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高性能电磁式微机械振动环陀螺 被引量:5
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作者 陈李 陈德勇 +2 位作者 王军波 毋正伟 张明 《光学精密工程》 EI CAS CSCD 北大核心 2009年第8期1915-1921,共7页
为改进振动环陀螺的模态匹配并提高其品质因数,设计了一种采用全对称结构实现模态匹配的电磁式微机械振动环陀螺。通过理论推导,建立了陀螺灵敏度和机械噪声的数学模型,分析了陀螺参数对灵敏度及分辨力的影响。采用(100)晶向的单晶硅及... 为改进振动环陀螺的模态匹配并提高其品质因数,设计了一种采用全对称结构实现模态匹配的电磁式微机械振动环陀螺。通过理论推导,建立了陀螺灵敏度和机械噪声的数学模型,分析了陀螺参数对灵敏度及分辨力的影响。采用(100)晶向的单晶硅及工艺简单,无需键合的MEMS体硅标准工艺加工了陀螺样片。器件频率响应实验结果表明,所设计的振动环陀螺驱动模态和检测模态频率之差<0.5Hz,大气压下品质因数约为500,在1Pa的低真空下可达14000。锁相放大器测试结果表明,在-200~200°/s,陀螺分辨力为0.05°/s,灵敏度为0.2μV/(°/s)。测试结果表明该陀螺能够实现模态匹配和较高的品质因数,具有较高的性能指标。 展开更多
关键词 电磁式陀螺 微机械陀螺 振动环
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Ball-disk rotor gyroscope adaptive quick-start technique
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作者 Xiao-wei LIU Rui WENG +1 位作者 Hai LI Hai-feng ZHANG 《Frontiers of Information Technology & Electronic Engineering》 SCIE EI CSCD 2017年第9期1430-1436,共7页
Rotating speed is a critical parameter affecting the performance of rotor gyroscopes. Rotor gyroscopes must operate at the rated rotating speed. To shorten the start time of the ball-disk rotor gyroscope, this paper p... Rotating speed is a critical parameter affecting the performance of rotor gyroscopes. Rotor gyroscopes must operate at the rated rotating speed. To shorten the start time of the ball-disk rotor gyroscope, this paper presents a new design of the drive system for a ball-disk rotor gyroscope. The drive system is monitored by a microeontroUer. First, the microcontroller generates a sine pulse width modulation signal to drive the permanent magnet rotor. Second, the position of the rotor is detected according to the back electromotive force in the non-energized coil. Third, a piecewise closed-loop control algorithm is implemented to keep the angular acceleration of the rotor within the safe range automatically during the acceleration process and when running at a constant speed. This control algorithm can avoid rotor stalling due to loss of steps. Experimental result shows that with the help of adaptive quick-start technique, the start time of the device can be shortened by up to 36.6%. 展开更多
关键词 Rotor gyroscope Magnetically driven Quick start Piecewise algorithm Closed-loop control
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