we have developed ferroelectric capacitor fabrication technique to realize low-voltage and high-density ferroelectric random access memory （FRAM）. High temperature deposited IrOxtop electrode reveals high crystallin...we have developed ferroelectric capacitor fabrication technique to realize low-voltage and high-density ferroelectric random access memory （FRAM）. High temperature deposited IrOxtop electrode reveals high crystalline quality which drastically reduces the degradation of ferroelectric film by preventing hydrogen diffusion into ferroelectric film. This improvement enables us to commercialize highly-reliable 1T 1C FRAM with memory density of 4 Mb or larger.展开更多
The development of new fabrication techniques for capacitors with high storage capabilities, called super capacitors, requires appropriated equipment in order to obtain the device＇s electric behaviours. There is seve...The development of new fabrication techniques for capacitors with high storage capabilities, called super capacitors, requires appropriated equipment in order to obtain the device＇s electric behaviours. There is several equipment to perform this analysis operating with alternating or continuum voltage. However, the elevated cost of this equipment makes purchasing it impossible in many laboratories. In this work, we present the development and construction of a low-cost impedance spectrometer that allows for the analysis of the capacitor＇s electric behaviour without taking too much time. The analysis is performed by alternating voltage and current measurements as a function of the frequency in the range of 0.001 Hz to 100 kHz. The capacitance and electric behaviour of some commercial capacitors are shown in this work, thereby proving the efficiency of the developed equipment.展开更多
文摘we have developed ferroelectric capacitor fabrication technique to realize low-voltage and high-density ferroelectric random access memory （FRAM）. High temperature deposited IrOxtop electrode reveals high crystalline quality which drastically reduces the degradation of ferroelectric film by preventing hydrogen diffusion into ferroelectric film. This improvement enables us to commercialize highly-reliable 1T 1C FRAM with memory density of 4 Mb or larger.
文摘The development of new fabrication techniques for capacitors with high storage capabilities, called super capacitors, requires appropriated equipment in order to obtain the device＇s electric behaviours. There is several equipment to perform this analysis operating with alternating or continuum voltage. However, the elevated cost of this equipment makes purchasing it impossible in many laboratories. In this work, we present the development and construction of a low-cost impedance spectrometer that allows for the analysis of the capacitor＇s electric behaviour without taking too much time. The analysis is performed by alternating voltage and current measurements as a function of the frequency in the range of 0.001 Hz to 100 kHz. The capacitance and electric behaviour of some commercial capacitors are shown in this work, thereby proving the efficiency of the developed equipment.
