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SGT-MOSFET电场解析模型的建立
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作者 苏乐 王彩琳 +2 位作者 杨武华 梁晓刚 张超 《物理学报》 SCIE EI CAS CSCD 北大核心 2023年第14期287-295,共9页
屏蔽栅沟槽金属氧化物半导体场效应晶体管(SGT-MOSFET)在体内引入了纵向接源电极的屏蔽栅极,可以辅助耗尽漂移区,其耐压原理与沟槽MOSFET(VUMOSFET)不同.本文以110 V左右结构的SGTMOSFET为研究对象,通过数值仿真、理论分析以及解析建模... 屏蔽栅沟槽金属氧化物半导体场效应晶体管(SGT-MOSFET)在体内引入了纵向接源电极的屏蔽栅极,可以辅助耗尽漂移区,其耐压原理与沟槽MOSFET(VUMOSFET)不同.本文以110 V左右结构的SGTMOSFET为研究对象,通过数值仿真、理论分析以及解析建模,研究了不同结构的耐压原理以及结构参数与电场强度分布的相关性;建立了与器件各个结构参数相关的电场解析模型,为器件结构设计提供了理论依据;并引入雪崩载流子对小电流下的电场解析模型进行了修正,使得解析结果和仿真结果吻合较好;通过修正后的电场解析模型提取了最优电场下的场氧厚度,使得相应产品的静、动态特性得到明显改善,从而极大地提升了器件的性能. 展开更多
关键词 SGT-MOSFET 电场解析模型 雪崩载流子 场氧厚度
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A Novel Analytical Model for Surface Electrical Field Distribution and Optimization of TFSOI RESURF Devices 被引量:1
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作者 何进 张兴 +1 位作者 黄如 王阳元 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第4期402-408,共7页
A novel analytical model for the thin film silicon on insulator (TFSOI) reduced surface field (RESURF) devices has been proposed.Based on the 2-D Poisson equation solution,the analytical expressions for the surface po... A novel analytical model for the thin film silicon on insulator (TFSOI) reduced surface field (RESURF) devices has been proposed.Based on the 2-D Poisson equation solution,the analytical expressions for the surface potential and field distributions are derived.From this analysis,the optimum design condition for the maximum breakdown voltage is obtained.The dependence of the maximum breakdown voltage on the drift region length is examined and the relationship between the critical doping concentration and the front- and back- interface oxide layer thickness is discussed.The numerical simulation performed by the advanced semiconductor simulation tool,DESSIS-ISE,has been shown to support the analytical results. 展开更多
关键词 TFSOI RESURF devices surface electric field distribution potential profile breakdown voltage optimum design
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Analytical Model of Surface Field Distribution and Breakdown Voltage for RESURF LDMOS Transistor 被引量:1
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作者 何进 张兴 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第9期1102-1106,共5页
An analytical model of the surface field distribution and breakdown voltage of the reduced surface field lateral double diffusion MOS transistor is proposed.Based on the 2-D Poisson's equation solution,the derived... An analytical model of the surface field distribution and breakdown voltage of the reduced surface field lateral double diffusion MOS transistor is proposed.Based on the 2-D Poisson's equation solution,the derived model gives the closed form solutions of the surface potential and electrical field distributions as a function of the structure parameters and drain bias.A criterion for obtaining the optimal trade-off between the breakdown voltage and on-resistance is also presented to serve to quantify the maximum breakdown voltage and optimal relations of all design parameters.Analytical results are shown in good agreement with the numerical analysis obtained by the semiconductor device simulator MEDICI and previous reported experimental data. 展开更多
关键词 RESURF principle LDMOS power transistor breakdown voltage surface field ON-RESISTANCE optimum design
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An Analytical Model of Electron Mobility for Strained-Si Channel nMOSFETs 被引量:1
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作者 李小健 谭耀华 田立林 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第5期863-868,共6页
An analytical model of electron mobility for strained-silicon channel nMOSFETs is proposed in this paper. The model deals directly with the strain tensor,and thus is independent of the manufacturing process. It is sui... An analytical model of electron mobility for strained-silicon channel nMOSFETs is proposed in this paper. The model deals directly with the strain tensor,and thus is independent of the manufacturing process. It is suitable for (100〉/ 〈110) channel nMOSFETs under biaxial or (100〉/〈 110 ) uniaxial stress and can be implemented in conventional device simulation tools . 展开更多
关键词 STRAINED-SI electron mobility analytical model NMOSFET uniaxial stress/strain
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