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GaAs器件镀层应力问题分析及解决
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作者 王敬松 周国 《河南科技》 2021年第10期33-35,共3页
传统的GaAs电镀布线工艺,镀层金属与种子层呈锐角,导致氮化硅表面出现变色脱落等现象,影响器件稳定性和可靠性。本文改进了传统的电镀布线工艺,在电镀布线后,表面先涂覆薄层聚合物(0.5μm以内)以消除锐角,消除应力集中点,之后再淀积氮化... 传统的GaAs电镀布线工艺,镀层金属与种子层呈锐角,导致氮化硅表面出现变色脱落等现象,影响器件稳定性和可靠性。本文改进了传统的电镀布线工艺,在电镀布线后,表面先涂覆薄层聚合物(0.5μm以内)以消除锐角,消除应力集中点,之后再淀积氮化硅,形成复合保护层。改进后的工艺解决了因镀层金属应力集中导致的氮化硅表面变色和脱落等问题。 展开更多
关键词 电镀布线 应力集中 氮化硅
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Typical application of Rogowski coils in inspection of electrobath
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作者 郭红 贾正春 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2004年第1期103-108,共6页
During the aluminum electrolytic roasting process,each component of the electrobath of aluminum performs unsteadily when the electrolytic bath is in the pre-roasting stage. It is important to monitor the currents of t... During the aluminum electrolytic roasting process,each component of the electrobath of aluminum performs unsteadily when the electrolytic bath is in the pre-roasting stage. It is important to monitor the currents of the anodes and the cathodes of the aluminum electrobath at regular intervals. Both practice and investigation indicate that Rogowski coil can be adopted to measure heavy direct current of the anodes and the cathodes of the aluminum electrobath. The paper not only introduces the typical application of the Rogowski coil to inspect the state of aluminum electrobath in the roasting process, but also analyzes the principles of the coil sensor including its dynamic properties and some important measurement results respectively. The optimal parameters of the coil can be simulated by means of an advanced simulation tool: simulink tools based on MATLAB soft environment. Based on the gathered current data, an even-current coefficient has been introduced, and the current curve can be drawn. Since they are applied in AL-Electrolyzing, it is possible to distinguish the anode of which the current is not evenly distributed, and to take adjusting measures over a period of time to ensure that the current is evenly distributed. 展开更多
关键词 rogowski coil current monitoring system simulation even current distribution dilapidation detection
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