A new design concept is proposed to eliminate the substrate-assisted depletion effect that significantly degrades the breakdown voltage （BV） of conventional super junction-LDMOS. The key feature of the new concept i...A new design concept is proposed to eliminate the substrate-assisted depletion effect that significantly degrades the breakdown voltage （BV） of conventional super junction-LDMOS. The key feature of the new concept is that a partial buried layer is implemented which compensates for the charge interaction between the p-substrate and SJ region,realizing high breakdown voltage and low on-resistance. Numerical simulation results indicate that the proposed device features high breakdown voltage,low on-resistance,and reduced sensitivity to doping imbalance in the pillars. In addition, the proposed device is compatible with smart power technology.展开更多
文摘A new design concept is proposed to eliminate the substrate-assisted depletion effect that significantly degrades the breakdown voltage （BV） of conventional super junction-LDMOS. The key feature of the new concept is that a partial buried layer is implemented which compensates for the charge interaction between the p-substrate and SJ region,realizing high breakdown voltage and low on-resistance. Numerical simulation results indicate that the proposed device features high breakdown voltage,low on-resistance,and reduced sensitivity to doping imbalance in the pillars. In addition, the proposed device is compatible with smart power technology.
