基于电容耦合式非接触电导检测(C4D)技术,设计研发了一种新型径向结构的非接触式电导测量传感器。该传感器利用串联谐振的原理,引入电感模块以消除耦合电容对测量的不利影响,扩大了测量范围,提高了测量灵敏度。同时,用仿真与实验相结合...基于电容耦合式非接触电导检测(C4D)技术,设计研发了一种新型径向结构的非接触式电导测量传感器。该传感器利用串联谐振的原理,引入电感模块以消除耦合电容对测量的不利影响,扩大了测量范围,提高了测量灵敏度。同时,用仿真与实验相结合的方法对传感器的电极张角进行了优化研究。在5.0、7.5、9.1、10.2和12.0 mm 5种不同内径的管道中进行了电导测量实验,电导测量相对误差均不超过5%,实验结果表明,所设计的新型非接触式径向C^4D电导测量传感器是可行和有效的。展开更多
A novel capacitive microwave MEMS switch with a silicon/metal/dielectric as a membrane is fabricated successfully by bonding and etching-stop process. Its principal, design, and fabricating process are described in de...A novel capacitive microwave MEMS switch with a silicon/metal/dielectric as a membrane is fabricated successfully by bonding and etching-stop process. Its principal, design, and fabricating process are described in detail. A patterned dielectric layer, Ta2O5, with dielectric constant of 24 is reached. Experiment results show this novel structure,where the switch's dielectric layer is not prepared on the transmission line, features very low insertion loss. The insertion loss is 0.06dB at 2GHz and lower than 0.5dB in the wider range from De up to 20GHz,especially when the transmission line metal is only 0. 5μm thick.展开更多
文摘基于电容耦合式非接触电导检测(C4D)技术,设计研发了一种新型径向结构的非接触式电导测量传感器。该传感器利用串联谐振的原理,引入电感模块以消除耦合电容对测量的不利影响,扩大了测量范围,提高了测量灵敏度。同时,用仿真与实验相结合的方法对传感器的电极张角进行了优化研究。在5.0、7.5、9.1、10.2和12.0 mm 5种不同内径的管道中进行了电导测量实验,电导测量相对误差均不超过5%,实验结果表明,所设计的新型非接触式径向C^4D电导测量传感器是可行和有效的。
文摘A novel capacitive microwave MEMS switch with a silicon/metal/dielectric as a membrane is fabricated successfully by bonding and etching-stop process. Its principal, design, and fabricating process are described in detail. A patterned dielectric layer, Ta2O5, with dielectric constant of 24 is reached. Experiment results show this novel structure,where the switch's dielectric layer is not prepared on the transmission line, features very low insertion loss. The insertion loss is 0.06dB at 2GHz and lower than 0.5dB in the wider range from De up to 20GHz,especially when the transmission line metal is only 0. 5μm thick.