314,共5页
为了解决Si和普通玻璃进行直接键合时材料的热失配问题,提出了利用SiO2薄膜辅助进行硅-玻璃热键合(SGTB)的技术.通过分析SiO2薄膜辅助SGTB技术的化学物理过程,对键合过程中的工艺条件进行了优化.利用反应离子束蚀刻(RIBE)对基片进行抛光... 为了解决Si和普通玻璃进行直接键合时材料的热失配问题,提出了利用SiO2薄膜辅助进行硅-玻璃热键合(SGTB)的技术.通过分析SiO2薄膜辅助SGTB技术的化学物理过程,对键合过程中的工艺条件进行了优化.利用反应离子束蚀刻(RIBE)对基片进行抛光,使得键合表面达到2 nm级的表面粗糙度.在大气的环境下将处理过的玻璃、Si基片干燥, 进行预键合.预键合好的Si、玻璃基片在200℃的氧化环境下退火,基片之间的硅烷醇键发生聚合反应,形成硅氧键键合.实验结果表明,硅和玻璃基片的表面能经过预键合后有了提高,水分子和Si表面SiO2中的氧原子交连在一起,OH-数量增加,形成硅烷醇键.Si表面热生长SiO2薄膜的存在,减少了由Si、玻璃热膨胀系数和热传导系数差异引起的诱导应力. 展开更多
关键词 SiO1薄膜辅助 硅-玻璃键合 反应离子束蚀刻 热诱导应力
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地层温度对注水井井壁开裂的影响 被引量:2
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作者 张彦山 殷有泉 +1 位作者 蒋阗 单文文 《岩石力学与工程学报》 EI CAS CSCD 北大核心 2005年第24期4498-4501,共4页
研究了注水井将大量温度较低的地面水注入高温油藏使地层的地温度场发生变化。据此,分析了这些变化导致的热应力引起的附近应力对注水井井壁开裂条件的影响,并建立了常注水量条件下注水井的井壁开裂准则。研究结果表明:热诱导应力必须... 研究了注水井将大量温度较低的地面水注入高温油藏使地层的地温度场发生变化。据此,分析了这些变化导致的热应力引起的附近应力对注水井井壁开裂条件的影响,并建立了常注水量条件下注水井的井壁开裂准则。研究结果表明:热诱导应力必须加以考虑;在给定的一组数据下,由于热效应开裂应力可减少16%。 展开更多
关键词 石油工程 注水井 井壁开裂准则 热诱导应力
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Thermodynamics analysis and precipitation behavior of fine carbide in K416B Ni-based superalloy with high W content during creep 被引量:5
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作者 谢君 于金江 +1 位作者 孙晓峰 金涛 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2015年第5期1478-1483,共6页
The precipitation behavior of carbide in K416 B superalloy was investigated by means of creep measurement and microstructure observation. The results show that nanometer M6 C particles discontinuously precipitate in t... The precipitation behavior of carbide in K416 B superalloy was investigated by means of creep measurement and microstructure observation. The results show that nanometer M6 C particles discontinuously precipitate in the γ matrix or along the γ/γ′ interface of the alloy during high temperature tensile creep. Thereinto, the amount of fine M6 C carbide increases as creep goes on, and the coherent interfaces of M6 C phase precipitating from the γ matrix are {100} and {111} planes. The thermodynamics analysis indicates that the solubility of element carbon in the matrix decreases when the alloy is deformed by the axial tensile stress during creep, so as to cause the carbon segregating in the regions of stress concentration and combining with carbide-forming elements M(W, Co), which promotes the fine M6 C carbide to precipitate from the γ matrix. 展开更多
关键词 K416B Ni-based superalloy M6C carbide stress inducement thermodynamics analysis
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Effects of ball milling time on porous Ti-3Ag alloy and its apatite-inducing abilities 被引量:3
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作者 侯乐干 李莉 郑玉峰 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第5期1356-1366,共11页
Ti and Ag powders were mixed with different ball milling time (1, 2, 5 and 10 h) and sintered into porous Ti-3Ag alloys. The samples were treated with hydrothermal treatment, and their apatite-inducing abilities wer... Ti and Ag powders were mixed with different ball milling time (1, 2, 5 and 10 h) and sintered into porous Ti-3Ag alloys. The samples were treated with hydrothermal treatment, and their apatite-inducing abilities were further evaluated by immersion in modified simulated body fluid. The results indicate that the high surface energy brought by powder refinement leads to the decline of Ag, but promotes the oxidation of Ti during the sintering process. Meanwhile, the hydrothermal treated porous Ti-3Ag alloys prepared by the powders ball milled for 10 h possess the best apatite-inducing ability. 展开更多
关键词 porous Ti-3Ag alloy hydrothermal treatment apatite-inducing ability ball milling time
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Reaction mechanism between“memory effect”and induction time of gas hydrate formation 被引量:1
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作者 孙登林 吴强 张保勇 《Journal of Coal Science & Engineering(China)》 2008年第2期280-282,共3页
Abstract Using visual experimental apparatus, one system (T40, 1×10^-3 mol/L, nonadded with coal) and another system (T40, 2×10^-3 mol/L, added with coal) were experimented with for three times and two t... Abstract Using visual experimental apparatus, one system (T40, 1×10^-3 mol/L, nonadded with coal) and another system (T40, 2×10^-3 mol/L, added with coal) were experimented with for three times and two times, respectively. Five groups of P-T experimental parameters were obtained using the data logger system and analyzed combined with the video information of the experiments. Major conclustions show that the induction time is shortened by 10-20 times in the experimental system containing residual pentahedral ring structures; "memory effect" can accelerate the dynamic progress and improve the thermodynamic conditions of gas hydrate formation. 展开更多
关键词 memory effect induction time thermodynamic condition gas hydrate
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