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As^+、Si^+双注入GaAs瞬态退火的行为 被引量:2
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作者 范伟栋 王渭源 《Journal of Semiconductors》 EI CAS CSCD 北大核心 1989年第3期230-232,共3页
研究了不同能量、剂量As^+、Si^+双注入于SI GaAs中,As^+注入对注Ss^+有源层的影响.首次给出了双注入样品瞬态退火后有源层的激活率和载流子迁移率,退火前后材料的沟道谱.实验表明,As^+、Si^+双注入样品比Si^+单注入样品在较低退火温度... 研究了不同能量、剂量As^+、Si^+双注入于SI GaAs中,As^+注入对注Ss^+有源层的影响.首次给出了双注入样品瞬态退火后有源层的激活率和载流子迁移率,退火前后材料的沟道谱.实验表明,As^+、Si^+双注入样品比Si^+单注入样品在较低退火温度下就能激活Si^+,在适当高温下能得到性能良好的有源层. 展开更多
关键词 砷离子 硅离子 双注入 瞬态退火
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As^+,Si^+双注入GaAs瞬态退火的行为
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作者 范伟栋 王渭源 《科技通讯(上海船厂)》 1989年第1期32-35,共4页
关键词 GAAS Si^+ As^+ 离子注入 瞬态退火
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Transient numerical simulation of annealing process in a conjugate combined radiation conduction heat transfer 被引量:1
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作者 M.Foruzan NIA S.A.Gandjalikhan NASSAB 《Journal of Central South University》 SCIE EI CAS CSCD 2020年第9期2662-2672,共11页
The annealing time is an important affecting factor in the performance of many furnaces.The present work deals with the transient simulation of annealing process in a cubic furnace in which a solid element is placed i... The annealing time is an important affecting factor in the performance of many furnaces.The present work deals with the transient simulation of annealing process in a cubic furnace in which a solid element is placed in its center.As the working gas can have some radiating features,a set of governing equations including the energy balance with the radiative transfer equation(RTE)for the gray radiating medium and the conduction equation inside the solid product are numerically solved with progressing in time.Numerical results which are validated against both analytical and theoretical findings in the literature demonstrate that during the starting period,a high rate of radiant energy transfers into the solid body even at small optical thickness.This behavior which hastens the rate of heat transfer at low values of the radiation conduction parameter,causes a fast annealing process in which the solid body warms up to its maximum temperature.Moreover,it is revealed that the rate of heat transfer is an increasing function of radiation-conduction parameter. 展开更多
关键词 CONJUGATE RADIATION conduction transient annealing process
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