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2kW/300Hz串联逆变感应加热电源的控制策略与仿真
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作者 金宇 邱凯翔 《通信电源技术》 2017年第5期12-15,18,共5页
随着感应加热电源技术的发展,基于感应加热的应用在工程、军事、家庭等方面得到推广。文章对感应加热电源进行了分类比较和原理分析,讨论了品质因数对控制方案的重要影响,对扫频启动、功率调节等重点环节进行分析,选择了他激转自激的相... 随着感应加热电源技术的发展,基于感应加热的应用在工程、军事、家庭等方面得到推广。文章对感应加热电源进行了分类比较和原理分析,讨论了品质因数对控制方案的重要影响,对扫频启动、功率调节等重点环节进行分析,选择了他激转自激的相控法来实现电源的功率调节。在PSIM下进行了仿真,该系统实现了晶闸管的可靠换流,从他激到自激的正常启动,偏谐振状态下的频率跟踪,从5%~100%额定功率的功率调节。 展开更多
关键词 感应加热 串联逆变 晶闸管 功率调节 相控法
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A HPLC Method for the Determination of Salmon Calcitonin in Injection by Gradient Elution 被引量:1
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作者 陈小平 郭庆东 张强 《Journal of Chinese Pharmaceutical Sciences》 CAS 2003年第2期114-116,共3页
It was concluded that the described HPLC method could be used for the assayof salmon calcitonin in injection, as it offers qualified selectivity, accuracy and precision ofanalysis.
关键词 HPLC ASSAY salmon calcitonin injection external standard method
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Multi-domain modeling and simulation of proportional solenoid valve 被引量:3
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作者 刘艳芳 戴振坤 +1 位作者 徐向阳 田亮 《Journal of Central South University》 SCIE EI CAS 2011年第5期1589-1594,共6页
A multi-domain nonlinear dynamic model of a proportional solenoid valve was presented.The electro-magnetic,mechanical and fluid subsystems of the valve were investigated,including their interactions.Governing equation... A multi-domain nonlinear dynamic model of a proportional solenoid valve was presented.The electro-magnetic,mechanical and fluid subsystems of the valve were investigated,including their interactions.Governing equations of the valve were derived in the form of nonlinear state equations.By comparing the simulated and measured data,the simulation model is validated with a deviation less than 15%,which can be used for the structural design and control algorithm optimization of proportional solenoid valves. 展开更多
关键词 fluid mechanics proportional solenoid valve dynamic characteristic multi-domain modeling SIMULATION
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Effects of temperature and phosphoric acid addition on the solubility of iron phosphate dihydrate in aqueous solutions 被引量:5
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作者 Tongbao Zhang Yangcheng Lu Guangsheng Luo 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2017年第2期211-215,共5页
As important controlling factors for the synthesis of iron phosphate materials by liquid-phase precipitation, the solubilities of iron phosphate dihydrate were systematically measured at H3PO4 concentrations from 1.13... As important controlling factors for the synthesis of iron phosphate materials by liquid-phase precipitation, the solubilities of iron phosphate dihydrate were systematically measured at H3PO4 concentrations from 1.13 wt% to 10.7 wt% temperature from 298.15 to 363.15 K, and atmosphere pressure in this work. The solubility was found to increase 5 orders of magnitude or more with increasing the concentration of phosphoric acid, and de- crease 1 to 2 orders of magnitude with increasing the equilibrium temperature. The phosphoric acid addition and temperature were found to affect the solubility of iron phosphate dihydrate by the formation or dissociation of coordination species, which could further accelerate the phase transformation from the amorphous iron phosphate dihydrate to orthorhombic iron phosphate dehydrate by dissolution-recrystallization mechanism. The high dependences of the solubility of iron phosphate materials on HsPO4 concentration and temperature were also well predicted by calibration equations, which are meaningful for quantitatively understanding the precipitation process and sequential crystalline structure transformation and pursuing a rational strategy for syn- thesizing specific iron phosphate materials. 展开更多
关键词 Iron phosphateSolubilityAqueous solutionPhosphoric acidTemperature
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Scheme for Implementing Quantum Search Algorithm in a Cluster State Quantum Computer
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作者 WANG Yan-Hui ZHANG Yong 《Communications in Theoretical Physics》 SCIE CAS CSCD 2008年第6期1487-1490,共4页
Using cluster state and single qubit measurement one can perform the one-way quantum computation. Here we give a detailed scheme for realizing a modified Grover search algorithm using measurements on cluster state. We... Using cluster state and single qubit measurement one can perform the one-way quantum computation. Here we give a detailed scheme for realizing a modified Grover search algorithm using measurements on cluster state. We give the measurement pattern for the cluster-state realization of the algorithm and estimated the number of measurement needed for its implementation. It is found that O(2^3n/^2n^2) number of single qubit measurements is required for its realization in a cluster-state quantum computer. 展开更多
关键词 cluster state long algorithm control-phase gate measurement pattern
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Double-phase-shift filtering method for harmonic elimination based on AR2U-Net
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作者 Li Bo-Lin Wang Yan-Chun +1 位作者 Yuan Hang Liu Xue-Qing 《Applied Geophysics》 SCIE CSCD 2022年第2期271-283,309,共14页
The double-phase-shift filtering method,which is based on the traditional purephase-shift filtering method,is a novel approach to harmonic elimination that can be applied to more complicated signals such as white nois... The double-phase-shift filtering method,which is based on the traditional purephase-shift filtering method,is a novel approach to harmonic elimination that can be applied to more complicated signals such as white noise and slip-sweep.Nonetheless,any type of phase-shift filtering method necessitates a relationship between the frequency of fundamental sweep and time,which may cost necessitate an enormous amount of human and physical resources to achieve inaccurate results with low efficiency.This paper combines deep learning with harmonic elimination to produce a double-phase-shift filtering method based on AR2UNet,a type of U-Net with attention gates structure and recurrent residual blocks for improving accuracy and function while simplifying computational complexity.The input of the AR2UNet structure in this paper is seismic data of slip-sweep signals in vibroseis,and the output is signal frequency variation with the time of the fundamental waves,which are required to eliminate the harmonic waves and adjacent signals using a double-phase-shift method to obtain the fundamental sweep.The training sets and test sets are formed by forward models,and a Log-Cosh loss function is used to monitor the process,during which the results of AR2U-Net and traditional U-Net are compared to demonstrate the eminent function of AR2UNet.Following that,the outcomes’Log-Cosh loss functions and accuracy are also compared to validate the conclusion.AR2U-Net,when applied to raw data and combined with the doublephase-shift method,tends to polish the filtering effects and is worth promoting. 展开更多
关键词 AR2U-Net harmonic elimination double-phase-shifts deep learning VIBROSEIS
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Neural adaptive PSD decoupling controller and its application in three-phase electrode adjusting system of submerged arc furnace 被引量:4
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作者 贺建军 刘郁乔 +1 位作者 喻寿益 桂卫华 《Journal of Central South University》 SCIE EI CAS 2013年第2期405-412,共8页
Taking three-phase electrode adjusting system of submerged arc furnace as study object which has nonlinear, time-variant, multivariable and strong coupling features, a neural adaptive PSD(proportion, sum and different... Taking three-phase electrode adjusting system of submerged arc furnace as study object which has nonlinear, time-variant, multivariable and strong coupling features, a neural adaptive PSD(proportion, sum and differential) dispersive decoupling controller was developed by combining neural adaptive PSD algorithm with dispersive decoupling network. In this work, the production technology process and control difficulties of submerged arc furnace were simply introduced, the necessity of establishing a neural adaptive PSD dispersive decoupling controller was discussed, the design method and the implementation steps of the controller are expounded in detail, and the block diagram of the controlled system is presented. By comparison with experimental results of the conventional PID controller and the adaptive PSD controller, the decoupling ability, adaptive ability, self-learning ability and robustness of the neural adaptive PSD dispersive decoupling controller have been testified effectively. The controller is applicable to the three-phase electrode adjusting system of submerged arc furnace, and it will play an important role for achieving the power balance of three-phrase electrodes, saving energy and reducing consumption in the process of smelting. 展开更多
关键词 PSD algorithm decoupling controller submerged arc furnace three phase electrode
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Microfluidic technology for multiphase emulsions morphology adjustment and functional materials preparation 被引量:10
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作者 XuehuiGe Hong Zhao +3 位作者 Tao Wang Jian Chen Jianhong Xu Guangsheng Luo 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2016年第6期677-692,共16页
Multiphase emulsions could be used as templates in considerable fields such as coating, optical materials, stan- dard particles and biomedicine. Among various emulsion forming methods, microfluidic technology, with go... Multiphase emulsions could be used as templates in considerable fields such as coating, optical materials, stan- dard particles and biomedicine. Among various emulsion forming methods, microfluidic technology, with good monodispersity, high controllability and operation simplicity, has been widely used in the preparation of multi- phase emulsions with different systems. This review would focus on the basic principles of forming multiphase emulsions, the recent progress in controlling multiphase flow in microfluidics, and preparation of functional ma- terials with microfluidics mainly by the authors' research group. We believe that the review will contribute to the readers in this prospective area very well. ~ 2016 The Chemical Industry and Engineering Society of China, and Chemical Industry Press. All rights reserved. 展开更多
关键词 Multiphase emulsionsMicrofluidicsFlow controlFunctional microspheres
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Implementation of a Controlled-Phase Gate and Deutsch-Jozsa Algorithm with Superconducting Charge Qubits in a Cavity
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作者 SONG Ke-Hui ZHOU Zheng-Wei GUO Guang-Can 《Communications in Theoretical Physics》 SCIE CAS CSCD 2007年第5期821-825,共5页
Based on superconducting quantum interference devices (SQUIDs) coupled to a cavity, we propose a scheme for implementing a quantum controlled-phase gate (QPG) and Deutsch-Jozsa (D J) algorithm by a controllable ... Based on superconducting quantum interference devices (SQUIDs) coupled to a cavity, we propose a scheme for implementing a quantum controlled-phase gate (QPG) and Deutsch-Jozsa (D J) algorithm by a controllable interaction. In the present scheme, the SQUID works in the charge regime, and the cavity field is ultilized as quantum data-bus, which is sequentially coupled to only one qubit at a time. The interaction between the selected qubit and the data bus, such as resonant and dispersive interaction, can be realized by turning the gate capacitance of each SQUID. Especially, the bus is not excited and thus the cavity decay is suppressed during the implementation of DJ algorithm. For the QPG operation, the mode of the bus is unchanged in the end of the operation, although its mode is really excited during the operations. Finally, for typical experiment data, we analyze simply the experimental feasibility of the proposed scheme. Based on the simple operation, our scheme may be realized in this solid-state system, and our idea may be realized in other systems. 展开更多
关键词 a quantum controlled-phase gate Deutsch-Jozsa algorithm superconducting quantum interference device charge qubit
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Online model identification of lithium-ion battery for electric vehicles 被引量:3
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作者 胡晓松 孙逢春 邹渊 《Journal of Central South University》 SCIE EI CAS 2011年第5期1525-1531,共7页
In order to characterize the voltage behavior of a lithium-ion battery for on-board electric vehicle battery management and control applications,a battery model with a moderate complexity was established.The battery o... In order to characterize the voltage behavior of a lithium-ion battery for on-board electric vehicle battery management and control applications,a battery model with a moderate complexity was established.The battery open circuit voltage (OCV) as a function of state of charge (SOC) was depicted by the Nernst equation.An equivalent circuit network was adopted to describe the polarization effect of the lithium-ion battery.A linear identifiable formulation of the battery model was derived by discretizing the frequent-domain description of the battery model.The recursive least square algorithm with forgetting was applied to implement the on-line parameter calibration.The validation results show that the on-line calibrated model can accurately predict the dynamic voltage behavior of the lithium-ion battery.The maximum and mean relative errors are 1.666% and 0.01%,respectively,in a hybrid pulse test,while 1.933% and 0.062%,respectively,in a transient power test.The on-line parameter calibration method thereby can ensure that the model possesses an acceptable robustness to varied battery loading profiles. 展开更多
关键词 battery model on-line parameter identification lithium-ion battery electric vehicle
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Following Control for a UUV using Temporary Path Generation Guidance 被引量:2
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作者 Zheping Yan Dongnan Chi Jiajia Zhou Yufei Zhao 《Journal of Marine Science and Application》 2012年第2期236-243,共8页
A path following control algorithm for an unmanned underwater vehicle(UUV) using temporary path generation guidance was proposed in this paper.Owing to different initial states of the vehicle,such as position and or... A path following control algorithm for an unmanned underwater vehicle(UUV) using temporary path generation guidance was proposed in this paper.Owing to different initial states of the vehicle,such as position and orientation,the path following control in the horizontal plane may yield a poor performance.To deal with the negative effect induced by initial states,a temporary path generation was presented based on the relationship between the original reference path and the vehicle’s initial states.With different relative positions between the vehicle and reference path,including out of straight lines,as well as inside and outside a circle,the related temporary paths guiding the vehicle to the reference path were able to be generated in real time.The vehicle was guided to steer along the temporary path until it reached the tangent point at the reference path,where the controller was designed using the input-output feedback linearization method.Simulation results demonstrated that the proposed algorithm is effective under the three different situations mentioned above. 展开更多
关键词 nonlinear control path following control UUV temporary path generation input-output feedback linearization
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Amplitude phase control for electro-hydraulic servo system based on normalized least-mean-square adaptive filtering algorithm 被引量:4
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作者 姚建均 富威 +1 位作者 胡胜海 韩俊伟 《Journal of Central South University》 SCIE EI CAS 2011年第3期755-759,共5页
The electro-hydraulic servo system was studied to cancel the amplitude attenuation and phase delay of its sinusoidal response,by developing a network using normalized least-mean-square (LMS) adaptive filtering algorit... The electro-hydraulic servo system was studied to cancel the amplitude attenuation and phase delay of its sinusoidal response,by developing a network using normalized least-mean-square (LMS) adaptive filtering algorithm.The command input was corrected by weights to generate the desired input for the algorithm,and the feedback was brought into the feedback correction,whose output was the weighted feedback.The weights of the normalized LMS adaptive filtering algorithm were updated on-line according to the estimation error between the desired input and the weighted feedback.Thus,the updated weights were copied to the input correction.The estimation error was forced to zero by the normalized LMS adaptive filtering algorithm such that the weighted feedback was equal to the desired input,making the feedback track the command.The above concept was used as a basis for the development of amplitude phase control.The method has good real-time performance without estimating the system model.The simulation and experiment results show that the proposed amplitude phase control can efficiently cancel the amplitude attenuation and phase delay with high precision. 展开更多
关键词 amplitude attenuation phase delay normalized least-mean-square adaptive filtering algorithm tracking performance electro- hydraulic servo system
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Gas Chromatography-Based Fingerprinting and Chemical Pattern Recognition of Rosa multiflora Volatile Oil
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作者 Tuniyazi Gulimeikereyi Ablajan Nurpida +1 位作者 Malike Dilinuer Hailaxi Alai 《Journal of Agricultural Science and Technology(A)》 2017年第1期31-38,共8页
In this paper, gas chromatography-mass spectrometry (GS-MS) was used to build the standard fingerprint of volatile oil from Rosa multiflora Thunb. from 12 different habitats. Fourteen components in the volatile oil ... In this paper, gas chromatography-mass spectrometry (GS-MS) was used to build the standard fingerprint of volatile oil from Rosa multiflora Thunb. from 12 different habitats. Fourteen components in the volatile oil were identified as the indicator components ofR. multiflora, of which one was selected as the standard. The GC analysis conditions used for fingerprinting afford a very good separating effect. The similarity of the 12 volatile oils from R. multiflora Thunb. was more than 0.84, and the precision, stability and repeatability of the fingerprints were quite good. It could be concluded that the fingerprints can be used as the standard and as a quality control method for medicinal materials from R. multiflora Thunb.. 展开更多
关键词 Rosa multiflora volatile oil GC-MS fingerprinting main component.
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Key Enabling Techniques and Deployment of 120Gb/s Long-Haul Optical Transmission in Backbone Networks
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作者 纪越峰 陈宇飞 +4 位作者 陈雪 施社平 张民 夏焱 顾仁涛 《China Communications》 SCIE CSCD 2013年第8期158-163,共6页
The explosive increase in data traffic requires networks to provide higher capacity and long-haul transmission capabilities.This paper introduces new results on high-order modulation and efficient Digital Signal Proce... The explosive increase in data traffic requires networks to provide higher capacity and long-haul transmission capabilities.This paper introduces new results on high-order modulation and efficient Digital Signal Processing algorithms to reduce various transmission limitations in coherent receiving systems.Polarization Division Multiplexed Quadrature Phase Shift Keying(PDM-QPSK)is deployed to reach high bit rates,provides modified digital clock recovery,and allows BER-Aided Constant Modulus Algorithm(BA-CMA)equalising.A Soft Decision-Forward Error Correction(SD-FEC)algorithm and a joint scheme with timing recovery and adaptive equaliser are used to achieve better performance.A compact coherent transceiver is also developed.These techniques have been applied in the largest 100 G Optical Transport Network(OTN)deployment in the world,the backbone expansion project for Phase 3 of the China Education and Research Network(CERNET),with a total transmission length of 10 000 km. 展开更多
关键词 optical transmission high-order modulation coherence detector coherent transceiver
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A scheduling method based on a hybrid genetic particle swarm algorithm for multifunction phased array radar 被引量:14
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作者 Hao-wei ZHANG Jun-wei XIE +2 位作者 Wen-long LU Chuan SHENG Bin-feng ZONG 《Frontiers of Information Technology & Electronic Engineering》 SCIE EI CSCD 2017年第11期1806-1816,共11页
A hybrid optimization approach combining a particle swarm algorithm, a genetic algorithm, and a heuristic interleaving algorithm is proposed for scheduling tasks in the multifunction phased array radar. By optimizing ... A hybrid optimization approach combining a particle swarm algorithm, a genetic algorithm, and a heuristic interleaving algorithm is proposed for scheduling tasks in the multifunction phased array radar. By optimizing parameters using chaos theory, designing the dynamic inertia weight for the particle swarm algorithm as well as introducing crossover operation and mutation operation of the genetic algorithm, both the efficiency and exploration ability of the hybrid algorithm are improved. Under the frame of the intelligence algorithm, the heuristic interleaving scheduling algorithm is presented to further use the time resource of the task waiting duration. A large-scale simulation demonstrates that the proposed algorithm is more robust and efficient than existing algorithms. 展开更多
关键词 Phased array radar SCHEDULING Particle swarm algorithm Genetic algorithm Pulse interleave
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Seasonal and interannual variations of ecosystem photosynthetic characteristics in a semi-arid grassland of Northern China 被引量:2
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作者 Cuihai You Yanbing Wang +5 位作者 Xingru Tan Bingwei Zhang Tingting Ren Boyu Chen Mengzhen Xu Shiping Chen 《Journal of Plant Ecology》 SCIE CSCD 2022年第5期961-976,共16页
The ecosystem apparent quantum yield(α),maximum rate of gross CO_(2) assimilation(Pmax)and daytime ecosystem respiration rate(R.),reflecting the physiological functioning of ecosystem,are vital photosynthetic paramet... The ecosystem apparent quantum yield(α),maximum rate of gross CO_(2) assimilation(Pmax)and daytime ecosystem respiration rate(R.),reflecting the physiological functioning of ecosystem,are vital photosynthetic parameters for the estimation of ecosystem carbon budget.Climatic drivers may affect photosynthetic parameters both directly and indirectly by altering the response of vegetation.However,the relative contribution and regulation pathway of environmental and physiological controls remain unclear,especially in semi-arid grasslands.We analyzed seasonal and interannual variations of photosynthetic parameters derived from eddy-covariance observation in a typical semi-arid grassland in Inner Mongolia,Northern China,over 12 years from 2006 to 2017.Regression analyses and a structural equation model(SEM)were adopted to separate the contributions of environmental and physiological effects.The photosynthetic parameters showed unimodal seasonal patterns and significantly interannual variations.Variations of air temperature(T,)and soil water content(SWC)drove the seasonal patterns of photosynthetic parameters,while SWC predominated their interannual variations.Moreover,contrasting with the predominant roles of T,onαand Ra,SWC explained more variance of Pmax than T,Results of SEM revealed that environmental factors impacted photosynthetic parameters both directly and indirectly through regulating physiological responses reflected by stomatal conductance at the canopy level.Moreover,leaf area index(LAl)directly affectedα,Pmax and R,and dominated the variation of Pmax.On the other hand,SWC influenced photosynthetic parameters indirectly through LAl and canopy surface conductance(gc).Our findings highlight the importance of physiological regulation on the photosynthetic parameters and carbon assimilation capacity,especially in water-limitedgrassland ecosystems. 展开更多
关键词 photosynthetic parameter water-limited grasslands eddy covariance carbon flux physiological regulation
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Size and shape controllable preparation of graphene sponge by freezing, lyophilizing and reducing in container 被引量:1
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作者 ZHAO LianQin YU BaoWei +5 位作者 ZHANO XiaoLiang WU RuiHan LIU XiaoYang LIAO Rong YANG ShengTao LUO JianBin 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2016年第5期709-713,共5页
Graphene sponge(GS) is a porous 3D structure of graphene. Although hydrothermal reduction, chemical vapor deposition, solution reduction and high temperature annealing could be used for the preparation of GS, the size... Graphene sponge(GS) is a porous 3D structure of graphene. Although hydrothermal reduction, chemical vapor deposition, solution reduction and high temperature annealing could be used for the preparation of GS, the size and shape cannot be well controlled. Herein, we reported a facile method to prepare GS under mild condition in a size and shape controllable way. Graphene oxide was lyophilized to form the spongy structure and reduced by steamy hydrazine hydrate to produce GS. The size and shape of GS prepared were nearly identical to that of the container. The reduction degree of GS could be regulated by the reduction temperature and time. 展开更多
关键词 graphene sponge size shape reduction porous materials
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Distributed consensus for multiple Euler-Lagrange systems: An event-triggered approach 被引量:11
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作者 HUANG Na DUAN ZhiSheng ZHAO Yu 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2016年第1期33-44,共12页
Distributed consensus problems for multiple Euler-Lagrange systems are addressed on the basis of event-triggered information in this study. Distributed consensus protocols are first designed in terms of two event-trig... Distributed consensus problems for multiple Euler-Lagrange systems are addressed on the basis of event-triggered information in this study. Distributed consensus protocols are first designed in terms of two event-triggered scenarios: a decentralized strategy and a distributed strategy. Sufficient conditions that guarantee the event-triggered consensus for multiple Euler-Lagrange systems are then presented, with the associated advantages of reducing controller update times. It is shown that the Zeno behavior of triggering time sequences is excluded for both strategies. Finally, multiple Euler-Lagrange systems that consist of six two-link manipulators are considered to illustrate the effectiveness of the proposed theoretical algorithms. 展开更多
关键词 consensus event-triggered strategy Euler-Lagrange system distributed control
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Simplified Numerical Study of Evaporation Processes Inside Vertical Tubes
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作者 Pawe Ocoń Marzena Nowak Stanisaw Lopata 《Journal of Thermal Science》 SCIE EI CAS CSCD 2014年第2期177-186,共10页
The paper presents a simplified numerical model of evaporation processes inside vertical tubes.In this model only the temperature fields in the fluid domain(the liquid or two-phase mixture) and solid domain(a tube wal... The paper presents a simplified numerical model of evaporation processes inside vertical tubes.In this model only the temperature fields in the fluid domain(the liquid or two-phase mixture) and solid domain(a tube wall) are determined.Therefore its performance and efficiency is high.The analytical formulas,which allow calculating the pressure drop and the distribution of heat transfer coefficient along the tube length,are used in this model.The energy equation for the fluid domain is solved with the Control Volume Method and for the solid domain with the Finite Element Method in order to determine the temperature field for the fluid and solid domains. 展开更多
关键词 Numerical modeling heat transfer EVAPORATION vertical tubes Finite Element Method
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Stress control of silicon nitride films deposited by plasma enhanced chemical vapor deposition
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作者 李东玲 冯小飞 +2 位作者 温志渝 尚正国 佘引 《Optoelectronics Letters》 EI 2016年第4期285-289,共5页
Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/... Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/LF) mode. By optimizing process parameters, stress free(-0.27 MPa) Si Nx films were obtained with the deposition rate of 45.5 nm/min and the refractive index of 2.06. Furthermore, at HF/LF mode, the stress is significantly influenced by LF ratio and LF power, and can be controlled to be 10 MPa with the LF ratio of 17% and LF power of 150 W. However, LF power has a little effect on the deposition rate due to the interaction between HF power and LF power. The deposited Si Nx films have good mechanical and optical properties, low deposition temperature and controllable stress, and can be widely used in integrated circuit(IC), micro-electro-mechanical systems(MEMS) and bio-MEMS. 展开更多
关键词 DEPOSITION Deposition rates Integrated circuits MEMS Nitrides Optical properties Plasma CVD Refractive index Silicon nitride Stresses Vapor deposition
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