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氯化氢热处理对硅少子产生寿命的影响
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作者 朱建生 《微电子学与计算机》 CSCD 北大核心 1989年第6期14-15,共2页
本文主要介绍,在热氧化时气氛中加入百分之几的HCl会使少数载流子的寿命有咀显改善。并较系统地阐述了HCl含量、热处理温度和时间、氧气和氮气气氛等因素对硅少子产生寿命的影响。实验结果表明,寿命的畏高在1150℃左右最为有效。
关键词 氯化氢 热处理 硅少子 寿命
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1.1μm波段InGaAsP/InP DH LED的新应用——硅少数载流子寿命的测试
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作者 张万生 李胜瑞 《半导体情报》 1989年第6期11-14,共4页
本文介绍了1.1微米波段InGaAsP/InP DH LED作为硅少数载流子测试光源的必要性,论述了这一新应用的意义。介绍了1.09μm InGaAsP/InPDH大功率LED的研制要点。最后给出了应用结果,硅少子寿命测试仪由于采用了取代氙灯的新型光源而使国内... 本文介绍了1.1微米波段InGaAsP/InP DH LED作为硅少数载流子测试光源的必要性,论述了这一新应用的意义。介绍了1.09μm InGaAsP/InPDH大功率LED的研制要点。最后给出了应用结果,硅少子寿命测试仪由于采用了取代氙灯的新型光源而使国内外长期不能测试低寿命、低电阻率、大直径硅单晶的技术难题得以解决。 展开更多
关键词 1.1μm波段 硅少子 寿命测试
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Effect of Annealing on Aluminum Oxide Passivation Layer for Crystalline Silicon Wafer
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作者 Teng-Yu Wang Cheng-Chi Liu +2 位作者 Chien-Hsiung Hon Chen-Hsun Du Chung-Yuan Kung 《Journal of Energy and Power Engineering》 2013年第8期1505-1510,共6页
The surface of silicon was passivated by A1203 and acidify using nitric acid with SiOx as the bi-layer, it was expected that hydrogen bonding reduce interface states and negative field effect which yields maximum pass... The surface of silicon was passivated by A1203 and acidify using nitric acid with SiOx as the bi-layer, it was expected that hydrogen bonding reduce interface states and negative field effect which yields maximum passivation. By optimizing the thickness of passivation layer and annealing condition, the minority carrier lifetime of p-type single crystalline Czochralski wafer could be improved from 10 μs to 190 μs. The formation and variation of hillock defect on passivation layer was founded to be affected by the thermal annealing temperature. For the purpose of obtaining high minority carrier lifetime and low hillock defect density simultaneously, using a lower heating and cooling speed in thermal annealing process is suggested. 展开更多
关键词 SILICON PASSIVATION aluminum oxide atomic layer deposition.
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Study on device simulation and performance optimization of the epitaxial crystalline silicon thin film solar cell 被引量:4
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作者 AI Bin ZHANG YongHui DENG YouJun SHEN Hui 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第11期3187-3199,共13页
Because crystalline silicon thin film (CSiTF) solar cells possess the advantages of crystalline silicon solar cells such as high ef- ficiency and stable performance and those of thin film solar cells such as low cos... Because crystalline silicon thin film (CSiTF) solar cells possess the advantages of crystalline silicon solar cells such as high ef- ficiency and stable performance and those of thin film solar cells such as low cost and so on, it is regarded as the next genera- tion solar cell technology, which is most likely to replace the existing crystalline silicon solar cell technology. In this paper, we performed device simulation on the epitaxial CSiTF solar cell by using PCI D software. In order to make simulation results closer to the actual situation, we adopted a more realistic device structure and parameters. On this basis, we comprehensively and systematically investigated the effect of physical parameters of back surface field (BSF) layer, base and emitter, electrical quality of crystalline silicon active layer, situation of surface passivation, internal recombination and p-n junction leakage on the optoelectronic performance of the epitaxial CSiTF solar cell. Among various factors affecting the efficiency of the epitaxial CSiTF solar cell, we identified the three largest efficiency-affecting parameters. They are the base minority carrier diffusion length, the diode dark saturation current and the front surface recombination velocity in order. Through simulations, we found that the base is not the thicker the better, and the base minority carrier diffusion length must be taken into account when deter- mining the optimal base thickness. When the base minority carrier diffusion length is smaller, the optimal base thickness should be less than or equal to the base minority carrier diffusion length; when the base minority carrier diffusion length is larger, the base minority carrier diffusion length should be at least twice the optimal base thickness. In addition, this paper not only illustrates the simulation results but also explains their changes from the aspect of physical mechanisms. Because epitaxi- al CSiTF solar cells possess a device structure that is similar to crystalline silicon solar cells, the conclusions drawn in this pa- per are also applied to crystalline silicon solar cells to a certain extent, particularly to thin silicon solar cells which are the hot- test research topic at present. 展开更多
关键词 solar cell crystalline silicon thin film solar ceils device simulation PC1D simulation
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Improved hetero-interface passivation by microcrystalline silicon oxide emitter in silicon heterojunction solar cells 被引量:4
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作者 Yu Zhang Ridong Cong +4 位作者 Wei Zhao Yun Li Conghui Jin Wei Yu Guangsheng Fu 《Science Bulletin》 SCIE EI CAS CSCD 2016年第10期787-793,共7页
In this paper, we tion (SHJ) solar cells with prepared silicon heterojunc- the structure of p-c-Si/i-a- SiOx:H/n-μc-SiOx:H (a-SiOx:H, oxygen rich amorphous silicon oxide; μc-SiOx:H, microcrystalline silicon o... In this paper, we tion (SHJ) solar cells with prepared silicon heterojunc- the structure of p-c-Si/i-a- SiOx:H/n-μc-SiOx:H (a-SiOx:H, oxygen rich amorphous silicon oxide; μc-SiOx:H, microcrystalline silicon oxide) by plasma-enhanced chemical vapor deposition method. The influence of the n-μc-SiOx:H emitter thickness on the heterointerface passivation in SHJ solar cells was investi- gated. With increasing thickness, the crystallinity of the emitter as well as its dark conductivity increases. Mean- while, the effective minority carrier lifetime (teff) of the SHJ solar cell precursors at low injection level shows a pronounced increase trend, implying that an improved field effect passivation is introduced as the emitter is deposited. And, an increased μTelf is also observed at entire injection level due to the interfacial chemical passivation improved by the hydrogen diffusion along with the emitter deposition. Based on the analysis on the external quantum effi- ciency of the SHJ solar cells, it can be expected that the high efficient SHJ solar cells could be obtained by improving the heterointerface passivation and optimizing the emitter deposition process. 展开更多
关键词 n-μc-SiOx:H emitter Microstructure evolution Heterointerface passivation Silicon heterojunction solar cell
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