A CMOS integrated signal processing circuit based on capacitance resonance principle whose structure is simple in capacitive sensors is designed. The waveform of output voltage is improved by choosing bootstrap refere...A CMOS integrated signal processing circuit based on capacitance resonance principle whose structure is simple in capacitive sensors is designed. The waveform of output voltage is improved by choosing bootstrap reference current mirror with initiate circuit, CMOS analogy switch and positive feedback of double-stage inverter in the circuit. Output voltage of this circuit is a symmetric square wave signal. The variation of sensitive capacitance, which is part of the capacitive sensors, can be denoted by the change of output voltage’s frequency. The whole circuit is designed with 1.5 μm P-well CMOS process and simulated by PSpice software. Output frequency varies from 261.05 kHz to 47.93 kHz if capacitance varies in the range of 1PF～15PF. And the variation of frequency can be easily detected using counter or SCU.展开更多
To achieve the characteristics of better linearity, a new type of touch mode capacitive pressure sensor named as DDTMCPS is devised, which has a pair of deformable sensing diaphragms. Compared to present touch mode ca...To achieve the characteristics of better linearity, a new type of touch mode capacitive pressure sensor named as DDTMCPS is devised, which has a pair of deformable sensing diaphragms. Compared to present touch mode capacitive pressure sensors, the new sensor is characterized by better linearity, and large linear operation range. Such a device also has high sensitivity, and other advantages of normal touch mode capacitive pressure sensor. In the case of such a novel sensor, the second diaphragm served as bottom electrode plays great roles in modifying the deflection of the first diaphragm served as top electrode, furthermore optimizing the performance of touch mode sensors. Silicon fusion bonding technology is advised to fabricate the novel device.展开更多
文摘A CMOS integrated signal processing circuit based on capacitance resonance principle whose structure is simple in capacitive sensors is designed. The waveform of output voltage is improved by choosing bootstrap reference current mirror with initiate circuit, CMOS analogy switch and positive feedback of double-stage inverter in the circuit. Output voltage of this circuit is a symmetric square wave signal. The variation of sensitive capacitance, which is part of the capacitive sensors, can be denoted by the change of output voltage’s frequency. The whole circuit is designed with 1.5 μm P-well CMOS process and simulated by PSpice software. Output frequency varies from 261.05 kHz to 47.93 kHz if capacitance varies in the range of 1PF～15PF. And the variation of frequency can be easily detected using counter or SCU.
文摘To achieve the characteristics of better linearity, a new type of touch mode capacitive pressure sensor named as DDTMCPS is devised, which has a pair of deformable sensing diaphragms. Compared to present touch mode capacitive pressure sensors, the new sensor is characterized by better linearity, and large linear operation range. Such a device also has high sensitivity, and other advantages of normal touch mode capacitive pressure sensor. In the case of such a novel sensor, the second diaphragm served as bottom electrode plays great roles in modifying the deflection of the first diaphragm served as top electrode, furthermore optimizing the performance of touch mode sensors. Silicon fusion bonding technology is advised to fabricate the novel device.
