A CMOS FinFET fabricated on bulk silicon substrate is demonstrated.Besides owning a FinFET structure similar to the original FinFET on SOI,the device combines a grooved planar MOSFET in the Si substrate and the fabric...A CMOS FinFET fabricated on bulk silicon substrate is demonstrated.Besides owning a FinFET structure similar to the original FinFET on SOI,the device combines a grooved planar MOSFET in the Si substrate and the fabrication processes are fully compatible with conventional CMOS process,including salicide technology.The CMOS device,inverter,and CMOS ring oscillator of this structure with normal poly silicon and W/TiN gate electrode are fabricated respectively.Driving current and sub threshold characteristics of CMOS FinFET on Si substrate with actual gate length of 110nm are studied.The inverter operates correctly and minimum per stage delay of 201 stage ring oscillator is 146ps at V d=3V.The result indicates the device is a promising candidate for the application of future VLSI circuit.展开更多
The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire mic...The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire microgyroscope's resonant frequency and quality factor variations over temperature, and the zero bias changing trend over temperature is measured via a closed-loop circuit. Then, in order to alleviate the temperature effects on the performance of the microgyroscope, a kind of temperature compensated method based on the error back propagation(BP)neural network is proposed. By the Matlab simulation, the optimal temperature compensation model based on the BP neural network is well trained after four steps, and the objective error of the microgyroscope's zero bias can achieve 0.001 in full temperature range. By the experiment, the real time operation results of the compensation method demonstrate that the maximum zero bias of the microgyroscope can be decreased from 12.43 to 0.75(°)/s after compensation when the ambient temperature varies from -40 to 80℃, which greatly improves the zero bias stability performance of the microgyroscope.展开更多
Modeling analysis of thin fully depleted SOICMOS technology has been done. Using ISETCAD software,the high temperature characteristics of an SOICMOS transistor were simulated in the temperature range of from 300 to 60...Modeling analysis of thin fully depleted SOICMOS technology has been done. Using ISETCAD software,the high temperature characteristics of an SOICMOS transistor were simulated in the temperature range of from 300 to 600K, and the whole circuit of a laser range finder was simulated with Verilog software. By wafer pro- cessing,a circuit of a laser range finder with complete function and parameters working at high temperatures has been developed. The simulated results agree with the test results. The test of the circuit function and parameters at normal and high temperature shows the realization of an SOICMOS integrated circuit with low power dissipation and high speed, which can be applied in laser range finding. By manufacturing this device, further study on high temperature characteristics of shorter channel SOICMOS integrated circuits can be conducted.展开更多
The thermodynamic and elastic properties of magnesium silicate (MgSiO3) perovskite at high pressure are investigated with the quasi-harmonic Debye model and the first-principles method based on the density functiona...The thermodynamic and elastic properties of magnesium silicate (MgSiO3) perovskite at high pressure are investigated with the quasi-harmonic Debye model and the first-principles method based on the density functional theory. The obtained equation of state is consistent with the available experimental data. The heat capacity and the thermal expansion coefficient agree with the observed values and other calculations at high pressures and temperatures. The elastic constants are calculated using the finite strain method. A complete elastic tensor of MgSiO3 perovskite is determined in the wide pressure range. The geologically important quantities: Young's modulus, Poisson's ratio, Debye temperature, and crystal anisotropy, are derived from the calculated data.展开更多
Hydrogenated silicon nitride films as an effective antireflection and passivation coating of silicon solar cell were prepared on p-type polished silicon substrate (1.0 f^em) by direct LF-PECVD (low frequency plasma...Hydrogenated silicon nitride films as an effective antireflection and passivation coating of silicon solar cell were prepared on p-type polished silicon substrate (1.0 f^em) by direct LF-PECVD (low frequency plasma enhanced chemical vapor deposition) of Centrotherm. The preferable passivation effect was obtained and the refractive index was in the range of 2.017-2.082. The refractive index of the hydrogenated silicon nitride films became larger with the increase of the pressure. Fourier transform infrared spectroscopy was used to study the pressure influence on the film structural properties. The results highlighted high hydrogen bond and high Si-N bonds density in the film, which were greatly influenced by the pressure. The passivation effect of the films was infuenced by the Si dangling bonds density. Finally the effective minority liftetime degradation with time was shown and discussed by considering the relationship between the structural properties and passivation.展开更多
Polycrystalline and epitaxial CoSi 2 films are formed on the n-Si (111) substrates by solid state reaction of the as-deposited Co single-layer and Co/Ti bilayer with Si,respectively at different annealing phase.The C...Polycrystalline and epitaxial CoSi 2 films are formed on the n-Si (111) substrates by solid state reaction of the as-deposited Co single-layer and Co/Ti bilayer with Si,respectively at different annealing phase.The CoSi 2/Si Schottky contacts are measured with the current-voltage and capacitance-voltage (I-V/C-V) techniques within the range of temperature from 90K to room temperature.The measured I-V characteristics have been analyzed with a model based on the inhomogeneity in Schottky barrier height,i.e.,at high temperatures (≥~200K) or low temperatures but with a large bias,the I-V curves can be described by using the thermionic emission theory with a Gaussian distributed barrier height over the whole junction,while at low temperatures and with a small bias,the current is dominated by some small patches with low barrier height.It results in a plateau-like section in the low temperature I-V curves around 10 -7 A.At room temperature,the barrier height of polycrystalline CoSi 2/Si deduced from the I-V curve is about 0 57eV.For epitaxial CoSi 2,the barrier height depends on its final annealing temperature and increases from 0 54eV to 0 60eV with the annealing temperature increasing from 700℃ to 900℃.展开更多
Polycrystalline titanium oxide films are fabricated on silicon by thermally oxidizing titanium.The current- voltage and capacitance- voltage characteristics of the Ag/Ti Ox/Si/Ag capacitors are m easured.The thicknes...Polycrystalline titanium oxide films are fabricated on silicon by thermally oxidizing titanium.The current- voltage and capacitance- voltage characteristics of the Ag/Ti Ox/Si/Ag capacitors are m easured.The thickness of the titanium oxide films arranges from15 0 nm to2 5 0 nm,and their dielectric constants are within40~ 87.As the oxida- tion tim e is shortened,the fixed charges of the titanium oxide films become less and the leakage current characteris- tics becom e better.展开更多
A physically based analytical model was developed to predict the performance of the plateau observed in the gate C-V characteristics of strained-Si/SiGe pMOSFET.Experimental results were used to validate this model.Th...A physically based analytical model was developed to predict the performance of the plateau observed in the gate C-V characteristics of strained-Si/SiGe pMOSFET.Experimental results were used to validate this model.The extracted parameters from our model were tOX=20 nm,ND=1×1016cm 3,tSSi=13.2 nm,consistent with the experimental values.The results show that the simulation results agree with experimental data well.It is found that the plateau can be strongly affected by doping concentration,strained-Si layer thickness and mass fraction of Ge in the SiGe layer.The model has been implemented in the software for strained silicon MOSFET parameter extraction,and has great value in the design of the strained-Si/SiGe devices.展开更多
In order to remove the low turbidity present in surface water, a novel metal-polysilicate coagulant was used to treat the raw water taken from Tanjiang River in Guangdong Province. This study on the effects of Al/Fe ...In order to remove the low turbidity present in surface water, a novel metal-polysilicate coagulant was used to treat the raw water taken from Tanjiang River in Guangdong Province. This study on the effects of Al/Fe molar ratio on the performance of a complex compound formed by polysilicic acid, aluminium and ferric salt (PAFS) showed that PAFS with Al/Fe ratio of 10:3 seemed to have the best coagulation performance in removing turbidity and color. Experimental results showed that under the conditions of polymerization time of 15 d, sedimentation time of 12 min, and pH of 6?8, PAFS with Al/Fe molar ratio of 10:3 had the best coagulation efficiency and lowest residual Al concentration. The turbid- ity decreased from 23.8 NTU to 3.23 NTU and the residual Al concentration was only 0.165 mg/L in the product water. It could be speculated that colloidal impurities and particulate Al were removed by adsorption bridging and electrical neu- tralization of long chain inorganic polymer coagulants.展开更多
Fluidization characteristics of silicon particle system are studied by the pressure fluctuation method.The existence of fine particles in the system can improve fluidization. Silicon particles with a wide size distrib...Fluidization characteristics of silicon particle system are studied by the pressure fluctuation method.The existence of fine particles in the system can improve fluidization. Silicon particles with a wide size distribution,preferably with some fines, behave as Group A particles according to Geldart classification, although the system belongs to Group B actually. The system is also approved to be suitable for organochlorosilane monomer production using a fluidized bed reactor. Experimental data obtained in this work are important for the design and operation of commercial fluidized bed reactors for the production of organochlorosilane monomers.展开更多
Predicting the lifetime of polymeric insulators is one of the most important research topics in studying the life cycle of high voltage insulators in the power transmission and distribution networks. HTV (high temper...Predicting the lifetime of polymeric insulators is one of the most important research topics in studying the life cycle of high voltage insulators in the power transmission and distribution networks. HTV (high temperature vulcanized) silicone rubber is a high performance dielectric material used within electrical power equipment, in particular transmission and distribution insulators. In this paper, we proposed a new approach using the Newton's method and Lagrange method to predict the aging of HTV silicone rubber that are subjected to multiple stress conditions. Concentration of chemical elements such as carbon, oxygen, silicon and aluminum were obtained and evaluated using a SEM (scanning electron microscope) with EDS (energy dispersive X-ray spectroscopy). Curve fitting using the Newton's and Lagrange interpolation methods yield useful linear interpolation equations that describe the aging characteristic of the specimens under study. This approach can be applied to predict the change in chemical concentration of polymeric insulators over the life cycle with good accuracy.展开更多
Two inner salt carbocyanines were filmed chemically on the Si surface through Si-O-C bond. The structures were characterized by SERS and XPS. And the spectral response and surface photovoltage spectrum were measured. ...Two inner salt carbocyanines were filmed chemically on the Si surface through Si-O-C bond. The structures were characterized by SERS and XPS. And the spectral response and surface photovoltage spectrum were measured. These results show that the Si wafer can be sensitized by dyes, and the filmed Si wafers have photovoltage effect.展开更多
The analysis of solar cell performance has been done by simulating the external I-V characteristics of n +/p/p + single crystal silicon solar cell under high light intensity and 1.5 air mass (AM). This method allows t...The analysis of solar cell performance has been done by simulating the external I-V characteristics of n +/p/p + single crystal silicon solar cell under high light intensity and 1.5 air mass (AM). This method allows the maximization of solar cell efficiency. To fabricate low-cost n +/p/p + single crystal silicon solar cells, solid source of doped phosphorous and boron was used.展开更多
A set of experiments was designed to study the power performance of a c-Si and a pc-Si cell when exposed to various levels of high illumination. The light concentration ratio, C, ranges from C 〈 1, up to C ≈ 26. An ...A set of experiments was designed to study the power performance of a c-Si and a pc-Si cell when exposed to various levels of high illumination. The light concentration ratio, C, ranges from C 〈 1, up to C ≈ 26. An experimental set up was built for the purposes of this project. PV cell modeling is outlined in this paper for isc, Voc and the PV cell temperature, Tc, which predicts those quantities. There the behaviour of the two PV-cells at both transient out steady state conditions is studied. Predicted values are compared against measured ones. A comparison of the experimental values against the theoretically predicted ones is performed for the range C 〈 1 to C ≈ 26. Power recovery is tried through heat removal from both sides of the PV-cells by air forced flow. Experiments show recovery whose degree is close to 100% for low C values. On the other hand, as C grows higher, P~ starts decreasing too. PV cell temperatures reached up to 136 ℃ for C = 25. This is a challenge as reduction of temperature delivers a good amount of heat, in the cogeneration effect, while it has a positive impact to power recovery of the PV cell.展开更多
文摘A CMOS FinFET fabricated on bulk silicon substrate is demonstrated.Besides owning a FinFET structure similar to the original FinFET on SOI,the device combines a grooved planar MOSFET in the Si substrate and the fabrication processes are fully compatible with conventional CMOS process,including salicide technology.The CMOS device,inverter,and CMOS ring oscillator of this structure with normal poly silicon and W/TiN gate electrode are fabricated respectively.Driving current and sub threshold characteristics of CMOS FinFET on Si substrate with actual gate length of 110nm are studied.The inverter operates correctly and minimum per stage delay of 201 stage ring oscillator is 146ps at V d=3V.The result indicates the device is a promising candidate for the application of future VLSI circuit.
基金The National High Technology Research and Development Program of China (863 Program)(No.2002AA812038)the NationalNatural Science Foundation of China (No.60974116)
文摘The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire microgyroscope's resonant frequency and quality factor variations over temperature, and the zero bias changing trend over temperature is measured via a closed-loop circuit. Then, in order to alleviate the temperature effects on the performance of the microgyroscope, a kind of temperature compensated method based on the error back propagation(BP)neural network is proposed. By the Matlab simulation, the optimal temperature compensation model based on the BP neural network is well trained after four steps, and the objective error of the microgyroscope's zero bias can achieve 0.001 in full temperature range. By the experiment, the real time operation results of the compensation method demonstrate that the maximum zero bias of the microgyroscope can be decreased from 12.43 to 0.75(°)/s after compensation when the ambient temperature varies from -40 to 80℃, which greatly improves the zero bias stability performance of the microgyroscope.
文摘Modeling analysis of thin fully depleted SOICMOS technology has been done. Using ISETCAD software,the high temperature characteristics of an SOICMOS transistor were simulated in the temperature range of from 300 to 600K, and the whole circuit of a laser range finder was simulated with Verilog software. By wafer pro- cessing,a circuit of a laser range finder with complete function and parameters working at high temperatures has been developed. The simulated results agree with the test results. The test of the circuit function and parameters at normal and high temperature shows the realization of an SOICMOS integrated circuit with low power dissipation and high speed, which can be applied in laser range finding. By manufacturing this device, further study on high temperature characteristics of shorter channel SOICMOS integrated circuits can be conducted.
基金This work was supported by the National Natural Science Foundation of China (No.11064007 and No.11164013), the Natural Science Foundation of Gansu Province of China (No.1014RJZA046), the Program for New Century Excellent Talents in University, and the Key Project of Chinese Ministry of Education (No.209127).
文摘The thermodynamic and elastic properties of magnesium silicate (MgSiO3) perovskite at high pressure are investigated with the quasi-harmonic Debye model and the first-principles method based on the density functional theory. The obtained equation of state is consistent with the available experimental data. The heat capacity and the thermal expansion coefficient agree with the observed values and other calculations at high pressures and temperatures. The elastic constants are calculated using the finite strain method. A complete elastic tensor of MgSiO3 perovskite is determined in the wide pressure range. The geologically important quantities: Young's modulus, Poisson's ratio, Debye temperature, and crystal anisotropy, are derived from the calculated data.
文摘Hydrogenated silicon nitride films as an effective antireflection and passivation coating of silicon solar cell were prepared on p-type polished silicon substrate (1.0 f^em) by direct LF-PECVD (low frequency plasma enhanced chemical vapor deposition) of Centrotherm. The preferable passivation effect was obtained and the refractive index was in the range of 2.017-2.082. The refractive index of the hydrogenated silicon nitride films became larger with the increase of the pressure. Fourier transform infrared spectroscopy was used to study the pressure influence on the film structural properties. The results highlighted high hydrogen bond and high Si-N bonds density in the film, which were greatly influenced by the pressure. The passivation effect of the films was infuenced by the Si dangling bonds density. Finally the effective minority liftetime degradation with time was shown and discussed by considering the relationship between the structural properties and passivation.
文摘Polycrystalline and epitaxial CoSi 2 films are formed on the n-Si (111) substrates by solid state reaction of the as-deposited Co single-layer and Co/Ti bilayer with Si,respectively at different annealing phase.The CoSi 2/Si Schottky contacts are measured with the current-voltage and capacitance-voltage (I-V/C-V) techniques within the range of temperature from 90K to room temperature.The measured I-V characteristics have been analyzed with a model based on the inhomogeneity in Schottky barrier height,i.e.,at high temperatures (≥~200K) or low temperatures but with a large bias,the I-V curves can be described by using the thermionic emission theory with a Gaussian distributed barrier height over the whole junction,while at low temperatures and with a small bias,the current is dominated by some small patches with low barrier height.It results in a plateau-like section in the low temperature I-V curves around 10 -7 A.At room temperature,the barrier height of polycrystalline CoSi 2/Si deduced from the I-V curve is about 0 57eV.For epitaxial CoSi 2,the barrier height depends on its final annealing temperature and increases from 0 54eV to 0 60eV with the annealing temperature increasing from 700℃ to 900℃.
文摘Polycrystalline titanium oxide films are fabricated on silicon by thermally oxidizing titanium.The current- voltage and capacitance- voltage characteristics of the Ag/Ti Ox/Si/Ag capacitors are m easured.The thickness of the titanium oxide films arranges from15 0 nm to2 5 0 nm,and their dielectric constants are within40~ 87.As the oxida- tion tim e is shortened,the fixed charges of the titanium oxide films become less and the leakage current characteris- tics becom e better.
基金Projects(51308040203,6139801)supported by National Ministries and Commissions,ChinaProjects(72105499,72104089)supported by the Fundamental Research Funds for the Central Universities,ChinaProject(2010JQ8008)supported by the Natural Science Basic Research Plan in Shaanxi Province of China
文摘A physically based analytical model was developed to predict the performance of the plateau observed in the gate C-V characteristics of strained-Si/SiGe pMOSFET.Experimental results were used to validate this model.The extracted parameters from our model were tOX=20 nm,ND=1×1016cm 3,tSSi=13.2 nm,consistent with the experimental values.The results show that the simulation results agree with experimental data well.It is found that the plateau can be strongly affected by doping concentration,strained-Si layer thickness and mass fraction of Ge in the SiGe layer.The model has been implemented in the software for strained silicon MOSFET parameter extraction,and has great value in the design of the strained-Si/SiGe devices.
基金Project (No. E9825) supported by the Natural Science Foundation of Heilongjiang Province,China
文摘In order to remove the low turbidity present in surface water, a novel metal-polysilicate coagulant was used to treat the raw water taken from Tanjiang River in Guangdong Province. This study on the effects of Al/Fe molar ratio on the performance of a complex compound formed by polysilicic acid, aluminium and ferric salt (PAFS) showed that PAFS with Al/Fe ratio of 10:3 seemed to have the best coagulation performance in removing turbidity and color. Experimental results showed that under the conditions of polymerization time of 15 d, sedimentation time of 12 min, and pH of 6?8, PAFS with Al/Fe molar ratio of 10:3 had the best coagulation efficiency and lowest residual Al concentration. The turbid- ity decreased from 23.8 NTU to 3.23 NTU and the residual Al concentration was only 0.165 mg/L in the product water. It could be speculated that colloidal impurities and particulate Al were removed by adsorption bridging and electrical neu- tralization of long chain inorganic polymer coagulants.
文摘Fluidization characteristics of silicon particle system are studied by the pressure fluctuation method.The existence of fine particles in the system can improve fluidization. Silicon particles with a wide size distribution,preferably with some fines, behave as Group A particles according to Geldart classification, although the system belongs to Group B actually. The system is also approved to be suitable for organochlorosilane monomer production using a fluidized bed reactor. Experimental data obtained in this work are important for the design and operation of commercial fluidized bed reactors for the production of organochlorosilane monomers.
文摘Predicting the lifetime of polymeric insulators is one of the most important research topics in studying the life cycle of high voltage insulators in the power transmission and distribution networks. HTV (high temperature vulcanized) silicone rubber is a high performance dielectric material used within electrical power equipment, in particular transmission and distribution insulators. In this paper, we proposed a new approach using the Newton's method and Lagrange method to predict the aging of HTV silicone rubber that are subjected to multiple stress conditions. Concentration of chemical elements such as carbon, oxygen, silicon and aluminum were obtained and evaluated using a SEM (scanning electron microscope) with EDS (energy dispersive X-ray spectroscopy). Curve fitting using the Newton's and Lagrange interpolation methods yield useful linear interpolation equations that describe the aging characteristic of the specimens under study. This approach can be applied to predict the change in chemical concentration of polymeric insulators over the life cycle with good accuracy.
文摘Two inner salt carbocyanines were filmed chemically on the Si surface through Si-O-C bond. The structures were characterized by SERS and XPS. And the spectral response and surface photovoltage spectrum were measured. These results show that the Si wafer can be sensitized by dyes, and the filmed Si wafers have photovoltage effect.
文摘The analysis of solar cell performance has been done by simulating the external I-V characteristics of n +/p/p + single crystal silicon solar cell under high light intensity and 1.5 air mass (AM). This method allows the maximization of solar cell efficiency. To fabricate low-cost n +/p/p + single crystal silicon solar cells, solid source of doped phosphorous and boron was used.
文摘A set of experiments was designed to study the power performance of a c-Si and a pc-Si cell when exposed to various levels of high illumination. The light concentration ratio, C, ranges from C 〈 1, up to C ≈ 26. An experimental set up was built for the purposes of this project. PV cell modeling is outlined in this paper for isc, Voc and the PV cell temperature, Tc, which predicts those quantities. There the behaviour of the two PV-cells at both transient out steady state conditions is studied. Predicted values are compared against measured ones. A comparison of the experimental values against the theoretically predicted ones is performed for the range C 〈 1 to C ≈ 26. Power recovery is tried through heat removal from both sides of the PV-cells by air forced flow. Experiments show recovery whose degree is close to 100% for low C values. On the other hand, as C grows higher, P~ starts decreasing too. PV cell temperatures reached up to 136 ℃ for C = 25. This is a challenge as reduction of temperature delivers a good amount of heat, in the cogeneration effect, while it has a positive impact to power recovery of the PV cell.