A one-dimensional,self-consistent fluid model is developed for a computational investigation on discharge characteristics and dynamics of radio frequency(RF) glow discharges in atmospheric argon,which are demonstrated...A one-dimensional,self-consistent fluid model is developed for a computational investigation on discharge characteristics and dynamics of radio frequency(RF) glow discharges in atmospheric argon,which are demonstrated through the spatial and temporal profiles of plasma species,electric field,and mean electron energy.Furthermore,in the discharge current density range from 7.1 mA/cm2 to 119.5 mA/cm2,different discharge operation modes of α and γ are indicated by changing differential conductivity of voltage-current characteristics and sheath dynamics in terms of sheath voltage and sheath thickness.展开更多
基金National Natural Science Foundations of China (No. 10835004,No. 10905010)Shanghai Shuguang Program,China (No.08SG31)
文摘A one-dimensional,self-consistent fluid model is developed for a computational investigation on discharge characteristics and dynamics of radio frequency(RF) glow discharges in atmospheric argon,which are demonstrated through the spatial and temporal profiles of plasma species,electric field,and mean electron energy.Furthermore,in the discharge current density range from 7.1 mA/cm2 to 119.5 mA/cm2,different discharge operation modes of α and γ are indicated by changing differential conductivity of voltage-current characteristics and sheath dynamics in terms of sheath voltage and sheath thickness.
