The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1...The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.展开更多
Proposed and demonstrated is a novel computer modeling method for high power light emitting diodes(LEDs). It contains geometrical structure and optical property of high power LED as well as LED dies definition with it...Proposed and demonstrated is a novel computer modeling method for high power light emitting diodes(LEDs). It contains geometrical structure and optical property of high power LED as well as LED dies definition with its spatial and angular distribution. Merits and non-merits of traditional modeling methods when applied to high power LEDs based on secondary optical design are discussed. Two commercial high power LEDs are simulated using the proposed computer modeling method. Correlation coefficient is proposed to compare and analyze the simulation results and manufacturing specifications. The source model is precisely demonstrated by obtaining above 99% in correlation coefficient with different surface incident angle intervals.展开更多
Studied are the controller design and basic principles of intelligent lighting network. TI’s MSP430F123 is used as a main controller. By using the ZigBee modules(Xbee/Xbee-PRO) and the GSM module(SIM300C) for wireles...Studied are the controller design and basic principles of intelligent lighting network. TI’s MSP430F123 is used as a main controller. By using the ZigBee modules(Xbee/Xbee-PRO) and the GSM module(SIM300C) for wireless communications, the lighting control is enabled to access wireless network. This system uses a mobile phone to achieve light on-off directly, which can accomplish wireless control of intelligent lighting in families.展开更多
文摘The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.
基金The"863"Project of National Ministry of Science and Technology(2006AA03A175)
文摘Proposed and demonstrated is a novel computer modeling method for high power light emitting diodes(LEDs). It contains geometrical structure and optical property of high power LED as well as LED dies definition with its spatial and angular distribution. Merits and non-merits of traditional modeling methods when applied to high power LEDs based on secondary optical design are discussed. Two commercial high power LEDs are simulated using the proposed computer modeling method. Correlation coefficient is proposed to compare and analyze the simulation results and manufacturing specifications. The source model is precisely demonstrated by obtaining above 99% in correlation coefficient with different surface incident angle intervals.
基金Special Fund Project for Technology Innovation of Tianjin City(06FZZDGX01800)
文摘Studied are the controller design and basic principles of intelligent lighting network. TI’s MSP430F123 is used as a main controller. By using the ZigBee modules(Xbee/Xbee-PRO) and the GSM module(SIM300C) for wireless communications, the lighting control is enabled to access wireless network. This system uses a mobile phone to achieve light on-off directly, which can accomplish wireless control of intelligent lighting in families.
