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硅-锗异质合金及其在异质结双极晶体管中的应用
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作者 管见 《微电子学》 CAS CSCD 1993年第5期52-59,共8页
八十年代后期发展起来的硅-锗异质结构材料,得益于成熟的硅技术,正在取得令人鼓舞的成果。采用应变层外延技术,已经获得高质量的Ge_xSi_(1-x)/Si异质膜。这些材料已被应用于各种半导体器件的研究之中。异质结双极晶体管是硅-锗异质结构... 八十年代后期发展起来的硅-锗异质结构材料,得益于成熟的硅技术,正在取得令人鼓舞的成果。采用应变层外延技术,已经获得高质量的Ge_xSi_(1-x)/Si异质膜。这些材料已被应用于各种半导体器件的研究之中。异质结双极晶体管是硅-锗异质结构材料的一个典型应用领域。近期研究结果显示出硅-锗异质结双极晶体管(HBT)巨大的潜在优势和在超高频、超高速及低温应用领域的美好前景。本文考察了这种被称为第二代硅的新材料的生长技术及其在异质结双极晶体管中的应用,并简要介绍了国外在硅锗HBT研究方面的一些成果,展望了这种新型器件的发展前景。 展开更多
关键词 硅-锗应变层 双极晶体管 异质结
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Effect of inter-layer strain interaction on the optical properties of Ge/Si(001) island multi-layers
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作者 M. De Seta G. Capelllini +5 位作者 F. Evangelisti C. Ferrari L. Lazzarini G. Salviati R. W. Pengs S.S.Jiang 《Optoelectronics Letters》 EI 2007年第3期173-176,共4页
In this paper we present a study on the influence of the number and the thickness of silicon spacer layer on the optical properties of single-and multi-layers of self assembled Ge/Si(001) islands performed by means of... In this paper we present a study on the influence of the number and the thickness of silicon spacer layer on the optical properties of single-and multi-layers of self assembled Ge/Si(001) islands performed by means of cathodoluminescence spectroscopy,high resolution X-ray diffraction and transmission electron microscopy. In single-layer sample,we do not evidence dependence of the island no-phonon emission peak position on the silicon cap-layer thickness. In multi-layer samples having a thin(33 nm) silicon spacer layer the no-phonon emission energy value progressively blue-shifts for an increasing number of island layers. This is interpreted as an enhanced intermixing driven by the strain interaction existing between island layers. On the contrary,island emission energy position is independent on the number of layers in the sample series having a thicker spacer layer(60 nm) . These findings are consistent with the X-ray diffraction observation that islands belonging to different layers have the same composition. As a consequence we can conclude that multilayers with 60-nm spaced islands layer are more homogeneous and ordered. 展开更多
关键词 应变作用 /(001)多纳米岛 光学性能 自组装
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