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用于扫描电子显微镜校准的10μm格栅样板 被引量:1
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作者 张晓东 赵琳 +3 位作者 李锁印 韩志国 许晓青 吴爱华 《计量学报》 CSCD 北大核心 2022年第12期1544-1548,共5页
扫描电子显微镜是半导体领域用于关键尺寸测量的重要仪器。为了保证仪器量值的准确和一致,需要对扫描电子显微镜进行校准。首先,针对校准规范中提到的正交畸变和线性失真度参数,采用半导体工艺,研制了一种标称值为10μm的格栅样板。其次... 扫描电子显微镜是半导体领域用于关键尺寸测量的重要仪器。为了保证仪器量值的准确和一致,需要对扫描电子显微镜进行校准。首先,针对校准规范中提到的正交畸变和线性失真度参数,采用半导体工艺,研制了一种标称值为10μm的格栅样板。其次,为了准确评价格栅特征的一致性,研究了一种矩形检测算法。测量过程中,使用该算法对样板的格栅特征进行测量,并把使用原子力显微镜获取的测量数据作为参考值。实验结果显示:矩形检测算法能够快速检测出格栅特征,测试数据稳定在6 nm以内。此外,研制的格栅样板一致性好,一致性参数控制在0.2以内,能够应用于扫描电子显微镜的校准。 展开更多
关键词 计量学 格栅样板 扫描电子显微镜 矩形检测算法 原子力显微镜 校准
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Visual positioning of rectangular lead components based on Harris corners and Zernike moments 被引量:4
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作者 王祖进 黄筱调 《Journal of Central South University》 SCIE EI CAS CSCD 2015年第7期2586-2595,共10页
With the increasing necessities for reliable printed circuit board(PCB) product, there has been a considerable demand for high speed and high precision vision positioning system. To locate a rectangular lead component... With the increasing necessities for reliable printed circuit board(PCB) product, there has been a considerable demand for high speed and high precision vision positioning system. To locate a rectangular lead component with high accuracy and reliability, a new visual positioning method was introduced. Considering the limitations of Ghosal sub-pixel edge detection algorithm, an improved algorithm was proposed, in which Harris corner features were used to coarsely detect the edge points and Zernike moments were adopted to accurately detect the edge points. Besides, two formulas were developed to determine the edge intersections whose sub-pixel coordinates were calculated with bilinear interpolation and conjugate gradient method. The last experimental results show that the proposed method can detect the deflection and offset, and the detection errors are less than 0.04° and 0.02 pixels. 展开更多
关键词 visual positioning Harris corners Zernike moments edge detection sub-pixel image registration
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Separated Same Rectangle Feature for Face Detection
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作者 Yong-hee HONG Hwan-ik CHUNG Hem-soo HAHN 《Journal of Measurement Science and Instrumentation》 CAS 2010年第2期121-124,共4页
The paper proposes a new method of "Separated Same Rectangle Feature (SSRF)" for face detection. Generally, Haar-like feature is used to make an Adaboost training algorithm with strong classifier. Haar-like featur... The paper proposes a new method of "Separated Same Rectangle Feature (SSRF)" for face detection. Generally, Haar-like feature is used to make an Adaboost training algorithm with strong classifier. Haar-like feature is composed of two or more attached same rectangles. Inefficiency of the Haar-like feature often results from two or more attached same rectangles. But the proposed SSRF are composed of two separated same rectangles. So, it is very flexible and detailed. Therefore it creates more accurate strong classifier than Haar-like feature. SSRF uses integral image to reduce execuive time. Haar-like feature calculates the Sanl of intmsities of pixels on two or more rectangles. But SSRF always calculates the stun of intensities of pixels on only two rectangles. The weak classifier of Ariaboost algorithm based on SSRF is fastex than one based on Haar-like feature. In the experiment, we use 1 000 face images and 1 000nm- face images for Adaboost training. The proposed SSRF shows about 0.9% higher acctwacy than Haar-like features. 展开更多
关键词 seperated same rectangle feature Haar-like discreteadaboost FEATURE
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