A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etchi...A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.展开更多
The development of pressure sensors with highly sensitivity, fast response and facile fabrication technique is desirable for wearable electronics. Here, we successfully fabricated a flexible transparent capacitive pre...The development of pressure sensors with highly sensitivity, fast response and facile fabrication technique is desirable for wearable electronics. Here, we successfully fabricated a flexible transparent capacitive pressure sensor based on patterned microstructured silver nanowires(AgNWs)/polydimethylsiloxane(PDMS) composite dielectrics. Compared with the pure PDMS dielectric layer with planar structures, the patterned microstructured sensor exhibits a higher sensitivity(0.831 kPa^-1, <0.5 kPa), a lower detection limit,good stability and durability. The enhanced sensing mechanism about the conductive filler content and the patterned microstructures has also been discussed. A 5×5 sensor array was then fabricated to be used as flexible and transparent wearable touch keyboards systems. The fabricated pressure sensor has great potential in the future electronic skin area.展开更多
A new method of measuring gas pressure in vacuum insulation panels(VIPs)is reported in this study,which provides a fast and efficient quality control option of production.Although there are different methods of measur...A new method of measuring gas pressure in vacuum insulation panels(VIPs)is reported in this study,which provides a fast and efficient quality control option of production.Although there are different methods of measuring gas pressure for VIPs,connecting an internal measurement gauge to external data acquisition units is problematic.The thin high barrier film covering the panel’s core usually prevents external electrical wires or mechanical devices being connected to the inside of the VIPs.To solve this problem,a micro capacitive pressure sensor with 0 to 250 Pa detection range is developed to detect the vacuum pressure.The sensor has high linearity and a sensitivity of 10 mV/Pa.Moreover,through the communication mode study,an ultrasound communications system for VIPs is designed.It shows from operation that this system is stable and reliable,and quick for communication speed.This new method enables the quality detection of VIPs to be completed within 1 second.The minimum detectable pressure of VIPs is below 1 Pa,and the measurement error can be controlled around 5%.展开更多
文摘A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.
基金supported by the National Natural Science Foundation for Distinguished Young Scholars of China(NSFC,61625404)the Key Research Program of Frontier Sciences,CAS(QYZDY-SSW-JWC004)the NSFC(61504136)
文摘The development of pressure sensors with highly sensitivity, fast response and facile fabrication technique is desirable for wearable electronics. Here, we successfully fabricated a flexible transparent capacitive pressure sensor based on patterned microstructured silver nanowires(AgNWs)/polydimethylsiloxane(PDMS) composite dielectrics. Compared with the pure PDMS dielectric layer with planar structures, the patterned microstructured sensor exhibits a higher sensitivity(0.831 kPa^-1, <0.5 kPa), a lower detection limit,good stability and durability. The enhanced sensing mechanism about the conductive filler content and the patterned microstructures has also been discussed. A 5×5 sensor array was then fabricated to be used as flexible and transparent wearable touch keyboards systems. The fabricated pressure sensor has great potential in the future electronic skin area.
基金supported by the Science and Technology Projects of Fujian Province of China(Grant No.2010H6025)Science and Technology Projects of Xiamen City of China(Grant No.3502Z20103012)
文摘A new method of measuring gas pressure in vacuum insulation panels(VIPs)is reported in this study,which provides a fast and efficient quality control option of production.Although there are different methods of measuring gas pressure for VIPs,connecting an internal measurement gauge to external data acquisition units is problematic.The thin high barrier film covering the panel’s core usually prevents external electrical wires or mechanical devices being connected to the inside of the VIPs.To solve this problem,a micro capacitive pressure sensor with 0 to 250 Pa detection range is developed to detect the vacuum pressure.The sensor has high linearity and a sensitivity of 10 mV/Pa.Moreover,through the communication mode study,an ultrasound communications system for VIPs is designed.It shows from operation that this system is stable and reliable,and quick for communication speed.This new method enables the quality detection of VIPs to be completed within 1 second.The minimum detectable pressure of VIPs is below 1 Pa,and the measurement error can be controlled around 5%.
