Development in industry is asking for improved resolution and higher accuracy in dimensional metrology. In this paper,we proposed a control displacement method based on a polarization ellipsometirc interferometer and ...Development in industry is asking for improved resolution and higher accuracy in dimensional metrology. In this paper,we proposed a control displacement method based on a polarization ellipsometirc interferometer and phase-locked loop technique. The proposed principle was set up. The experimental results of step and step displacements with a step value of 5 nm were presented. We also analyzed the resolution,the potential minimal displacement of the established system. The results show that the position error induced by the ellipticty deviation of the light beam becomes negligible thanks to our signal processing circuit with high-order filter. This method could be useful for many applications in nano dimensional metrology and semiconductor industry.展开更多
In order to improve the test accuracy of CCD,a new type of CCD device is proposed.Several columns(rows) of photoelectric diodes(PDs) are combined together,and staggered with the distance of H1=H/N,where H is the space...In order to improve the test accuracy of CCD,a new type of CCD device is proposed.Several columns(rows) of photoelectric diodes(PDs) are combined together,and staggered with the distance of H1=H/N,where H is the space between two adjacent PDs,and N is the number of columns(rows).The photoelectric signals are collected simultaneously by multi-channel A/D,and the accurate measurement result is obtained through appropriate signal processing.Without changing the size or space of PDs,more photographic pixels are arranged in the given direction within a finite length.Diameters of three standard poles are measured by a single CCD and two staggered CCDs,respectively with length of 30 mm and diameters of 5 mm,8 mm and 12 mm,respectively.The results show that the accuracy of double staggered CCDs is two times of that of single CCD.The new type of CCDs can avoid the impact of PD space theoretically and higher measurement accuracy can be obtained.展开更多
The structure and properties of CeO2 surfaces have been intensively studied due to their importance in a lot of surface-related applications. Since most of surface techniques probe the structure information inside the...The structure and properties of CeO2 surfaces have been intensively studied due to their importance in a lot of surface-related applications. Since most of surface techniques probe the structure information inside the outermost surface plane, the subsurface structure information has been elusive in many studies. Using the profile imaging with aberration-corrected transmission electron microscopy, the structure information in both the outermost layer and the sublayers of the CeO2（100） surface has been obtained. In addition to the normal structures that have been reported before, where the surface is Ce-or O-terminated, a metastable surface has been discovered. In the new structure, there is an atomic layer reversal between the outermost layer and the sublayer, giving a structure with O as the outermost layer for the stoichiometry of normal Ce-terminated surface. The charge redistribution for the polarity compensation has also been changed relative to the normal surface.展开更多
基金supported by the National Natural Science Foundation of China (Grant No.50905170)
文摘Development in industry is asking for improved resolution and higher accuracy in dimensional metrology. In this paper,we proposed a control displacement method based on a polarization ellipsometirc interferometer and phase-locked loop technique. The proposed principle was set up. The experimental results of step and step displacements with a step value of 5 nm were presented. We also analyzed the resolution,the potential minimal displacement of the established system. The results show that the position error induced by the ellipticty deviation of the light beam becomes negligible thanks to our signal processing circuit with high-order filter. This method could be useful for many applications in nano dimensional metrology and semiconductor industry.
基金supported by the National Natural Science Foundation of China (No.51005188)the Fund of Key Laboratory of Manufacturing and Automation of Xihua University (No.SZJJ2009-023)the University Talent Foundation of Xihua University (No.R0720221)
文摘In order to improve the test accuracy of CCD,a new type of CCD device is proposed.Several columns(rows) of photoelectric diodes(PDs) are combined together,and staggered with the distance of H1=H/N,where H is the space between two adjacent PDs,and N is the number of columns(rows).The photoelectric signals are collected simultaneously by multi-channel A/D,and the accurate measurement result is obtained through appropriate signal processing.Without changing the size or space of PDs,more photographic pixels are arranged in the given direction within a finite length.Diameters of three standard poles are measured by a single CCD and two staggered CCDs,respectively with length of 30 mm and diameters of 5 mm,8 mm and 12 mm,respectively.The results show that the accuracy of double staggered CCDs is two times of that of single CCD.The new type of CCDs can avoid the impact of PD space theoretically and higher measurement accuracy can be obtained.
基金supported by the National natural Science Foundation of China(51525102,51390475,51371102 and 21673277)the National Basic Research Program of China(2015CB654902)
文摘The structure and properties of CeO2 surfaces have been intensively studied due to their importance in a lot of surface-related applications. Since most of surface techniques probe the structure information inside the outermost surface plane, the subsurface structure information has been elusive in many studies. Using the profile imaging with aberration-corrected transmission electron microscopy, the structure information in both the outermost layer and the sublayers of the CeO2（100） surface has been obtained. In addition to the normal structures that have been reported before, where the surface is Ce-or O-terminated, a metastable surface has been discovered. In the new structure, there is an atomic layer reversal between the outermost layer and the sublayer, giving a structure with O as the outermost layer for the stoichiometry of normal Ce-terminated surface. The charge redistribution for the polarity compensation has also been changed relative to the normal surface.
