A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etchi...A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.展开更多
The paper has presented the impact on the line protection performance with the introduction of MUs （merging units） in the process bus level. The paper begins with the introduction on modem digital substation structu...The paper has presented the impact on the line protection performance with the introduction of MUs （merging units） in the process bus level. The paper begins with the introduction on modem digital substation structure and process bus. Then, the paper describes the performances of different sensors such as CTs （current transformers）, CVTs （capacitive voltage transformers）, FOCS （fiber optical current transducers） and FOVS （fiber optical voltage transducers）. With the use of above transducers together with MUs, the performance of distance protection function and line differential protection function have been investigated and presented. Finally, conclusions based on the study are presented in the paper.展开更多
文摘A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.
文摘The paper has presented the impact on the line protection performance with the introduction of MUs （merging units） in the process bus level. The paper begins with the introduction on modem digital substation structure and process bus. Then, the paper describes the performances of different sensors such as CTs （current transformers）, CVTs （capacitive voltage transformers）, FOCS （fiber optical current transducers） and FOVS （fiber optical voltage transducers）. With the use of above transducers together with MUs, the performance of distance protection function and line differential protection function have been investigated and presented. Finally, conclusions based on the study are presented in the paper.
