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先进硅基前驱体的应用研究与技术进展 被引量:2
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作者 常欣 万烨 +3 位作者 赵雄 严大洲 袁振军 郭树虎 《半导体技术》 CAS 北大核心 2020年第6期409-418,共10页
前驱体材料广泛应用于集成电路的关键工艺中,如外延、光刻、化学气相沉积以及原子层沉积。其中硅基前驱体是重要且用量较大的一个分支,近年来一直是先进集成电路材料领域研究的热点之一。以集成电路制造工艺和器件结构的技术发展为基础... 前驱体材料广泛应用于集成电路的关键工艺中,如外延、光刻、化学气相沉积以及原子层沉积。其中硅基前驱体是重要且用量较大的一个分支,近年来一直是先进集成电路材料领域研究的热点之一。以集成电路制造工艺和器件结构的技术发展为基础,综述了业界几种较为流行的硅基前驱体材料的结构与性能,其中包括二氯硅烷(DCS)、乙硅烷(DS)、八甲基环四硅氧烷(OMCTS)、四甲基硅烷(4MS)、六氯乙硅烷(HCDS)、双(叔丁氨基)硅烷(BTBAS)、双(二乙氨基)硅烷(BDEAS)、三(二甲胺基)硅烷(3DMAS)和三甲硅烷基胺(TSA)。系统介绍了硅基前驱体的应用现状和研究进展,并对其合成和提纯工艺进行了探讨。 展开更多
关键词 集成电路(IC) 前驱 化学气相沉积(CVD) 原子层沉积 提纯工艺
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高纯三甲硅烷基胺制备工艺的技术进展
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作者 董玉成 王新鹏 +2 位作者 郭永洁 杨振建 陈建永 《低温与特气》 CAS 2023年第4期1-5,共5页
三甲硅烷基胺是集成电路制造中重要的硅基前驱体,广泛用于高深宽比结构的硅介电膜沉积。介绍了合成三甲硅烷基胺的相关反应原理,综述了高纯三甲硅烷基胺的制备工艺,分析了各自的优点及不足,并展望了未来的发展趋势。
关键词 三甲烷基胺 前驱 先进制程
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我国含硅涂料具备相当的经营规模
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《有机硅氟资讯》 2004年第8期15-16,共2页
我国溶剂型有机硅涂料产量约4000吨/年,研发热点主要集中在水性化、偶联剂、新型有机硅单体以及含硅水性无机涂料等,目前己经具备相当的经营规模和技术水平。有机硅改性丙烯酸水分散体涂料综合了两种树脂的优点,具有优异的耐候性、耐洗... 我国溶剂型有机硅涂料产量约4000吨/年,研发热点主要集中在水性化、偶联剂、新型有机硅单体以及含硅水性无机涂料等,目前己经具备相当的经营规模和技术水平。有机硅改性丙烯酸水分散体涂料综合了两种树脂的优点,具有优异的耐候性、耐洗刷性和抗沾污性,同时作为水性涂料,将高性能与环保性相结合,是国内外涂料界研究的一个热点。有机硅改性涂料研究的重点是提高硅丙乳液聚合的稳定性,提高有机硅在改性树脂中含量,以获得优异性能的硅丙乳液。国外已开发出耐久性超过10年以上的保光、抗沾污性良好的硅丙涂料。国内有的单位正推广有机硅含量15%—25% 展开更多
关键词 中国 涂料 经营规模 产量 烷偶联剂 前驱
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含硅涂料重放异彩
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《有机硅氟资讯》 2003年第10期33-33,36,共2页
目前全国溶剂型有机硅涂料产量约4000t/a,研发热点主要集中在水性化偶联剂。新型有机硅单体以及含硅水性无机涂料等。一、有机硅改性丙烯酸水分散体有机硅改性丙烯酸水分散体涂料综合了两种树脂的优点,具有优异的耐候性、耐洗刷性和抗... 目前全国溶剂型有机硅涂料产量约4000t/a,研发热点主要集中在水性化偶联剂。新型有机硅单体以及含硅水性无机涂料等。一、有机硅改性丙烯酸水分散体有机硅改性丙烯酸水分散体涂料综合了两种树脂的优点,具有优异的耐候性、耐洗刷性和抗沾污性,同时作为水性涂料,将高性能与环保性相结合,是国内外涂料界研究的一个热点。有机硅改性涂料研究的重点是提高硅丙乳液聚合的稳定性。 展开更多
关键词 涂料 有机律改性丙烯酸水分散 烷偶联剂 前驱
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高吸附性能介孔磁性复合碳球的制备 被引量:5
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作者 韩金玲 陈葵 +3 位作者 武斌 纪利俊 吴艳阳 朱家文 《精细化工》 EI CAS CSCD 北大核心 2020年第4期689-695,709,共8页
以正硅酸乙酯(TEOS)为硅前驱体,间苯二酚-甲醛树脂(RF)为碳源,在表面活性剂十六烷基三甲基溴化铵(CTAB)的辅助作用下,采用原位聚合法制备了介孔磁性复合碳球Fe3O4@C-M。考察了醇水比〔V(乙醇)∶V(水)〕、表面活性剂用量、TEOS用量和水... 以正硅酸乙酯(TEOS)为硅前驱体,间苯二酚-甲醛树脂(RF)为碳源,在表面活性剂十六烷基三甲基溴化铵(CTAB)的辅助作用下,采用原位聚合法制备了介孔磁性复合碳球Fe3O4@C-M。考察了醇水比〔V(乙醇)∶V(水)〕、表面活性剂用量、TEOS用量和水热温度(HT)对碳球的形貌、粒径和表面孔结构的影响。在84 mL乙醇/水混合液〔V(乙醇)∶V(水)=3∶4〕、CTAB 0.6 g、TEOS 4 mL、水热温度100℃下制备得到Fe3O4@C-M,采用TEM、XRD、XPS、BET、TGA、VSM对其进行表征。结果表明,Fe3O4@C-M的比表面积为553m^2/g,较不引入硅前驱体时制备的磁性复合碳球Fe3O4@C-0增大1.7倍,介孔孔容占比由18%增大到83%。考察Fe3O4@C-M对红霉素的吸附性能,饱和吸附量为255 mg/g;用乙酸正丁酯对吸附后材料进行再生,5次循环再生后吸附量维持在初始吸附量的85%以上。 展开更多
关键词 磁性复合碳球 硅前驱体 介孔 吸附 红霉素 功能材料
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Pt-CeO_2/SiO_2 catalyst for CO oxidation in humid air at ambient temperature
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作者 Shirish S.Punde Bruce J.Tatarchuk 《Chinese Journal of Catalysis》 SCIE EI CAS CSCD 北大核心 2017年第3期475-488,共14页
CO self-poisoning and slow surface kinetics pose major challenges to a CO oxidation catalyst that should work at ambient temperature.Furthermore,the presence of moisture would cause passivation of the catalyst A highl... CO self-poisoning and slow surface kinetics pose major challenges to a CO oxidation catalyst that should work at ambient temperature.Furthermore,the presence of moisture would cause passivation of the catalyst A highly active ceria promoted Pt catalyst(4%Pt-12%CeO_2/SiO_2;conversion≥99%at low( 500 ppm) and high( 2500 ppm) CO concentrations was developed for CO oxidation at ambient temperature in humid air.Catalyst preparation variables such as Pt and CeO_2 loading,ceria deposition method,drying and calcination conditions for the ceria and Pt precursors were optimized experimentally.The activity was correlated with surface properties using CO/H_2 chemisorption,O_2-H_2 titration,X-ray diffraction and BET surface area analysis.The method of CeO_2 deposition had a significant impact on the catalytic activity.CeO_2 deposition by impregnation resulted in a catalyst that was three times more active than that prepared by deposition precipitation or CeO_2grafting.O_2-H_2 titration results revealed that the close association of ceria and Pt in the case of CeO_2deposition by impregnation resulted in higher activity.The catalyst support used was also crucial as a silica supported catalyst was five times more active than an alumina supported catalyst.The particle size and pore structure of the catalyst support were also crucial as the reaction was diffusion controlled.The drying and calcination conditions of the ceria and Pt precursors also played a crucial role in determining the catalytic activity.The Pt-CeO_2/SiO_2 catalysts with Pt 2.5 wt%and CeO_2 15 wt%were highly active(TOF 0.02 s^(-1)) and stable(conversion 99%after 15 h) at ambient conditions. 展开更多
关键词 Carbon monoxide oxidation CATALYST Platium CERIA Silica Precursor O_2-H_2 titration CHEMISORPTION Temperature-programmed reduction
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Processing and properties of 2D SiC/SiC composites by precursor infiltration and pyrolysis 被引量:2
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作者 于海蛟 周新贵 +3 位作者 王洪磊 赵爽 羊建高 黄泽兰 《Journal of Central South University》 SCIE EI CAS 2009年第2期190-194,共5页
Two-dimensional plain-weave silicon carbide fiber fabric reinforced silicon carbide(2D-SiC/SiC)composites were molded by stacking method and densified through precursor infiltration and pyrolysis(PIP)process.SiC coati... Two-dimensional plain-weave silicon carbide fiber fabric reinforced silicon carbide(2D-SiC/SiC)composites were molded by stacking method and densified through precursor infiltration and pyrolysis(PIP)process.SiC coating was deposited as the fiber/matrix interphase layer by chemical vapor deposition(CVD)technique.Fiber/matrix debonding and relatively long fiber pullouts were observed on the fracture surfaces.Additionally,the flexural strength and elastic modulus of the composites with and without fiber/matrix interphase layer were investigated using three-point bending test and single-edge notched beam test.The results show that the fiber fraction and the porosity of 2D-SiC/SiC composites with and without coating are 27.2%(volume fraction)and 11.1%,and 40.7%(volume fraction)and 7.5%,respectively.And the flexural strength and elastic modulus of 2D-SiC/SiC composites with and without coating are 363.3 MPa and 127.8 GPa,and 180.2 MPa and 97.2 GPa,respectively.With a proper thickness,the coating can effectively adjust the fiber/matrix interface,thus causing a dramatic increase in the mechanical properties of the composites. 展开更多
关键词 SiC/SiC composites COATING precursor infiltration and pyrolysis chemical vapor deposition
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Tetraalkylammonium Fluorosilicates as Precursors for Electrochemical Deposition of Silicon Coatings. Synthesis and Thermal Stability
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作者 Oleksandr Gudymenko Volodymyr Glushakov Oleg Boiko 《Journal of Chemistry and Chemical Engineering》 2015年第6期371-374,共4页
Several TAAFS (tetraalkylammonium hexafluorosilicates) with different cations were synthesized. Their thermal properties were studied showing that obtained complexes are stable enough to be suitable for electrochemi... Several TAAFS (tetraalkylammonium hexafluorosilicates) with different cations were synthesized. Their thermal properties were studied showing that obtained complexes are stable enough to be suitable for electrochemical deposition of silicon coatings under temperatures at least up to 200 ℃. 展开更多
关键词 TAAFS electrochemical deposition Silicon coatings SYNTHESIS thermal stability.
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