The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibratin...The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibrating modes. The volume is much smaller than other types of charge-induced EFSs such as field-mills. As miniaturizing, the induced signal is reduced enormously and a high sensitive circuit is needed to detect it. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Computer simulations for different structural parameters of the EFSs and vibrating methods have been carried out by Finite Element Method (FEM). It is proved that the new structures are realizable and the output signals are detectable.展开更多
基金Supported by the National Natural Science Foundation of China (No.60172001).
文摘The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibrating modes. The volume is much smaller than other types of charge-induced EFSs such as field-mills. As miniaturizing, the induced signal is reduced enormously and a high sensitive circuit is needed to detect it. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Computer simulations for different structural parameters of the EFSs and vibrating methods have been carried out by Finite Element Method (FEM). It is proved that the new structures are realizable and the output signals are detectable.
