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与CMOS兼容的MEMS气压传感器工艺实现与性能分析 被引量:1
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作者 王艳春 黄庆安 +1 位作者 聂萌 余辉洋 《纳米技术与精密工程》 EI CAS CSCD 2012年第5期464-468,共5页
采用CMOS标准工艺,同时采用三种典型MEMS后处理关键工艺,重点通过对牺牲层释放工艺进行研究,制作实现了一种新型CMOS兼容的电容式气压传感器.在该传感器结构中,作为牺牲层的是在CMOS工艺中形成的掺硼氧化硅.通过释放使电容上电极悬空从... 采用CMOS标准工艺,同时采用三种典型MEMS后处理关键工艺,重点通过对牺牲层释放工艺进行研究,制作实现了一种新型CMOS兼容的电容式气压传感器.在该传感器结构中,作为牺牲层的是在CMOS工艺中形成的掺硼氧化硅.通过释放使电容上电极悬空从而感应气压变化.释放过程采用氢氟酸HF、氟化铵、甘油和水的混合溶液.由于释放孔大小和释放孔间距的设计十分关键,通过实验验证优化了4μm×4μm的释放孔更适用于此传感器结构,并对此结构进行了性能分析与实验测试.结果表明,该气压传感器结构合理,工艺成功,重点解决了MEMS后处理中的牺牲层释放工艺与CMOS标准工艺的兼容问题,为利用CMOS标准工艺进行MEMS传感器的研制做出了有益的尝试. 展开更多
关键词 MEMS牺牲层 电容式气压传感器 CMOS标准工艺 MEMS后处理工艺
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A new method of rapid quality detection of vacuum insulation panels
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作者 WANG ShaoJie FENG YongJian +2 位作者 HUANG YuanQing WU JunChao YE YongHan 《Science China(Technological Sciences)》 SCIE EI CAS 2014年第8期1602-1609,共8页
A new method of measuring gas pressure in vacuum insulation panels(VIPs)is reported in this study,which provides a fast and efficient quality control option of production.Although there are different methods of measur... A new method of measuring gas pressure in vacuum insulation panels(VIPs)is reported in this study,which provides a fast and efficient quality control option of production.Although there are different methods of measuring gas pressure for VIPs,connecting an internal measurement gauge to external data acquisition units is problematic.The thin high barrier film covering the panel’s core usually prevents external electrical wires or mechanical devices being connected to the inside of the VIPs.To solve this problem,a micro capacitive pressure sensor with 0 to 250 Pa detection range is developed to detect the vacuum pressure.The sensor has high linearity and a sensitivity of 10 mV/Pa.Moreover,through the communication mode study,an ultrasound communications system for VIPs is designed.It shows from operation that this system is stable and reliable,and quick for communication speed.This new method enables the quality detection of VIPs to be completed within 1 second.The minimum detectable pressure of VIPs is below 1 Pa,and the measurement error can be controlled around 5%. 展开更多
关键词 vacuum insulation panels quality detection pressure sensor ultrasonic communication
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