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针对功率MEMS器件而设计的高电感密度3D MEMS片内螺线管电感器
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作者 Tiantong Xu Jiamian Sun +3 位作者 Hanxiao Wu Haiwang Li Hanqing Li Zhi Tao 《磁性元件与电源》 2020年第6期160-164,共5页
在本文中,我们报告了3D电磁电感的设计和测量,该电感嵌入在Si基板中并且可以集成铁芯。通过兼容CMOS的MEMS制造工艺,我们制造出具有良好结构完整性和可重复性的各种电感器设计。电感器的平均电感和品质因数峰峰值变化低于10%,这表明制... 在本文中,我们报告了3D电磁电感的设计和测量,该电感嵌入在Si基板中并且可以集成铁芯。通过兼容CMOS的MEMS制造工艺,我们制造出具有良好结构完整性和可重复性的各种电感器设计。电感器的平均电感和品质因数峰峰值变化低于10%,这表明制造工艺是可重复的。在没有铁芯的电感器中,5匝电感器达到最高品质因数(21MHz时为37.6),20Ω电感器中达到了最高的电感和电感密度(分别为86.6nH和21.7nH/mm^2)。在铁芯电感器中,15匝电感器的电感为1063nH,电感密度为354.3nH/mm^2,比不带铁芯的相同设计高近18倍,据我们所知,这是MEMS微电感的最高电感密度。这种类型的电感器是RF MEMS和电磁功率MEMS器件中的重要组件,可以提高其性能和效率。 展开更多
关键词 电磁电感器 功率MEMS 电感密度 CMOS兼容制造工艺
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A seafloor electromagnetic receiver for marine magnetotellurics and marine controlled-source electromagnetic sounding 被引量:7
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作者 陈凯 魏文博 +2 位作者 邓明 伍忠良 余刚 《Applied Geophysics》 SCIE CSCD 2015年第3期317-326,466,共11页
In planning and executing marine controlled-source electromagnetic methods, seafloor electromagnetic receivers must overcome the problems of noise, clock drift, and power consumption. To design a receiver that perform... In planning and executing marine controlled-source electromagnetic methods, seafloor electromagnetic receivers must overcome the problems of noise, clock drift, and power consumption. To design a receiver that performs well and overcomes the abovementioned problems, we performed forward modeling of the E-field abnormal response and established the receiver's characteristics. We describe the design optimization and the properties of each component, that is, low-noise induction coil sensor, low-noise Ag/AgCI electrode, low-noise chopper amplifier, digital temperature-compensated crystal oscillator module, acoustic telemetry modem, and burn wire system. Finally, we discuss the results of onshore and offshore field tests to show the effectiveness of the developed seafloor electromagnetic receiver and its performance: typical E-field noise of 0.12 nV/m/rt(Hz) at 0.5 Hz, dynamic range higher than 120 dB, clock drift lower than 1 ms/day, and continuous operation of at least 21 days. 展开更多
关键词 MCSEM seafloor EM receiver seafioor electric field sensor chopper amplifier acoustic telemetry modem
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NOVEL SENSORLESS VECTOR CONTROL SYSTEM OF INDUCTION MACHINE BASED ON FLUX OBSERVER IN FIELD WEAKENING 被引量:1
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作者 邹积勇 许镇琳 孙凯 《Transactions of Tianjin University》 EI CAS 2006年第1期1-5,共5页
A speed-sensorless vector control system for induction machines (IMs)is presented, According to the vector control theory of IMs, the rotor flux is estimated based on a flux observer,and the speed is estimated throu... A speed-sensorless vector control system for induction machines (IMs)is presented, According to the vector control theory of IMs, the rotor flux is estimated based on a flux observer,and the speed is estimated through the method of q-axis rotor flux converging on zero with proportional integral regulator, A 0.75 kW,50 Hz,two-pole induction machine was used in the simulation and experimental verification, The simulation model was constructed in Matlab. A series of tests were performed in the field weakening region, for both no-load and loaded operation. The estimated speed tracks the actual speed well in the based speed region and field weakening region ( 1 per unit value to 4 per unit value). The small estimation error of residual speed is due to the existence of slip. 展开更多
关键词 induction machines (IMs) sensorless vector control flux observer speed estimation
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A MICROFABRICATED METAL GRATING OSCILLATOR FOR ELECTRIC FIELD DETECTION
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作者 Deng Kai Xia Shanhong +2 位作者 Gong Chao Chen Shaofeng Bai Qiang 《Journal of Electronics(China)》 2005年第5期564-568,共5页
This letter proposes a novel design of a Micro Electro Mechanical System (MEMS) device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the... This letter proposes a novel design of a Micro Electro Mechanical System (MEMS) device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications. 展开更多
关键词 Miniature Electric Field Sensor(MEFS) Anodic bonding Deep Reactive Ion Etching(DRIE)
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Evaluation of cable tension sensors of FAST reflector from the perspective of EMI
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作者 朱明 Wang Qiming +2 位作者 Dennis Egan Wu Mingchang Sun Xiao 《High Technology Letters》 EI CAS 2016年第2期135-141,共7页
The active reflector of FAST ( five-hundred-meter aperture spherical radio telescope) is suppor- ted by a ring beam and a cable-net structure, in which nodes are actively controlled to form series of real-time parab... The active reflector of FAST ( five-hundred-meter aperture spherical radio telescope) is suppor- ted by a ring beam and a cable-net structure, in which nodes are actively controlled to form series of real-time paraboloids. To ensure the security and stability of the supporting structure, tension must be monitored for some typical cables. Considering the stringent requirements in accuracy and long- term stability, magnetic flux sensor, vibrating wire strain gauge and fiber bragg grating strain gauge are screened for the cable tension monitoring of the supporting cable-net. Specifically, receivers of radio telescopes have strict restriction on electro magnetic interference (EMI) or radio frequency in- terference (RFI). These three types of sensors are evaluated from the view of EMIfRFI. Firstly, these fundamentals are theoretically analyzed. Secondly, typical sensor signals are collected in the time and analyzed in the frequency domain, which shows the characteristic in the frequency domain. Finally, typical sensors are tested in an anechoic chamber to get the EMI levels. Theoretical analysis shows that Fiber Bragg Grating strain gauge itself will not lead to EMI/RFI. According to GJB151 A, frequency domain analysis and test results show that for the vibrating wire strain gauge and magnetic flux sensor themselves, testable EMIfRF1 levels are typically below the background noise of the ane- choic chamber. FAST finally choses these three sensors as the monitoring sensors of its cable ten- sion. The proposed study is also a reference to the monitoring equipment selection of other radio tele- scopes and large structures. 展开更多
关键词 five-hundred-meter aperture spherical radio telescope (FAST) cable tension mo-nitoring magnetic flux vibrating wire fiber Bragg electro magnetic interference (EMI)
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Performance Analysis of PMSM Equations Computation
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作者 P. Drgona V. Bobek B. Dobrucky M. Frivaldsky 《Journal of Energy and Power Engineering》 2011年第1期70-74,共5页
The paper deals with the comparison of three different digital devices used for the computing of permanent magnet synchronous motor (PMSM) model. Model is used for virtual high frequency injection method (VHFIM) s... The paper deals with the comparison of three different digital devices used for the computing of permanent magnet synchronous motor (PMSM) model. Model is used for virtual high frequency injection method (VHFIM) sensorless control, where injection and acting voltages are virtual ones. For computing the whole PMSM model, differential equations are used. The paper is focused on performance analysis of computing speed and accuracy of field-programmable gate array (FPGA) device, digital signal controller and Power PC microcontroller and results are compared. 展开更多
关键词 MICROCONTROLLER PMSM programmable arrays digital signal processor control drive.
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