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硅片工艺缺陷复检和自动分类系统
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作者 倪锦峰 王家楫 《电子工业专用设备》 2002年第3期143-147,共5页
随着半导体技术的不断发展 ,在硅芯片制造过程中应用行之有效的缺陷检测、分类和管理技术 ,以提高成品率、降低生产成本将变得越来越重要 ,其中最为关键的任务即是能够尽可能早地鉴别缺陷类型及其可能的成因。配以LEICAADCNT系统的LEICA... 随着半导体技术的不断发展 ,在硅芯片制造过程中应用行之有效的缺陷检测、分类和管理技术 ,以提高成品率、降低生产成本将变得越来越重要 ,其中最为关键的任务即是能够尽可能早地鉴别缺陷类型及其可能的成因。配以LEICAADCNT系统的LEICAINS30 0 0缺陷复检和自动分类系统能根据建立的数据库对硅片上的缺陷进行自动复检、分类和统计。帮助工程师们从缺陷类别的角度来实施缺陷管理 ,加速了诊断工艺问题的进程 ,从而达到提升成品率、降低成本的目的。 展开更多
关键词 硅片工艺 缺陷复检 自动分类系统 ADC 成品率 半导体
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瓦克嘉奖超平硅片工艺研发人员
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《上海化工》 CAS 2010年第8期49-49,共1页
德国瓦克化学集团最近将今年的“亚历山大瓦克创新奖”授予两位研发了未来电子部件用超平硅片创新工艺的科研人员。这一行星式研磨技术新工艺综合了研磨和磨削两种加工工艺的优点,为未来生产更具竞争力的高产率、高质量、高效率电子部... 德国瓦克化学集团最近将今年的“亚历山大瓦克创新奖”授予两位研发了未来电子部件用超平硅片创新工艺的科研人员。这一行星式研磨技术新工艺综合了研磨和磨削两种加工工艺的优点,为未来生产更具竞争力的高产率、高质量、高效率电子部件用硅片提供了可能。 展开更多
关键词 硅片工艺 研发 创新工艺 电子部件 研磨技术 科研人员 亚历山大 加工工艺
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AATI勇于打破传统采用0.35微米硅片工艺制造新一代电源管理器件
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作者 代君利 《电子测试》 2003年第10期25-25,共1页
计算机、通信、消费类电子等诸多产品领域的高速发展,带动了与之配套的电源管理等基础产品市场的繁荣,中国电源市场在全球市场中的地位呈上升态势,为了更好地服务于中国内地市场,日前,AATI在上海、北京、深圳三地举办'低电压电源技... 计算机、通信、消费类电子等诸多产品领域的高速发展,带动了与之配套的电源管理等基础产品市场的繁荣,中国电源市场在全球市场中的地位呈上升态势,为了更好地服务于中国内地市场,日前,AATI在上海、北京、深圳三地举办'低电压电源技术与应用研讨会',来自AATI美国总部产品经理Julius Sarki(右一)、Erik Ogren(右二)、韩国区FAE经理Jo Han(右四)以及大中国地区总经理姚宥辰(右三)齐聚会场,AATI非常看好中国良好的市场发展环境和发展潜力,希望能够直接把AATI技术创新和全面电源管理半导体产品带入中国。AATI将如何进一步拓展在华业务以及AATI与竞争对手相比有何优势,AATI大中国地区总经理姚宥辰先生日前在京接受了记者的采访。 展开更多
关键词 中国电源市场 AATI公司 技术创新 0.35微米硅片工艺
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Φ4-6英寸集成电路生产线上工艺硅片的缺陷研究
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作者 邹子英 闵靖 《上海计量测试》 1999年第4期37-38,41,共3页
我们调研了上海的Φ4-6英寸现代集成电路(IC)生产线上工艺流程中的硅片引入的诱生缺陷,并与原小直径地生产线上硅片的诱生缺陷作了比较,依据缺陷理论和利用择优腐蚀技术,研究了诱生缺陷的种类。缺陷的密度和引起的原因。研究结果... 我们调研了上海的Φ4-6英寸现代集成电路(IC)生产线上工艺流程中的硅片引入的诱生缺陷,并与原小直径地生产线上硅片的诱生缺陷作了比较,依据缺陷理论和利用择优腐蚀技术,研究了诱生缺陷的种类。缺陷的密度和引起的原因。研究结果表明在现代IC生产线上存在三种主要的诱生缺陷。它们是MOS电路中因离子注入而产生的弗兰克不全位错,因薄膜应力和高浓度替位杂质产生的压缩应力而诱生的位错以及在双极型电路中薄膜应力和杂质压缩应力所产生的位错。 展开更多
关键词 IC 生产线 工艺硅片 制造工艺 诱生缺陷
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8英寸的期望
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作者 陈钢 《互联网周刊》 2003年第30期38-39,共2页
中报显示,有研硅股仍然在亏损的泥潭中挣扎,8英寸硅片的投产能否使该公司脱胎换骨?
关键词 8英寸芯片 集成电路 硅片工艺 生产线
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A 10 Gb/s laser diode driver in 0.35 μm SiGe BiCMOS technology
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作者 吴松昌 冯军 +1 位作者 章丽 李伟 《Journal of Southeast University(English Edition)》 EI CAS 2009年第3期309-312,共4页
This paper discusses the design of a 10 Gb/s laser diode driver implemented in SiGe BiCMOS technology. The laser diode driver is composed of an input buffer, a predriver circuit and an output current switch stage. Wit... This paper discusses the design of a 10 Gb/s laser diode driver implemented in SiGe BiCMOS technology. The laser diode driver is composed of an input buffer, a predriver circuit and an output current switch stage. With the current mode logic (CML) structure, the input buffer and the predriver circuit have the capability of transmission and amplification of high speed data. By employing MOS-HBT cascode structure as the output stage, the laser diode driver exhibits very high speed and efficiency working at the 10 Gb/s data rate. The core circuit is operated under a 3. 3 V supply, while the output stage is operated under 5.5 V for sufficient headroom across the laser diode. The chip occupies a die area of 600 μm × 800μm. Measurements on chip show clear electrical eye diagrams over 10 Gb/s, which can well meet the specifications defined by SDH STM64/SONET OC192 and a 10 Gb/s Ethemet eye mask. Under a 5. 5 V supply voltage, the maximum output swing is 3.0 V with a 50 12 load (the corresponding modulation current is 60 mA), and the total power dissipation is 660 mW. 展开更多
关键词 laser diode driver MOS-HBT cascode SiCJe BiCMOS technology
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OLED-on-silicon chip with new pixel circuit 被引量:2
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作者 刘艳艳 耿卫东 代永平 《Journal of Central South University》 SCIE EI CAS 2012年第5期1276-1282,共7页
A low power 640×480 OLED-on-silicon chip design that used in microdisplay was presented. A novel pixel circuit was proposed to meet the special requirement of OLED-on-silicon. The novel pixel consists of three tr... A low power 640×480 OLED-on-silicon chip design that used in microdisplay was presented. A novel pixel circuit was proposed to meet the special requirement of OLED-on-silicon. The novel pixel consists of three transistors and one capacitor (3T 1C). It has simple structure and can effectively reduce the current glitch generated during the AC driving from 55 pA to 7.5 pA, so that it can improve the precision of grayscale of display as well as extend the lifetime of (])LED material. Except for the pixel array, low power row driver, column driver and other functional modules were also integrated on the chip. Several techniques were adopted to reduce the power consumption and frequency requirement of the chip. Finally, a 16×3×12 resolution chip was fabricated with standard 0.35 μm CMOS process of CSM and the chip can operate correctly. 展开更多
关键词 organic light-emitting diode (OLED) pixel circuit ac driving
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Fabrication and characterization of squama-shape micro/nano multi-scale silicon material 被引量:2
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作者 ZHANG XiaoSheng ZHU FuYun +1 位作者 SUN GuangYi ZHANG HaiXia 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第12期3395-3400,共6页
This paper presents the fabrication of squama-shape micro/nano multi-scale structures and the analysis of the interaction among different-scale structures during the fabrication processes. Well-designed microstructure... This paper presents the fabrication of squama-shape micro/nano multi-scale structures and the analysis of the interaction among different-scale structures during the fabrication processes. Well-designed microstructures made of inverted pyramids and V-shape grooves are fabricated by KOH wet etching. High-dense high-aspect-ratio (HAR) nanostructures are fabricated atop microstructures by an improved maskless deep reactive ion etching (DRIE) process, with an optimized recipe to form micro/nano dual-scale structures (MNDS). Due to the impact of the profile of microstructures on the shape of nanostructures, dissymmetrical (i.e., squama-shape) nanopillars have been formed on the inclined surfaces of microstructures, while the symmetrical nanopillars are formed on the horizontal surfaces with different formation velocities. Furthermore, the optical properties of MNDS are not sensitive to structural parameters of microstructures, making the sample overcome the lithography limitation of conventional processes for photo-devices. Eventually, three-level structures are fabricated by sputtering a gold thin film on the MNDS, and the profile of MNDS is selective in the deposition of gold particles, which is very useful for practical applications. 展开更多
关键词 deep reactive ion etching (DRIE) multi-scale structures squama-shape hierarchical structure SILICON
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