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基于电流致重结晶的Poly-Si纳米薄膜电阻电学修正特性
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作者 施长治 崔虹云 +2 位作者 刘晓为 揣荣岩 李智 《纳米技术与精密工程》 EI CAS CSCD 2011年第1期11-15,共5页
为了提高基于多晶硅纳米薄膜的压阻传感器的性能及成品率,对不同厚度多晶硅薄膜的电阻电学修正特性进行了研究.采用低压化学气相淀积(LPCVD)工艺,620℃下制备多晶硅薄膜.通过固相扩散法实现高掺硼,并基于光刻工艺制作成电阻.实验结果表... 为了提高基于多晶硅纳米薄膜的压阻传感器的性能及成品率,对不同厚度多晶硅薄膜的电阻电学修正特性进行了研究.采用低压化学气相淀积(LPCVD)工艺,620℃下制备多晶硅薄膜.通过固相扩散法实现高掺硼,并基于光刻工艺制作成电阻.实验结果表明,在薄膜电阻上施加高于阈值的电流,可有效降低电阻值.薄膜厚度的变化改变了薄膜结晶度及晶粒尺寸,从而影响其修正阈值电流密度及修正速率.用所建立的晶界填隙原子-空位对模型对电学修正现象进行了理论分析,认为该现象是大电流激励产生的焦耳热导致晶界发生逐层重结晶,从而增大载流子迁移率的结果.研究表明,该方法可用于高掺杂多晶硅电阻的封装后调阻. 展开更多
关键词 多晶硅 纳米薄膜 电学修正 电流致重结晶 薄膜厚度
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多晶硅纳米薄膜压阻和电学修正特性 被引量:1
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作者 陆学斌 于斌 《传感技术学报》 CAS CSCD 北大核心 2020年第7期956-960,共5页
本文制备了不同掺杂浓度的多晶硅纳米薄膜,研究了掺杂浓度对多晶硅纳米薄膜压阻和电学修正特性的影响。利用低压化学气相淀积法制备了不同掺杂浓度的多晶硅纳米薄膜,掺杂浓度分别为1.0×10^20 cm^-3、2.0×10^20 cm^-3、4.1... 本文制备了不同掺杂浓度的多晶硅纳米薄膜,研究了掺杂浓度对多晶硅纳米薄膜压阻和电学修正特性的影响。利用低压化学气相淀积法制备了不同掺杂浓度的多晶硅纳米薄膜,掺杂浓度分别为1.0×10^20 cm^-3、2.0×10^20 cm^-3、4.1×10^20 cm^-3和7.1×10^20 cm^-3。利用应变系数测量装置对不同掺杂浓度多晶硅纳米薄膜的应变系数进行了测量;利用恒流源和万用表测量不同掺杂浓度多晶硅纳米薄膜的电学修正特性。实验结果表明:多晶硅纳米薄膜的应变系数与掺杂浓度有关,应变系数范围:33.38~38.41;利用电学方法能够修正多晶硅纳米薄膜的电阻,最大修正范围可达15.4%。多晶硅纳米薄膜具有较高的应变系数,适用于制作压阻式传感器;电学修正可用来调整多晶硅纳米薄膜的电阻,进而降低传感器的失调。 展开更多
关键词 多晶硅纳米薄膜 压阻特性 电学修正 传感器
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基于电学修正多晶硅纳米薄膜的压力传感器 被引量:1
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作者 陆学斌 孙伟 于斌 《传感技术学报》 CAS CSCD 北大核心 2022年第10期1335-1339,共5页
为了进一步提高多晶硅纳米薄膜压力传感器的性能,使用80 nm厚度的多晶硅纳米薄膜作为压力传感器的压敏电阻,设计制作了一款压力传感器。压力传感器制备封装完毕后,利用电学修正技术使多晶硅纳米薄膜压敏电阻更精确地匹配。对压力传感器... 为了进一步提高多晶硅纳米薄膜压力传感器的性能,使用80 nm厚度的多晶硅纳米薄膜作为压力传感器的压敏电阻,设计制作了一款压力传感器。压力传感器制备封装完毕后,利用电学修正技术使多晶硅纳米薄膜压敏电阻更精确地匹配。对压力传感器的制备流程进行了完整描述,在25℃至200℃的温度范围内,测试了压力传感器的性能。压力传感器的满量程为0.6 MPa,在25℃和200℃时,灵敏度分别为22.19(mV/V)/MPa和18.30(mV/V)/MPa,在没有外界补偿的情况下,灵敏度的温度系数约为-0.10%/℃。在25℃和200℃时,失调分别是1.653 mV和1.615 mV,失调的温度系数约为-0.013%/℃。由于电学修正多晶硅纳米薄膜具有良好的压阻特性和温度稳定性,压力传感器表现出较好的性能。 展开更多
关键词 压力传感器 多晶硅纳米薄膜 电学修正 压阻特性
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O-Acetylated (1→6)-13-D-Glucan (Lasiodiplodan): Chemical Derivatization, Characterization and Antioxidant Activity
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作者 William N. Sanchez Luna Vidiany A. Q. Santos +3 位作者 Sirlei D. Teixeira Aneli M. Barbosa-Dekker Robert F. H.Dekker Mario A. A. da Cunha 《Journal of Pharmacy and Pharmacology》 2018年第4期320-332,共13页
β-Glucans are biomacromolecules that present biological properties of medical and pharmacological interest, The chemical modification of the primary structure of these carbohydrate biopolymers is a way to enhance or ... β-Glucans are biomacromolecules that present biological properties of medical and pharmacological interest, The chemical modification of the primary structure of these carbohydrate biopolymers is a way to enhance or achieve new biological properties. Acetylated derivatives of (1→6)-β-D-glucan (lasiodiplodan) with different degrees of substitution (0.48, 0.66, 1.03 and 1.26) were obtained and characterized by infra-red and NMR (nuclear magnetic resonance) spectroscopy, thermal analysis, X-ray diffraction and antioxidant capacity. Acetylation was confirmed by FT-IR, and βC NMR spectroscopy. Thermal analysis indicated that unmodified lasiodiplodan and the O-acetylated β-glucan derivative of degree of substitution 0.48 presented three stages of mass-loss, whereas acetylated derivatives of DS (degree of substitution) of 0.66, 1.03 and 1.26 presented four stages of mass-loss. X-ray diffractograms demonstrated that both native and acetylated lasiodiplodan presented crystalline regions in an amorphous polymeric matrix. Scanning electron microscopy revealed that O-acetylation promoted morphologic changes in the biopolymer according to the DS. Acetylation also contributed to improve antioxidant capacity. 展开更多
关键词 EXOPOLYSACCHARIDE BIOPOLYMER bioactive carbohydrate Macromolecules.
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Spectroscopic Parameters of X^3∑^-, a^1△, and A^'3△ Electronic States of SO Radical
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作者 Jie-min Wang Heng-qiang Feng +2 位作者 Jin-feng Sun De-heng Shi Zun-lue Zhu 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2012年第5期533-539,I0003,共8页
The potential energy curves (PECs) of three low-lying electronic states (X^3∑, a^1△, and a^3△) of SO radical have been studied by ab initio quantum chemical method. The calcula- tions were carried out with the ... The potential energy curves (PECs) of three low-lying electronic states (X^3∑, a^1△, and a^3△) of SO radical have been studied by ab initio quantum chemical method. The calcula- tions were carried out with the full valence complete active space self-consistent field method followed by the highly accurate valence internally contracted multireference configuration in- teraction (MRCI) approach in combination with correlation-consistent basis sets. Effects of the core-valence correlation and relativistic corrections on the PECs are taken into account. The core-valence correlation correction is carried out with the cc-pCVDZ basis set. The way to consider the relativistic correction is to use the second-order Douglas-Kroll Hamiltonian approximation, and the correction is performed at the level of cc-pV5Z basis set. To obtain more reliable results, the PECs determined by the MRCI calculations are also corrected for size-extensivity errors by means of the Davidson modification (MRCI+Q). These PECs are extrapolated to the complete basis set limit by the two-point energy extrapolation scheme. With these PECs, the spectroscopic parameters are determined. 展开更多
关键词 Spectroscopic parameter Core-valence correlation Relativistic correction EXTRAPOLATION
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