期刊文献+
共找到25篇文章
< 1 2 >
每页显示 20 50 100
电子扫描阀测压系统
1
作者 宋巍巍 施洪昌 汤更生 《自动化信息》 2000年第8期36-38,共3页
电子扫描阀压力系统是九十年代以来在世界上应用比较广泛的测压设备。它是一个高度模块化的数据采集系统,可以满足典型的工业应用,也可以应用于更复杂的风洞和气轮机,配置和操作十分简单。本文介绍了PS18400电子扫描阀压力系统的原... 电子扫描阀压力系统是九十年代以来在世界上应用比较广泛的测压设备。它是一个高度模块化的数据采集系统,可以满足典型的工业应用,也可以应用于更复杂的风洞和气轮机,配置和操作十分简单。本文介绍了PS18400电子扫描阀压力系统的原理,硬件组成,软件开发和在2.4m×2.4m风洞中的使用情况。 展开更多
关键词 电子扫描 测压系统 风洞实验 电子扫描技术 航空航天技术
下载PDF
低温电子体层摄影术——一种揭示细胞内部活动的新技术
2
作者 张昕 《国外科技动态》 2002年第12期31-31,13,共2页
关键词 低温电子体层摄影术 生物学研究 细胞结构 电子扫描技术
下载PDF
用神经网络识别钞票真假的研究
3
作者 杨中东 雷玉堂 《国际防伪》 2007年第1期74-78,共5页
1、前言 随着我国国民经济的发展,现金流通规模庞大,银行出纳柜台现金处理工作特别繁重,因而金融交易急需金融自动化。但在金融交易中,动态实时准确辨别钞票的真假是关键。随着科技的飞速发展,印刷技术、复印技术和电子扫描技术... 1、前言 随着我国国民经济的发展,现金流通规模庞大,银行出纳柜台现金处理工作特别繁重,因而金融交易急需金融自动化。但在金融交易中,动态实时准确辨别钞票的真假是关键。随着科技的飞速发展,印刷技术、复印技术和电子扫描技术等也飞速进步。 展开更多
关键词 网络识别 真假 钞票 神经 金融交易 电子扫描技术 国民经济 印刷技术
下载PDF
水泥加固高含盐软土的强度和微观结构研究 被引量:11
4
作者 邢皓枫 徐超 +1 位作者 叶观宝 杨晓明 《同济大学学报(自然科学版)》 EI CAS CSCD 北大核心 2008年第12期1606-1610,共5页
通过高含盐水泥土室内无侧限抗压强度试验,研究了Mg2+,Cl-,SO42-离子含量变化对高含盐水泥土强度的影响及其变化规律;利用X射线衍射和扫描电子显微技术,分析了不同离子含量下水泥土的微观结构特征及其与水泥土强度的内在联系.研究结果表... 通过高含盐水泥土室内无侧限抗压强度试验,研究了Mg2+,Cl-,SO42-离子含量变化对高含盐水泥土强度的影响及其变化规律;利用X射线衍射和扫描电子显微技术,分析了不同离子含量下水泥土的微观结构特征及其与水泥土强度的内在联系.研究结果表明,水泥土强度与C—S—H及C—A—H总含量存在很好的线性相关性;高含盐软土中Mg2+,Cl-,SO42-含量变化不仅引起水泥土微观结构的差异,而且高含量对水泥土强度有不同程度的负面影响,这应引起工程应用中的重视. 展开更多
关键词 水泥土 无侧限抗压强度 电子扫描显微技术 微观结构
下载PDF
Development of advanced electron tomography in materials science based on TEM and STEM 被引量:5
5
作者 李茂华 杨延清 +4 位作者 黄斌 罗贤 张伟 韩明 汝继刚 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2014年第10期3031-3050,共20页
The recent developments of electron tomography(ET) based on transmission electron microscopy(TEM) and scanning transmission electron microscopy(STEM) in the field of materials science were introduced. The variou... The recent developments of electron tomography(ET) based on transmission electron microscopy(TEM) and scanning transmission electron microscopy(STEM) in the field of materials science were introduced. The various types of ET based on TEM as well as STEM were described in detail, which included bright-field(BF)-TEM tomography, dark-field(DF)-TEM tomography, weak-beam dark-field(WBDF)-TEM tomography, annular dark-field(ADF)-TEM tomography, energy-filtered transmission electron microscopy(EFTEM) tomography, high-angle annular dark-field(HAADF)-STEM tomography, ADF-STEM tomography, incoherent bright field(IBF)-STEM tomography, electron energy loss spectroscopy(EELS)-STEM tomography and X-ray energy dispersive spectrometry(XEDS)-STEM tomography, and so on. The optimized tilt series such as dual-axis tilt tomography, on-axis tilt tomography, conical tilt tomography and equally-sloped tomography(EST) were reported. The advanced reconstruction algorithms, such as discrete algebraic reconstruction technique(DART), compressed sensing(CS) algorithm and EST were overviewed. At last, the development tendency of ET in materials science was presented. 展开更多
关键词 electron tomography materials science transmission electron microscopy scanning transmission electron microscopy
下载PDF
网上阅卷系统功效浅析 被引量:4
6
作者 肖亮 《信息技术教育》 2007年第4期66-67,共2页
传统手工判卷的费时、费力、准确性差等缺点曾一度困扰着一代又一代的教师和学生,随着网络技术的发展,一种更高效、更准确、更方便、更智能的网上阅卷方式日渐盛行起来。网上阅卷,就是以计算机网络技术、表单识别技术和电子扫描技术... 传统手工判卷的费时、费力、准确性差等缺点曾一度困扰着一代又一代的教师和学生,随着网络技术的发展,一种更高效、更准确、更方便、更智能的网上阅卷方式日渐盛行起来。网上阅卷,就是以计算机网络技术、表单识别技术和电子扫描技术为依托,对客观题采用计算机自动识别,对主观题采用计算机显示试卷信息、判卷人给分的计算机判卷信息处理系统。这个系统不仅可以控制主观题阅卷误差,实现阅卷的公正性、公平性,而且通过计算机处理判卷分数信息,可以极大地提高判卷效率。 展开更多
关键词 阅卷系统 计算机网络技术 信息处理系统 计算机自动识别 功效 电子扫描技术 计算机显示 计算机处理
下载PDF
开发邮票辨伪系统刍议 被引量:1
7
作者 陈震 《邮政研究》 2018年第2期4-4,共1页
随着印刷技术、复印技术和电子扫描技术的发展,邮票伪造、变造水平越来越高。大量的假邮票涌入市场,不仅在集邮领域给集邮爱好者带来困扰,还在通信市场给邮政企业增加人力、物力的负担,严重扰乱社会市场秩序。特别是当不法分子将高仿假... 随着印刷技术、复印技术和电子扫描技术的发展,邮票伪造、变造水平越来越高。大量的假邮票涌入市场,不仅在集邮领域给集邮爱好者带来困扰,还在通信市场给邮政企业增加人力、物力的负担,严重扰乱社会市场秩序。特别是当不法分子将高仿假邮票出售到通信市场,侥幸实现邮票的邮资凭证功能时,会给邮政企业造成经济损失。通过对沛县各家邮政网点进行调研发现. 展开更多
关键词 邮票 系统 辨伪 开发 电子扫描技术 邮政企业 通信市场 印刷技术
下载PDF
点钞机的结构原理与辨伪 被引量:1
8
作者 于滨红 《今日科苑》 2008年第2期50-50,共1页
由于现金流通规模庞大,银行出纳柜台现金处理工作繁重,点钞机已成为不可缺少的设备。点钞机集计数和辨伪于一身,随着印刷技术、复印技术和电子扫描技术的发展,伪钞制造水平越来越高,必须不断提高点钞机的辨伪性能。
关键词 点钞机 结构原理 电子扫描技术 印刷技术 复印技术 制造水平 现金 流通
下载PDF
点钞机的辨伪原理
9
《安防科技(安全管理者)》 2005年第2期41-43,共3页
我国现金流通规模庞大,银行出纳柜台现金处理工作繁重,点钞机已成为不可缺少的设备.点钞机集计数和辨伪于一身,随着印刷技术、复印技术和电子扫描技术的发展,伪钞制造水平越来越高,必须不断提高点钞机的辨伪性能.
关键词 点钞机 原理 电子扫描技术 印刷技术 复印技术 制造水平 现金 流通 银行
下载PDF
Microstructure of ferrospheres in fly ashes: SEM, EDX and ESEM analysis 被引量:5
10
作者 Qing-feng XUE Sheng-gao LU 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2008年第11期1595-1600,共6页
Ferrospheres in fly ashes from a coal-fired power plant were extracted by a magnetic separation technique and their microstructure was studied by scanning electron microscopy (SEM), energy dispersive X-ray analysis (E... Ferrospheres in fly ashes from a coal-fired power plant were extracted by a magnetic separation technique and their microstructure was studied by scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX) and environmental scanning electron microscopy (ESEM). Ferrospheres in fly ashes show significant iron enrichment compared to their respective fly ashes. Iron oxides in ferrospheres mainly occur as minerals magnetite (Fe3O4) and hematite (α-Fe2O3), which are derived mainly from the decomposition and oxidation of iron-bearing minerals in coal during combustion. EDX data indicate that ferrospheres also contain Si, S, Al and Ca resulting from quartz, mullite, anhydrite and amorphous materials. A large percentage of ferrospheres are commonly 5~50 μm in size. The microstructure of ferrospheres includes smooth, polygonal, dendritic, granular and molten drop characteristics. SEM coupled with EDX provided fast and accurate results of the microstructure and chemical composition of ferrospheres, and helped us to assess environmental issues related to the disposal and utilization of fly ashes. 展开更多
关键词 Fly ash Ferrosphere MICROSTRUCTURE Scanning electron microscopy (SEM)
下载PDF
Effects of ultrasonic dispersion on structure of electrodeposited Ni coating on AZ91D magnesium alloy 被引量:2
11
作者 吴化 赵国良 +2 位作者 穆君伟 李雪松 何毅 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2010年第B07期703-707,共5页
To obtain the refined electrodeposited nickel layer on AZ91D magnesium alloy,ultrasonic technology was applied in the processes of pre-treatment and electrodeposition.The phases of pre-treatment layer and the nickel c... To obtain the refined electrodeposited nickel layer on AZ91D magnesium alloy,ultrasonic technology was applied in the processes of pre-treatment and electrodeposition.The phases of pre-treatment layer and the nickel coating were analyzed by X-ray diffractometry(XRD)and X-ray photoelectron spectroscopy(XPS),and the microstructure was observed by scanning electron microscopy(SEM).Then,the effects of ultrasonic dispersion on the microstructure of pre-treatment layer and the grain refinement of electrodeposited nickel layer were discussed.The results showed that the pre-treatment electrodeposited Cu-Sn layer with compact microstructure could be synthesized in alkaline copper-tin liquid with ultrasonic agitation,as a result,smooth and refined nickel coating formed on AZ91D magnesium alloy.On the other hand,preferred orientation in the coating decreased because of the refined grains. 展开更多
关键词 AZ91D magnesium alloy Cu-Sn layer Ni coating ELECTRODEPOSITION ultrasonic dispersion
下载PDF
Sintering technology for micro heat pipe with sintered wick 被引量:5
12
作者 李西兵 汤勇 +2 位作者 李勇 周述璋 曾志新 《Journal of Central South University》 SCIE EI CAS 2010年第1期102-109,共8页
In order to study reasonable sintering technological parameters and appropriate copper powder size range of micro heat pipe (MHP) with the sintered wick, the forming principle of copper powders in wicks and MHP's ... In order to study reasonable sintering technological parameters and appropriate copper powder size range of micro heat pipe (MHP) with the sintered wick, the forming principle of copper powders in wicks and MHP's heat transfer capabilities were first analyzed, then copper powders with different cell sizes and dispersions were sintered in RXL-12-11 resistance furnace under the protection of the hydrogen at different sintering temperatures for different durations of sintering time, and finally the sintered wicks' scanning electron microscope (SEM) images and their heat transfer capabilities were analyzed. The results indicate that the wick sintered with copper powders of larger cell size or smaller size range has better sintering properties and larger heat transfer capabilities; and that the increase of either sintering temperatures or sintering time also helps to improve the wick's sintering properties and heat transfer capabilities, and the former affects more obviously than the latter. Considering both its manufacturing cost and performance requirements, it is recommended that copper powders with the size range of 140-170 μm are sintered at 900-950℃ for 30-60 min in practical manufacturing. In addition, two approaches to improve wick's porosity are also proposed through theoretical analysis, which suggests that the larger the wick's porosity, the better the heat transfer capabilities of the MHP. 展开更多
关键词 micro heat pipe copper powders WICK forming principle
下载PDF
Synthesis and Structural Characterization of Sm-Sr Nickelates
13
作者 Patricia Mendonga Pimentel Rosane Maria Pessoa Beffmio Oliveira +3 位作者 Jose Humberto Araujo Filipe Silva Oliveira Osmar Roberto Bagnato Dulce Maria de Araujo Melo 《Journal of Chemistry and Chemical Engineering》 2012年第6期526-530,共5页
The main purpose of this work was to obtain Sm-Sr nickelates nanoparticles with Ruddelsden-Popper type structures obtained by a simple process such as gelatin synthesis. The powders were calcinated at 900 ℃ and chara... The main purpose of this work was to obtain Sm-Sr nickelates nanoparticles with Ruddelsden-Popper type structures obtained by a simple process such as gelatin synthesis. The powders were calcinated at 900 ℃ and characterized by X-ray diffraction, thermogravimetric analysis, scanning electron microscopy and high-resolution transmission electron microscopy techniques. The effect of chemical substitution of the Sm^3+ by Sr^2+ ions on the structural properties of the powders was studied. The Rietveld's method was successfully applied for determination of the quantitative phase analysis of the powders and revealed that the main phase of the powders for different strontium content is of Ruddelsden-Popper type structure. A symmetry change from orthorhombic to tetragonal is observed as increasing strontium. 展开更多
关键词 Nanostructures electron microscopy X-ray diffraction Ruddelsden-Popper.
下载PDF
Microencapsulated tumor assay:Evaluation of the nude mouse model of pancreatic cancer 被引量:1
14
作者 Ming-Zhe Ma Dong-Feng Cheng +5 位作者 Jin-Hua Ye Yong Zhou Jia-Xiang Wang Min-Min Shi Bao-San Han Cheng-Hong Peng 《World Journal of Gastroenterology》 SCIE CAS CSCD 2012年第3期257-267,共11页
AIM: To establish a more stable and accurate nude mouse model of pancreatic cancer using cancer cell microencapsulation. METHODS: The assay is based on microencapsulation technology, wherein human tumor cells are enca... AIM: To establish a more stable and accurate nude mouse model of pancreatic cancer using cancer cell microencapsulation. METHODS: The assay is based on microencapsulation technology, wherein human tumor cells are encapsulated in small microcapsules (approximately 420 μm in diameter) constructed of semipermeable membranes. We implemented two kinds of subcutaneous implantation models in nude mice using the injection of single tumor cells and encapsulated pancreatic tumor cells. The size of subcutaneously implanted tumors was observed ona weekly basis using two methods, and growth curves were generated from these data. The growth and metastasis of orthotopically injected single tumor cells and encapsulated pancreatic tumor cells were evaluated at four and eight weeks postimplantation by positron emission tomography-computed tomography scan and necropsy. The pancreatic tumor samples obtained from each method were then sent for pathological examination. We evaluated differences in the rates of tumor incidence and the presence of metastasis and variations in tumor volume and tumor weight in the cancer microcapsules vs single-cell suspensions. RESULTS: Sequential in vitro observations of the microcapsules showed that the cancer cells in microcapsules proliferated well and formed spheroids at days 4 to 6. Further in vitro culture resulted in bursting of the membrane of the microcapsules and cells deviated outward and continued to grow in flasks. The optimum injection time was found to be 5 d after tumor encapsulation. In the subcutaneous implantation model, there were no significant differences in terms of tumor volume between the encapsulated pancreatic tumor cells and cells alone and rate of tumor incidence. There was a significant difference in the rate of successful im- plantation between the cancer cell microencapsulation group and the single tumor-cell suspension group (100% vs 71.43%, respectively, P = 0.0489) in the orthotropic implantation model. The former method displayed an obvious advantage in tumor mass (4th wk: 0.0461 ± 0.0399 vs 0.0313 ± 0.021, t = -0.81, P = 0.4379; 8th wk: 0.1284 ± 0.0284 vs 0.0943 ± 0.0571, t = -2.28, respectively, P = 0.0457) compared with the latter in the orthotopic implantation model. CONCLUSION: Encapsulation of pancreatic tumor cells is a reliable method for establishing a pancreatic tumor animal model. 展开更多
关键词 Nude mice Model of pancreatic neoplasms Encapsulation Subcutaneous implantation model Ortho- topic implantation model
下载PDF
Preparation process and characterization of new Pt/stainless steel wire mesh catalyst designed for volatile organic compounds elimination 被引量:1
15
作者 张婷 陈敏 +1 位作者 高园园 郑小明 《Journal of Central South University》 SCIE EI CAS 2012年第2期319-323,共5页
A novel 0.1% Pd-0.05% (mass fraction) Pt/stainless steel wire mesh catalyst was prepared for volatile organic compounds (VOCs) elimination. The catalyst was synthesized by stainless steel wire mesh as support and ... A novel 0.1% Pd-0.05% (mass fraction) Pt/stainless steel wire mesh catalyst was prepared for volatile organic compounds (VOCs) elimination. The catalyst was synthesized by stainless steel wire mesh as support and then treated by anodic oxidation technology to develop a porous membrane on the support. During the anodic oxidation process, various electrolytes were used to investigate the formation of porous membrane. And the catalytic performance of the catalysts was tested by using toluene and acetone combustion as model reaction. The temperatures of complete toluene and acetone conversion were decreased to 180℃ and 240 ℃, respectively. The morphologies of the stainless steel wire mesh supports and catalysts were characterized by means of scanning electron microscopy (SEM) and temperature-programmed reduction (TPR). 展开更多
关键词 volatile organic compounds anodic oxidation ELECTROLYTE PD
下载PDF
Preparation of Magnesium Oxide Whisker by MgSO4·5Mg(OH)2·2H2O Whisker "Pseudomorph" Technique
16
作者 Zanquan Yi Yushuang Shen +1 位作者 Xueliang Zhai Aidong Zhao 《Journal of Chemistry and Chemical Engineering》 2010年第7期35-38,共4页
To promote the scale-up production and industrial application of magnesium oxide (MgO) whiskers, MgO whiskers were prepared by the calcination method of the precursor. The precursor MgSO4·5Mg(OH)2·2H2O ... To promote the scale-up production and industrial application of magnesium oxide (MgO) whiskers, MgO whiskers were prepared by the calcination method of the precursor. The precursor MgSO4·5Mg(OH)2·2H2O (152 MOS) single component was prepared by hydrothermal synthesis reaction in MgSO4 solution and NaOH solution. MgO whisker was prepared by heating treatment of the precursor at low heating speed to keep the structure of the precursor not be destroyed. The composition, the morphology and the structure of these whiskers were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The results indicate that the MgO whisker was about 0.5-1.2 μm in diameter and 20-80 μm in length, with an aspect ratio no less than 100. 展开更多
关键词 MGO WHISKER MgSO4·5Mg(OH)2·2H2O pseudomorph hydrothermal synthesis.
下载PDF
Role of CuO-ZnO Heterojunctions in Gas Sensing Response of CuO-ZnO Thick Films
17
作者 Madhavrao K. Deore Vishwas B. Gaikwad Gotan H. Jain 《Journal of Physical Science and Application》 2016年第2期51-60,共10页
The CuO-doped ZnO thick films were prepared by the screen printing technique. The CuO doped ZnO composite materials were obtained by mixing AR grade (99.9% pure) Zinc Oxide powder mechanochemically in acetone medium... The CuO-doped ZnO thick films were prepared by the screen printing technique. The CuO doped ZnO composite materials were obtained by mixing AR grade (99.9% pure) Zinc Oxide powder mechanochemically in acetone medium with various weight percentages of Copper Chloride (CulCI2.2H20) powder (1, 3, 5, 7 and 9wt.%). The prepared materials were sintered at 1,000 ℃ for 12 h in air ambience and ball milled to ensure sufficiently fine particle size. The films were characterized by different techniques with respect to their surface morphology and compositional property by means of SEM (scanning electron microscope) and EDXA (energy dispersive x-ray analysis). The surface morphology of the films was studied by SEM and it shows the films are porous in nature and petal-shaped grains of sizes varies from 220 nm to 250 nm were observed. The final composition of each film was determined by the EDXA analysis. The gas response of undoped ZnO and CuO doped ZnO films was studied for different gases such as CO, C12, NH3, Ethanol, H2S and LPG at operating temperature ranging from 50 ℃ to 400 ℃. The 7wt.% CuO-doped ZnO film shows good response to H2S gas (100 ppm) at 250 ℃. 展开更多
关键词 CuO-ZnO heterojunctions H2S thick film gas response SELECTIVITY response and recovery time.
下载PDF
Detecting Magma Mixing Processes Using Scanning Electron Microscopy Method
18
作者 Nicola Mari 《Journal of Earth Science and Engineering》 2016年第2期90-97,共8页
This review work explains some of the most important techniques to detect the occurrence of magma mixing phenomena in the volcanic rocks by using SEM (scanning electron microscope). In particular, the most useful me... This review work explains some of the most important techniques to detect the occurrence of magma mixing phenomena in the volcanic rocks by using SEM (scanning electron microscope). In particular, the most useful methods related to the different types of mixing are reviewed: complete mixing (blending) or incomplete mixing (mingling). For blending, backscattered electron images and EDS (energy dispersive spectroscopy) are the most accurate methods: an example taken from a sample of ash of the 2007 Stromboli volcano eruption was used. For mingling, the best method is given by X-ray elemental mapping (in particular of Ca and Si), as explained through the example taken from a sample of the 2003 explosive eruption of Soufriere Hills volcano. The aim of this work was to establish whereas would be useful to use backscattered eletron images, EDS, or X-ray elemental mapping techniques, according to the different types of mixing that occur very often in magmatic systems. 展开更多
关键词 Scanning electron microscopy VOLCANOLOGY magma mixing GEOCHEMISTRY MINERALOGY disequilibrium textures.
下载PDF
Effect of Additives on the Performance of Lead Acid Batteries
19
作者 Lankipalli Rekha Manne Venkateswarlu Kurivella Suryanarayana Murthy Mandava Jagadish 《Journal of Energy and Power Engineering》 2015年第10期866-871,共6页
Effect of titanium dioxide (TiO2) and carbon additives in the respective positive and negative material properties and the influence on the performance of the battery were investigated. The electrode samples were ch... Effect of titanium dioxide (TiO2) and carbon additives in the respective positive and negative material properties and the influence on the performance of the battery were investigated. The electrode samples were characterized by BET (Brunauer Emmett Teller), XRD (X-ray diffractometer), SEM (scanning electron microscopy) and EIS (electrochemical impedance spectroscopy) to understand the surface area, phase, structure, morphology and electrical conductivity of the respective electrode material. The surface area was obtained as 2.312 m2"g"l and 0.892 m2"g"1, respectively for 12% of activated carbon in the expander of negative and 0.70% of TiO2 (Titanium dioxide) in the PAM (positive active material). The structural analysis reveals an increase in the tetrabasic lead sulfate and also evidenced by well grown crystals in the PAM with the TiO2, respectively obtained by XRD and SEM techniques. The impedance spectra analysis shows an increase of electrical conductivity of negative active mass with temperature. The battery results showing two fold enhancements in the charge acceptance were attributed to the high surface area activated carbon in the NAM (negative active material). The materials properties of electrodes and their influence on the battery performance were discussed. 展开更多
关键词 Titanium dioxide CARBONS charge acceptance lead acid battery.
下载PDF
Active Field Canceling System in Next Generation Nano-Fab
20
作者 Feng-Chang Chuang Yu-Lin Song +5 位作者 Chwen Yu Sen-Kuei Hsu Tzyh-Ghuang Ma Tzong-Lin Wu Ching-Yuan Yang Luh-Maan Chang 《Journal of Energy and Power Engineering》 2012年第7期1163-1169,共7页
ELF (extremely low frequency) magnetic fields from power-line current influence the yield of CMOS foundry. The poor yield happens because of ELF magnetic fields inducing directly the measurement or process equipment... ELF (extremely low frequency) magnetic fields from power-line current influence the yield of CMOS foundry. The poor yield happens because of ELF magnetic fields inducing directly the measurement or process equipment for cutting-edge chips below 28 nm process. The equipments of electron microscopes, including SEM (scanning electron microscope), TEM (transmission electron microscopy), STEM (scanning transmission electron microscopy) and EBLS (electron beam lithography system) are very susceptible to ELF magnetic fields emanating from various electrical power sources outside of the building and within next generation CMOS foundry recommends a maximum of 0.3 mG. The active canceling method uses active coils with current sensing field via sensor and inducing man-made electromagnetic field to reduce the stray magnetic field. Unfortunately, the conventional system takes more time to products field because of parasitical capacitance and resistance in long coil. The longer canceling coil the system construct, the more time it takes. Besides, canceling system should spend more time on calibrating non-linear current amplifier through software design. This research designs simpler anti-electro-magnetic system instead of typical frame and develops one turn canceling coil structure to reduce delaying time. Several parallel cells generate field up to 23.81 mG controlled by MPU (micro processor unit). This system decreases the power-line inducing filed below 0.3 mG. 展开更多
关键词 Extremely low frequency power-line current CMOS foundry passive shielding actives shielding hybrid shielding.
下载PDF
上一页 1 2 下一页 到第
使用帮助 返回顶部