硅基MEMS环形波动陀螺谐振结构的研制

根据固体波动陀螺的工作机理与振动特性,提出并制作了一种新颖的电容式全对称硅基MEMS环形波动陀螺谐振结构。设计了全对称双U形弹性梁环形敏感结构并进行了动力学分析。分析结果表明其工作模态的谐振频率为10.193 0与10.198 0 kHz,频率差为5 Hz,表明该敏感结构在结构设计上具有高灵敏度。研究了基于深反应离子刻蚀（DRIE）与阳极键合技术的玻璃上硅（SOG）结构加工制造流程,并成功制作了该环形谐振结构。模态响应测试表明该硅基MEMS环形波动陀螺敏感结构的工作模态谐振频率为10.985 0和10.962 5 kHz,与动力学仿真分析结果的相对误差为7.21%,表明该陀螺谐振结构设计合理,加工工艺流程可行。

一种高灵敏度电容式波动陀螺的设计与分析

基于固体波动陀螺灵敏度高、可靠性好、动态范围宽等突出优点,本文研究了一种全新的高灵敏度电容式微机电环形波动陀螺。首先设计了微机电环形波动陀螺的敏感结构与整体结构,并分析了工作特性与敏感原理;其次建立了环形敏感结构的灵敏度数值模型,分析了灵敏度与主要设计参数的关系;最后对环形敏感结构进行了模态仿真、静电驱动分析、灵敏度分析与极限位移分析,得到了该微机电环形波动陀螺的谐振频率为6.036 0 kHz,在2.906 8μm的驱动激励下机械灵敏度为0.003 6μm/°,最大静态应力为19.82 MPa。分析结果表明该陀螺敏感结构设计合理,能够实现高灵敏度的角速度敏感,为进一步研制高灵敏度MEMS陀螺奠定了基础。

Structure design and simulation of MEMS vibrating ring gyroscope

MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.