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电化学腐蚀技术在制作硅谐振式微力传感器中的应用 被引量:2
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作者 孔德义 虞承端 +3 位作者 梅涛 陈永 李科 熊小义 《世界电子元器件》 2001年第2期50-52,共3页
一、引言 微力传感器在微量称重、液体表面张力分析以及生物体微组织力测量等领域具有广阔的应用前景.我国以前自主研制的微力传感器基本上都是采用半导体应变片和扩散硅制成的压阻式传感器,其主要缺点是漂移较大,要实现高精度测量与长... 一、引言 微力传感器在微量称重、液体表面张力分析以及生物体微组织力测量等领域具有广阔的应用前景.我国以前自主研制的微力传感器基本上都是采用半导体应变片和扩散硅制成的压阻式传感器,其主要缺点是漂移较大,要实现高精度测量与长期监测较为困难.而谐振式传感器由于具有频率输出、高稳定性和高分辨率等优点,被看作是力敏传感器的发展趋势之一.国外已研制出力、压力、加速度等多种谐振式固态传感器,其中荷兰Twente理工大学研制出一种硅谐振式微力传感器,其量程仅为0~0.4牛顿.该传感器的核心敏感元件是一个6×0.4×0.02mm3的双端固支谐振硅梁,由各向异性腐蚀技术加工而成. 展开更多
关键词 电化学腐蚀技术 硅谐振式 微力传感器 应用
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用于血样前处理的BioMEMS微流控芯片 被引量:4
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作者 陈兴 崔大付 +1 位作者 刘长春 李辉 《传感技术学报》 CAS CSCD 北大核心 2006年第05B期1991-1995,共5页
基于BioMEMS技术,研制成三种血液样品前处理微流控芯片,分别介绍了血样前处理微流控芯片的原理、结构、制备技术以及样品前处理效果.基于错流过滤原理,设计了用于血细胞分离的错流过滤微结构,采用深刻蚀技术在硅片上刻蚀出直径为20μm,... 基于BioMEMS技术,研制成三种血液样品前处理微流控芯片,分别介绍了血样前处理微流控芯片的原理、结构、制备技术以及样品前处理效果.基于错流过滤原理,设计了用于血细胞分离的错流过滤微结构,采用深刻蚀技术在硅片上刻蚀出直径为20μm,高度为50μm的圆柱阵列;基于化学法破裂细胞,设计了用于血细胞破裂的夹流式微沟道,采用湿法腐蚀技术在硅片上腐蚀出深度约为80μm的微沟道;基于固相萃取原理,设计了用于DNA提纯的介孔固相载体,采用电化学阳极腐蚀技术在硅微沟道内表面制得表面积为300m2/g的介孔层.分别在芯片上实现了血细胞的分离、血细胞的破裂以及DNA的提纯. 展开更多
关键词 BIOMEMS 样品前处理 微流控芯片 深刻蚀技术 电化学阳极腐蚀技术
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In-situ investigation of atmospheric corrosion behavior of bronze under thin electrolyte layers using electrochemical technique 被引量:6
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作者 廖晓宁 曹发和 +3 位作者 陈安娜 刘文娟 张鉴清 曹楚南 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2012年第5期1239-1249,共11页
The atmospheric corrosion behavior of bronze under thin electrolyte layer (TEL) with different thicknesses was monitored using cathodic polarization curves, open circuit potential (OCP) and electrochemical impedan... The atmospheric corrosion behavior of bronze under thin electrolyte layer (TEL) with different thicknesses was monitored using cathodic polarization curves, open circuit potential (OCP) and electrochemical impedance spectroscopy (EIS). Cathodic polarization result indicates that the cathodic limiting current density increases with decreasing the TEL thickness. EIS result shows that the corrosion rate increases with decreasing the TEL thickness at the initial stage because the corrosion is dominated by the cathodic process, whereas after long immersion time, the corrosion degree with the TEL thickness is in the sequence of 150 μm 〉 310 μm〉 10μm ≈ bulk solution 〉 57 μm. The measurements of OCP and EIS present in-situ electrochemical corrosion information and their results are in good agreement with that of physical characterizations. 展开更多
关键词 BRONZE thin electrolyte layer in-situ investigation atmospheric corrosion electrochemical technique
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Copper corrosion in hot and dry atmosphere environment in Turpan, China 被引量:3
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作者 孔德成 董超芳 +4 位作者 方月华 肖葵 郭春云 何刚 李晓刚 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2016年第6期1721-1728,共8页
The atmospheric corrosion behavior of pure copper exposed for three years in Turpan, China, which is a typical hot and dry atmosphere environment, was investigated using mass-loss tests, morphology observations, com... The atmospheric corrosion behavior of pure copper exposed for three years in Turpan, China, which is a typical hot and dry atmosphere environment, was investigated using mass-loss tests, morphology observations, composition analyses, and electrochemical techniques. The results indicated that the annual corrosion rate of pure copper was approximately 2.90 μm/a. An uneven distribution of corrosion products was observed by scanning electron microscopy; this uneven distribution was attributed to the dehydration process during wet–dry and cold–hot cycles, and the compositions mainly consisted of cuprite (Cu2O) and atacamite (Cu2Cl(OH)3). Electrochemical measurements showed that deposits on copper improved its resistance to corrosion and the protectiveness decreased with increasing temperature. On the other hand, results obtained using the scanning vibrating electrode technique showed that the porous and uneven structure of the deposit layer generated a spatial separation of cathodic and anodic reaction sites, which accelerated the corrosion process in wet and rainy weather. 展开更多
关键词 COPPER atmospheric corrosion composition analysis electrochemical technology
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使用金属接点的阳极防蚀法
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作者 燕林 《石油化工腐蚀与防护》 CAS 2004年第3期9-9,共1页
关键词 金属接点 电化学腐蚀技术 硫酸 电位 振荡现象
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