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含氢碳膜的生长机制:分子动力学模拟研究低能量CH基团的作用 被引量:2
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作者 宋青 吉利 +4 位作者 权伟龙 张磊 田苗 李红轩 陈建敏 《物理学报》 SCIE EI CAS CSCD 北大核心 2012年第3期111-116,共6页
探索等离子增强化学气相沉积(PECVD)技术中含氢碳膜的生长机理,制备出常态超润滑含氢碳膜是表面工程技术领域的目标之一.基于REBO势函数,采用分子动力学模拟方法,通过对比研究CH基团在清洁金刚石和吸氢金刚石表面的沉积行为,发现低能量C... 探索等离子增强化学气相沉积(PECVD)技术中含氢碳膜的生长机理,制备出常态超润滑含氢碳膜是表面工程技术领域的目标之一.基于REBO势函数,采用分子动力学模拟方法,通过对比研究CH基团在清洁金刚石和吸氢金刚石表面的沉积行为,发现低能量CH基团在清洁金刚石(111)面上的吸附效率大于98%,而在吸氢金刚石(111)面上的吸附效率低1%.结果表明PECVD法制备含氢碳膜时,低能量CH基团对薄膜生长的贡献主要来自于其存表面非饱和IC位置的选择性吸附. 展开更多
关键词 碳膜生长 CH基团 分子动力学模拟
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Atomic Design of Polarity of GaN Films Grown on SIC(0001)
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作者 DAIXian-Qi WUHua-Sheng +2 位作者 XUShi-Hong XIEMao-Hai S.Y.Tong 《Communications in Theoretical Physics》 SCIE CAS CSCD 2004年第4期609-613,共5页
Ab initio total energy calculations are used to determine the interface structure of GaN films grown on 6H-SiC(0001)with different substrate reconstructions.The results indicate that GaN films grown on bare SiC(0001)a... Ab initio total energy calculations are used to determine the interface structure of GaN films grown on 6H-SiC(0001)with different substrate reconstructions.The results indicate that GaN films grown on bare SiC(0001)are of the Ga-polarity,while GaN films grown on SiC(0001)with Si adlayer are of the N-polarity if there is no N-Si interchange at the interface.With the interchange,the GaN films are of the Ga-polarity. 展开更多
关键词 polarity total energy calculation ADLAYER INTERFACE
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Low Temperature Plasma CVD Grown Graphene by Microwave Surface-Wave Plasma CVD Using Camphor Precursor 被引量:1
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作者 Hideo Uchida Hare Ram Aryal +1 位作者 Sudip Adhikari Masayoshi Umeno 《Journal of Physical Science and Application》 2016年第2期34-38,共5页
Hydrocarbon precursor such as methane has been widely used to grow graphene films and the methods of growing quality graphene films are dominated by thermal CVD (chemical vapor deposition) system. Graphene films gro... Hydrocarbon precursor such as methane has been widely used to grow graphene films and the methods of growing quality graphene films are dominated by thermal CVD (chemical vapor deposition) system. Graphene films grown by plasma process are generally highly defective which in turns degrade the quality of the films. Here, using a green precursor, camphor we demonstrate a simple and economical method to get high-quality graphene film on copper substrate by micro wave surface-wave plasma CVD at relatively low temperature 550℃. Graphene film grown using camphor shows superior quality than that of the film grown using methane. Results revealed that camphor precursor is a good alternative to hydrocarbon precursors for graphene research. 展开更多
关键词 CAMPHOR plasma CVD quality graphene plasma induced defects.
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