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高深宽比硅台阶落差结构的精密成型
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作者 丁景兵 黄斌 +1 位作者 何凯旋 赵三院 《真空》 CAS 2022年第2期81-84,共4页
针对MEMS深硅台阶刻蚀产生硅草导致器件短路的问题,分析了硅草形成的原因,通过对深硅台阶刻蚀的主要工艺参数,如刻蚀钝化时间、Ar物理轰击设置单因素实验,提出一种基于Bosch工艺,即采用周期性“刻蚀-钝化-预刻蚀”进行精密台阶结构落差... 针对MEMS深硅台阶刻蚀产生硅草导致器件短路的问题,分析了硅草形成的原因,通过对深硅台阶刻蚀的主要工艺参数,如刻蚀钝化时间、Ar物理轰击设置单因素实验,提出一种基于Bosch工艺,即采用周期性“刻蚀-钝化-预刻蚀”进行精密台阶结构落差成型的方法,该方法主要通过大幅度提高预刻蚀偏置功率和合理配置刻蚀钝化时间来进行实验。结果表明:在预刻蚀偏置功率100W、预刻蚀时间0.8s的工艺条件下,可以有效的抑制硅草的产生;台阶刻蚀完成后再采用SF6刻蚀气体对台阶侧壁清扫10s,确保硅草去除完全,此时获得的台阶落差结构平整光滑,刻蚀的梳齿垂直度优于90°±1°。该方法 具有重复性好、工艺简单的特点。 展开更多
关键词 台阶刻蚀 高深宽比 预刻蚀 硅草 BOSCH
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Responses of Phytolith in Guinea Grass(Leymus chinensis) Leaves to Simulated Warming,Nitrogen Deposition and Elevated CO_2 Concentration in Songnen Grassland,Northeast China 被引量:3
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作者 LI Bo FENG Yingying +2 位作者 GUO Jixun JIE Dongmei SHI Lianxuan 《Chinese Geographical Science》 SCIE CSCD 2015年第4期404-413,共10页
Deposited in plant cells and their intercellular space,phytoliths,a special form of silica,could be used to determine information on plant structure and physiology especially their size and content.With the hypothesis... Deposited in plant cells and their intercellular space,phytoliths,a special form of silica,could be used to determine information on plant structure and physiology especially their size and content.With the hypothesis that phytolith in plant would change under variable climate and environment,the dominant plant species in Songnen grassland,guinea grass(Leymus chinensis),was treated by an open-top chamber(OTC) to elevate CO2 concentration,infrared heaters,and artificial nitrogen(N) addition for three years from 2006–2008.Phytoliths were extracted by wet-ashing method and analyzed by variance analysis and so on.We found that the responses to elevated CO2 are complicated,and warming is positive while N addition is negative to the deposition of phytoliths in L.chinensis leaves.Especially,warming could reduce the negative impact of N addition on phytolith in L.chinensis.The short cell's taxonomic in graminea is significant because of no disappearance with simulated environmental changes.The phytolith originated in the long cell and plant intercellular space are more sensitive to elevated CO2 concentration,warming,and N addition,and could become some new indicators for environmental changes.In conclusion,different phytolith types have various responses to simulated warming,N addition and elevated CO2 concentration. 展开更多
关键词 phytolith elevated CO2 warming N addition response
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