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一种大过载MEMS加速度计新型封装方法 被引量:2
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作者 焦新泉 陈家斌 +1 位作者 尹静源 孟丁 《中国惯性技术学报》 EI CSCD 北大核心 2013年第4期536-539,共4页
传统的MEMS系统级封装多采用IC标准的封装形式,例如塑料封装形式、陶瓷管壳封装形式、TO系列金属管壳封装。由于大过载传感器需要工作环境冲击振动比较高,陶瓷管壳容易破碎;塑封采用热塑成型,封装后残余应力大;TO系列管壳体积较大,并且... 传统的MEMS系统级封装多采用IC标准的封装形式,例如塑料封装形式、陶瓷管壳封装形式、TO系列金属管壳封装。由于大过载传感器需要工作环境冲击振动比较高,陶瓷管壳容易破碎;塑封采用热塑成型,封装后残余应力大;TO系列管壳体积较大,并且采用直插形式安装,在超过5×103g冲击下,管脚容易折断。针对这种情况,本文提出了一种新型MEMS加速度计封装方法,在圆片级采用玻璃-硅-玻璃三层结构,并采用铝金属壳体螺钉安装并在壳体内部双组分环氧树脂灌封。封装之后的大过载加速度计具有体积小,密封性强,残余应力小、抗强冲击、稳定性好、适应于小批量生产等优点。 展开更多
关键词 MEMS 加速度计 封装 玻璃-硅-玻璃结构
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确认姿态的双向微型加速度计
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作者 侯美丽 杨建辉 第五兴乐 《中国测试技术》 2003年第5期36-36,29,共2页
本文介绍一种微型的确认姿态的双向加速度计,这种微型的确认姿态的双向加速度计是一种玻璃-硅-玻璃结构。实验证明了这种传感器的有效性和实用性。
关键词 微型加速度计 玻璃-硅-玻璃结构 微型加速度计 传感器 姿态
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Microstructure and microwave dielectric properties of lead borosilicate glass ceramics with Al_2O_3 被引量:4
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作者 韦鹏飞 周洪庆 +2 位作者 王杰 张一源 曾凤 《Journal of Central South University》 SCIE EI CAS 2011年第6期1838-1843,共6页
The effects of Al2O3 addition on both the sintering behavior and microwave dielectric properties of PbO-B203-SiO2 glass ceramics were investigated by Fourier transform infrared spectroscope (FTIR), differential ther... The effects of Al2O3 addition on both the sintering behavior and microwave dielectric properties of PbO-B203-SiO2 glass ceramics were investigated by Fourier transform infrared spectroscope (FTIR), differential thermal analysis (DTA), X-ray diffraction (XRD) and scanning electron microscopy (SEM). The results show that with the increase of Al2O3 content the bands assigned to [SiO4] nearly disappear. Aluminum replaces silicon in the glass network, which is helpful for the formation of boron-oxygen rings. The increase of the transition temperature Tg and softening temperature Tf of PbO-B2O3-SiO2 glass ceramics leads to the increase of liquid phase precipitation temperature and promotes the structure stability in the glasses, and consequently contributes to the decreasing trend of crystallization. Densification and dielectric constants increase with the increase of Al2O3 content, but the dielectric loss is worsened. By contrast, the 3% (mass fraction) Al2O3-doped glass ceramics sintered at 725℃ have better properties of density p=2.72 g/cm3, dielectric constant Er=6.78, dielectric loss tan8=2.6×10^-3 (measured at 9.8 GHz), which suggest that the glass ceramics can be applied in multilayer microwave devices requiring low sintering temperatures. 展开更多
关键词 PbO-B203-SiO2 glass ceramics AL2O3 Fourier transform infrared spectroscope MICROSTRUCTURE dielectric properties
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