A novel analytical model for the thin film silicon on insulator (TFSOI) reduced surface field (RESURF) devices has been proposed.Based on the 2-D Poisson equation solution,the analytical expressions for the surface po...A novel analytical model for the thin film silicon on insulator (TFSOI) reduced surface field (RESURF) devices has been proposed.Based on the 2-D Poisson equation solution,the analytical expressions for the surface potential and field distributions are derived.From this analysis,the optimum design condition for the maximum breakdown voltage is obtained.The dependence of the maximum breakdown voltage on the drift region length is examined and the relationship between the critical doping concentration and the front- and back- interface oxide layer thickness is discussed.The numerical simulation performed by the advanced semiconductor simulation tool,DESSIS-ISE,has been shown to support the analytical results.展开更多
A novel 1.55 μm spot-size converter integrated with electroabsorption modulator is designed and fabricated with conventional photolithography and chemical wet etching process.For the modulator,we employed a deeply-et...A novel 1.55 μm spot-size converter integrated with electroabsorption modulator is designed and fabricated with conventional photolithography and chemical wet etching process.For the modulator,we employed a deeply-etched ridge waveguide structure with polyimide on each side of its walls.For the spot-size converter,we employed a buried double-core structure in which a ridge-based passive waveguide is incorporated.The wide and thin passive waveguide is optically combined with a laterally tapered active waveguide to control the mode size.By simulation,the figure of merit is 4.17(dB/V/(100 μm)) and the beam divergence angles in the horizontal and vertical directions are as small as 11.2°×13.0°,respectively.展开更多
This paper considers the design of EMAT （Electro-Magnetic Acoustic Transducer） based on numerical simulation. The EMAT consists of an exiting coil and two permanent magnets, which transmits the ultrasonic wave by th...This paper considers the design of EMAT （Electro-Magnetic Acoustic Transducer） based on numerical simulation. The EMAT consists of an exiting coil and two permanent magnets, which transmits the ultrasonic wave by the Lorentz force between the eddy current and the static magnetic field by the magnets. From the experimental result on self-prepared EMATs, the intensity and the directivity of the transmitted wave depend on the widths of the coil and the magnets. By means of EEM analysis the authors attempt to determine the optimal values of the above widths such that both the intensity and the directivity achieve the maximum or allowable performance.展开更多
In order to reduce transmission loss of the optical waveguide in Mach-Zehnder (M-Z) electro-optical (EO) polymer modulator,the basic iterative formula of semi-vector finite-difference beam propagation method (FD-BPM) ...In order to reduce transmission loss of the optical waveguide in Mach-Zehnder (M-Z) electro-optical (EO) polymer modulator,the basic iterative formula of semi-vector finite-difference beam propagation method (FD-BPM) is obtained from the scalar wave equation. The transition waveguide is combined with S-type bend branch waveguide for the M-Z EO modulator in the branch waveguide. The effects of structure parameters such as ridge width,length of the branch waveguide and interferometer spacing on the transmission loss are systematically studied by using the semi-vector FD-BPM method. The structure is optimized as an S-sine bend branch waveguide,with rib width w=7μm,length of branch waveguide L=1200μm and interferometer spacing G=22 μm. The results show that the optimized structure can reduce transmission loss to 0.083 dB,which have a certain reference value to the design of optical waveguide in M-Z polymer modulator.展开更多
A kind of closed-loop Hall effect sensor is designed and fabricated by considering several factors such as iron core material, Hall device, as well as selected integrated circuit. Through studying the effect of the ir...A kind of closed-loop Hall effect sensor is designed and fabricated by considering several factors such as iron core material, Hall device, as well as selected integrated circuit. Through studying the effect of the iron material and structures of current sensor, a kind of optimal Hall effect current sensor is found. The experimental results show that the presented closed-loop Hall effect current sensor achieves 1 mA/A sensitivity. And its lineafity and accuracy are 0.1% and 0.35% FS, respectively, at cur- rents ranging from 0 to 50 A.展开更多
文摘A novel analytical model for the thin film silicon on insulator (TFSOI) reduced surface field (RESURF) devices has been proposed.Based on the 2-D Poisson equation solution,the analytical expressions for the surface potential and field distributions are derived.From this analysis,the optimum design condition for the maximum breakdown voltage is obtained.The dependence of the maximum breakdown voltage on the drift region length is examined and the relationship between the critical doping concentration and the front- and back- interface oxide layer thickness is discussed.The numerical simulation performed by the advanced semiconductor simulation tool,DESSIS-ISE,has been shown to support the analytical results.
基金Supported by the National Natural Science Foundation of China(90101023) and National"973"Project(20000683-1)
文摘A novel 1.55 μm spot-size converter integrated with electroabsorption modulator is designed and fabricated with conventional photolithography and chemical wet etching process.For the modulator,we employed a deeply-etched ridge waveguide structure with polyimide on each side of its walls.For the spot-size converter,we employed a buried double-core structure in which a ridge-based passive waveguide is incorporated.The wide and thin passive waveguide is optically combined with a laterally tapered active waveguide to control the mode size.By simulation,the figure of merit is 4.17(dB/V/(100 μm)) and the beam divergence angles in the horizontal and vertical directions are as small as 11.2°×13.0°,respectively.
文摘This paper considers the design of EMAT （Electro-Magnetic Acoustic Transducer） based on numerical simulation. The EMAT consists of an exiting coil and two permanent magnets, which transmits the ultrasonic wave by the Lorentz force between the eddy current and the static magnetic field by the magnets. From the experimental result on self-prepared EMATs, the intensity and the directivity of the transmitted wave depend on the widths of the coil and the magnets. By means of EEM analysis the authors attempt to determine the optimal values of the above widths such that both the intensity and the directivity achieve the maximum or allowable performance.
基金supported by the National High Technology Research and Development Program of China (No.2009AA03Z413)
文摘In order to reduce transmission loss of the optical waveguide in Mach-Zehnder (M-Z) electro-optical (EO) polymer modulator,the basic iterative formula of semi-vector finite-difference beam propagation method (FD-BPM) is obtained from the scalar wave equation. The transition waveguide is combined with S-type bend branch waveguide for the M-Z EO modulator in the branch waveguide. The effects of structure parameters such as ridge width,length of the branch waveguide and interferometer spacing on the transmission loss are systematically studied by using the semi-vector FD-BPM method. The structure is optimized as an S-sine bend branch waveguide,with rib width w=7μm,length of branch waveguide L=1200μm and interferometer spacing G=22 μm. The results show that the optimized structure can reduce transmission loss to 0.083 dB,which have a certain reference value to the design of optical waveguide in M-Z polymer modulator.
基金supported by the National Basic Research Program of China("973"Project)(Grant No.2011CB309504)the National Key Project of Semiconductor Equipment(02)(Grant No.2009ZX02037)
文摘A kind of closed-loop Hall effect sensor is designed and fabricated by considering several factors such as iron core material, Hall device, as well as selected integrated circuit. Through studying the effect of the iron material and structures of current sensor, a kind of optimal Hall effect current sensor is found. The experimental results show that the presented closed-loop Hall effect current sensor achieves 1 mA/A sensitivity. And its lineafity and accuracy are 0.1% and 0.35% FS, respectively, at cur- rents ranging from 0 to 50 A.
