A piezoresistive silicon accelerometer fabricated by a selective,self-stopping porous silicon (PS) etching method using an epitaxial layer for movable microstructures is described and analyzed.The technique is capable...A piezoresistive silicon accelerometer fabricated by a selective,self-stopping porous silicon (PS) etching method using an epitaxial layer for movable microstructures is described and analyzed.The technique is capable of constructing a microstructure precisely.PS is used as a sacrificial layer,and releasing holes are etched in the film.TMAH solution with additional Si powder and (NH_4)_2S_2O_8 is used to remove PS through the small releasing holes without eroding uncovered Al.The designed fabrication process is full compatible with standard CMOS process.展开更多
Electrical discharge machining (EDM) process, at present is still an experience process, wherein selected parameters are often far from the optimum, and at the same time selecting optimization parameters is costly and...Electrical discharge machining (EDM) process, at present is still an experience process, wherein selected parameters are often far from the optimum, and at the same time selecting optimization parameters is costly and time consuming. In this paper, artificial neural network (ANN) and genetic algorithm (GA) are used together to establish the parameter optimization model. An ANN model which adapts Levenberg-Marquardt algorithm has been set up to represent the relationship between material removal rate (MRR) and input parameters, and GA is used to optimize parameters, so that optimization results are obtained. The model is shown to be effective, and MRR is improved using optimized machining parameters.展开更多
A new method of electrical discharge machining （EDM） in air-mixed medium--air-mixed EDM was presented, and comparative experiments were carried out to compare the machining characteristics of air-mixed EDM with conv...A new method of electrical discharge machining （EDM） in air-mixed medium--air-mixed EDM was presented, and comparative experiments were carried out to compare the machining characteristics of air-mixed EDM with conventional EDM. The experimental results showed that better machining performances were obtained with tool electrode as the cathode and workpieee as the anode. It was found that the material removal rate （MRR） was higher, the tool electrode relative wear ratio （TWR） was lower and the surface roughness （SR） quality was better in the case of air-mixed EDM than that of conventional EDM, and the reasons bringing out the results were analyzed.展开更多
An ultra-precision servo control system for MWEDM (micro wire electrical discharge machining) based on piezoelectric ceramic motor drivers was developed. The servo discharge detection adopts an average voltage detecti...An ultra-precision servo control system for MWEDM (micro wire electrical discharge machining) based on piezoelectric ceramic motor drivers was developed. The servo discharge detection adopts an average voltage detection method, utilizes statistical methods to analyze the measured data, then controls discharge gap and makes the process more stable. The servo feed system based on DSP microprocessors applies a PID controller with incomplete derivation to reduce overshoot to improve machining accuracy, and also adopts adaptive dead-zone inverse compensation to eliminate dead-zone caused by piezoelectric ceramic motions in low servo feed speed. The simulation results show that the methods proposed in this paper can make the system recover its linearity and converge the dead-zone parameters. It is proved that the method proposed is efficient in solving this problem. Cooperating with a micro energy pulse generator, this equipment’s machining accuracy is smaller than ±0.2 micron, and surface roughness Ra is less than 0.1 micron. Punch die and cavity die (micro gear die, module 100 micron, thickness 3.5 millimeter) have been machined independently in two die steel work-pieces. These pieces can mate very well to work, which shows that the servo control system satisfies the need of MWEDM for high precision micro fabrication.展开更多
Optical flow method is one of the most important methods of analyzing motion images. Optical flow field is used to analyze characteristics of motion objects. According to motion features of micro-electronic mechani-ca...Optical flow method is one of the most important methods of analyzing motion images. Optical flow field is used to analyze characteristics of motion objects. According to motion features of micro-electronic mechani-cal system (MEMS) micro-structure, the optical algorithm based on label field and neighborhood optimization is presented to analyze the in-plane micro-motion of micro-structure. Firstly, high speed motion states for each fre-quency segment of micro-structure in cyclic motion are frozen based on stroboscopic principle. Thus a series of dynamic images of micro-structure are obtained. Secondly, the presented optical algorithm is used to analyze the image sequences, and can obtain reliable and precise optical field and reduce computing time. As micro-resonator of testing object, the phase-amplitude curve of micro-structure is derived. Experimental results indicate that the meas-urement precision of the presented algorithm is high, and measurement repeatability reaches 40 nm under the same experiment condition.展开更多
A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication proc...A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication process of microelectrode,micro hole,silicon wafer and complex microstructure was discussed. The process rules of machining efficiency and the relative electrode wear rate as well as the machining mechanism and performance of silicon micro-EDM were also researched. Machining experiments showed that the microelectrode diameter as small as 6 μm and the micro hole with minimum size of 10 μm could be obtained steadily,and the maximum aspect ratios of microelectrode and micro hole were over 25 and 10 respectively. And silicon micro-EDM experiments showed that the micro beam with the aspect ratios over 15 could be obtained easily. And a micro beam with minimum size of 23 μm width on a silicon wafer with 420 μm thickness was achieved. At last,the microstructure machining technology for micro-EDM was also discussed. And a micro-facial sculpture with free space curved surface and size of 1 mm×0.3 mm×0.18 mm was also machined successfully.展开更多
To improve the machining efficiency of large symmetrical freeform surface, this paper proposes a new machining method： symmetrical machining （SM）. Based on the concept of collision avoidance plane （CAP）, collisio...To improve the machining efficiency of large symmetrical freeform surface, this paper proposes a new machining method： symmetrical machining （SM）. Based on the concept of collision avoidance plane （CAP）, collisions among cutters or headstocks are avoided, and the area of machining residue is controlled effectively. Machining residue is eliminated due to proper design of symmetrical tool in mechanism and control project. Taking 5-axis symmetrical machine with columnar headstocks and flat cutters as example, this paper proposes collision avoidance algorithm. Finally, using a twin-skeg ship model surface as an example, the method is applied to avoiding collisions in original tool path. Simulation and real machining results show that the scheme is practical. Furthermore, the machining efficiency of SM is improved 85% more than that of the traditional single cutter technology.展开更多
To reduce mechanical vibrations induced by big errors compensation, a new software compensation method based on an improved digital differential analyzer (DDA) interpolator for static and quasi-static errors of machin...To reduce mechanical vibrations induced by big errors compensation, a new software compensation method based on an improved digital differential analyzer (DDA) interpolator for static and quasi-static errors of machine tools is proposed. Based on principle of traditional DDA interpolator, a DDA interpolator is divided into command generator and command analyzer. There are three types of errors, considering the difference of positions between compensation points and interpolation segments. According to the classification, errors are distributed evenly in data processing and compensated to certain interpolation segments in machining. On-line implementation results show that the proposed approach greatly improves positioning accuracy of computer numerical control (CNC) machine tools.展开更多
The electric double layer with the transmission of particles was presented based on the principle of electrochemistry.In accordance with this theory,the cavitation catalysis removal mechanism of ultrasonic-pulse elect...The electric double layer with the transmission of particles was presented based on the principle of electrochemistry.In accordance with this theory,the cavitation catalysis removal mechanism of ultrasonic-pulse electrochemical compound machining(UPECM) based on particles was proposed.The removal mechanism was a particular focus and was thus validated by experiments.The principles and experiments of UPECM were introduced,and the removal model of the UPECM based on the principles of UPECM was established.Furthermore,the effects of the material removal rate for the main processing parameters,including the particles size,the ultrasonic vibration amplitude,the pulse voltage and the minimum machining gap between the tool and the workpiece,were also studied through UPECM.The results show that the particles promote ultrasonic-pulse electrochemical compound machining and thus act as the catalyzer of UPECM.The results also indicate that the processing speed,machining accuracy and surface quality can be improved under UPECM compound machining.展开更多
文摘A piezoresistive silicon accelerometer fabricated by a selective,self-stopping porous silicon (PS) etching method using an epitaxial layer for movable microstructures is described and analyzed.The technique is capable of constructing a microstructure precisely.PS is used as a sacrificial layer,and releasing holes are etched in the film.TMAH solution with additional Si powder and (NH_4)_2S_2O_8 is used to remove PS through the small releasing holes without eroding uncovered Al.The designed fabrication process is full compatible with standard CMOS process.
基金Project supported by the National Natural Science Foundation of China (Nos. 50575128 and 50775128)the Outstanding Young Scientist Foundation of Shandong Province (No. 2005BS05004), China
文摘Electrical discharge machining (EDM) process, at present is still an experience process, wherein selected parameters are often far from the optimum, and at the same time selecting optimization parameters is costly and time consuming. In this paper, artificial neural network (ANN) and genetic algorithm (GA) are used together to establish the parameter optimization model. An ANN model which adapts Levenberg-Marquardt algorithm has been set up to represent the relationship between material removal rate (MRR) and input parameters, and GA is used to optimize parameters, so that optimization results are obtained. The model is shown to be effective, and MRR is improved using optimized machining parameters.
基金the Post-doctor Foundation of Heilongjiang Province(Grant No.LBH-Z06139).
文摘A new method of electrical discharge machining （EDM） in air-mixed medium--air-mixed EDM was presented, and comparative experiments were carried out to compare the machining characteristics of air-mixed EDM with conventional EDM. The experimental results showed that better machining performances were obtained with tool electrode as the cathode and workpieee as the anode. It was found that the material removal rate （MRR） was higher, the tool electrode relative wear ratio （TWR） was lower and the surface roughness （SR） quality was better in the case of air-mixed EDM than that of conventional EDM, and the reasons bringing out the results were analyzed.
文摘An ultra-precision servo control system for MWEDM (micro wire electrical discharge machining) based on piezoelectric ceramic motor drivers was developed. The servo discharge detection adopts an average voltage detection method, utilizes statistical methods to analyze the measured data, then controls discharge gap and makes the process more stable. The servo feed system based on DSP microprocessors applies a PID controller with incomplete derivation to reduce overshoot to improve machining accuracy, and also adopts adaptive dead-zone inverse compensation to eliminate dead-zone caused by piezoelectric ceramic motions in low servo feed speed. The simulation results show that the methods proposed in this paper can make the system recover its linearity and converge the dead-zone parameters. It is proved that the method proposed is efficient in solving this problem. Cooperating with a micro energy pulse generator, this equipment’s machining accuracy is smaller than ±0.2 micron, and surface roughness Ra is less than 0.1 micron. Punch die and cavity die (micro gear die, module 100 micron, thickness 3.5 millimeter) have been machined independently in two die steel work-pieces. These pieces can mate very well to work, which shows that the servo control system satisfies the need of MWEDM for high precision micro fabrication.
基金Supported by Youth Natural Science Foundation of Beijing University of Chemical Technology (No.QN0734).
文摘Optical flow method is one of the most important methods of analyzing motion images. Optical flow field is used to analyze characteristics of motion objects. According to motion features of micro-electronic mechani-cal system (MEMS) micro-structure, the optical algorithm based on label field and neighborhood optimization is presented to analyze the in-plane micro-motion of micro-structure. Firstly, high speed motion states for each fre-quency segment of micro-structure in cyclic motion are frozen based on stroboscopic principle. Thus a series of dynamic images of micro-structure are obtained. Secondly, the presented optical algorithm is used to analyze the image sequences, and can obtain reliable and precise optical field and reduce computing time. As micro-resonator of testing object, the phase-amplitude curve of micro-structure is derived. Experimental results indicate that the meas-urement precision of the presented algorithm is high, and measurement repeatability reaches 40 nm under the same experiment condition.
文摘A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication process of microelectrode,micro hole,silicon wafer and complex microstructure was discussed. The process rules of machining efficiency and the relative electrode wear rate as well as the machining mechanism and performance of silicon micro-EDM were also researched. Machining experiments showed that the microelectrode diameter as small as 6 μm and the micro hole with minimum size of 10 μm could be obtained steadily,and the maximum aspect ratios of microelectrode and micro hole were over 25 and 10 respectively. And silicon micro-EDM experiments showed that the micro beam with the aspect ratios over 15 could be obtained easily. And a micro beam with minimum size of 23 μm width on a silicon wafer with 420 μm thickness was achieved. At last,the microstructure machining technology for micro-EDM was also discussed. And a micro-facial sculpture with free space curved surface and size of 1 mm×0.3 mm×0.18 mm was also machined successfully.
基金Project supported by the National Basic Research Program of China (Grant No.2005CB724100)
文摘To improve the machining efficiency of large symmetrical freeform surface, this paper proposes a new machining method： symmetrical machining （SM）. Based on the concept of collision avoidance plane （CAP）, collisions among cutters or headstocks are avoided, and the area of machining residue is controlled effectively. Machining residue is eliminated due to proper design of symmetrical tool in mechanism and control project. Taking 5-axis symmetrical machine with columnar headstocks and flat cutters as example, this paper proposes collision avoidance algorithm. Finally, using a twin-skeg ship model surface as an example, the method is applied to avoiding collisions in original tool path. Simulation and real machining results show that the scheme is practical. Furthermore, the machining efficiency of SM is improved 85% more than that of the traditional single cutter technology.
基金the Special Project for Key Mechatronic Equipment of Zhejiang Province (No. 2006C11067)the Science&Technology Project of Zhejiang Province (No. 2005E10049), China
文摘To reduce mechanical vibrations induced by big errors compensation, a new software compensation method based on an improved digital differential analyzer (DDA) interpolator for static and quasi-static errors of machine tools is proposed. Based on principle of traditional DDA interpolator, a DDA interpolator is divided into command generator and command analyzer. There are three types of errors, considering the difference of positions between compensation points and interpolation segments. According to the classification, errors are distributed evenly in data processing and compensated to certain interpolation segments in machining. On-line implementation results show that the proposed approach greatly improves positioning accuracy of computer numerical control (CNC) machine tools.
基金Project(51275116)supported by the National Natural Science Foundation of ChinaProject(2012ZE77010)supported by the Aero Science Foundation of ChinaProject(LBH-Q11090)supported by the Postdoctoral Science Research Development Foundation of Heilongjiang Province,China
文摘The electric double layer with the transmission of particles was presented based on the principle of electrochemistry.In accordance with this theory,the cavitation catalysis removal mechanism of ultrasonic-pulse electrochemical compound machining(UPECM) based on particles was proposed.The removal mechanism was a particular focus and was thus validated by experiments.The principles and experiments of UPECM were introduced,and the removal model of the UPECM based on the principles of UPECM was established.Furthermore,the effects of the material removal rate for the main processing parameters,including the particles size,the ultrasonic vibration amplitude,the pulse voltage and the minimum machining gap between the tool and the workpiece,were also studied through UPECM.The results show that the particles promote ultrasonic-pulse electrochemical compound machining and thus act as the catalyzer of UPECM.The results also indicate that the processing speed,machining accuracy and surface quality can be improved under UPECM compound machining.
